Quantitative Exposure Assessment of Various Chemical Substances in a Wafer Fabrication Industry Facility

OBJECTIVES: This study was designed to evaluate exposure levels of various chemicals used in wafer fabrication product lines in the semiconductor industry where work-related leukemia has occurred. METHODS: The research focused on 9 representative wafer fabrication bays among a total of 25 bays in a semiconductor product line. We monitored the chemical substances categorized as human carcinogens with respect to leukemia as well as harmful chemicals used in the bays and substances with hematologic and reproductive toxicities to evaluate the overall health effect for semiconductor industry workers. With respect to monitoring, active and passive sampling techniques were introduced. Eight-hour long-term and 15-minute short-term sampling was conducted for the area as well as on personal samples. RESULTS: The results of the measurements for each substance showed that benzene, toluene, xylene, n-butyl acetate, 2-methoxyethanol, 2-heptanone, ethylene glycol, sulfuric acid, and phosphoric acid were non-detectable (ND) in all samples. Arsine was either "ND" or it existed only in trace form in the bay air. The maximum exposure concentration of fluorides was approximately 0.17% of the Korea occupational exposure limits, with hydrofluoric acid at about 0.2%, hydrochloric acid 0.06%, nitric acid 0.05%, isopropyl alcohol 0.4%, and phosphine at about 2%. The maximum exposure concentration of propylene glycol monomethyl ether acetate (PGMEA) was 0.0870 ppm, representing only 0.1% or less than the American Industrial Hygiene Association recommended standard (100 ppm). CONCLUSION: Benzene, a known human carcinogen for leukemia, and arsine, a hematologic toxin, were not detected in wafer fabrication sites in this study. Among reproductive toxic substances, n-butyl acetate was not detected, but fluorides and PGMEA existed in small amounts in the air. This investigation was focused on the air-borne chemical concentrations only in regular working conditions. Unconditional exposures during spills and/or maintenance tasks and by-product chemicals were not included. Supplementary studies might be required.

Acute Arsine (AsH3) Intoxication / 대한신장학회지

The present report describes a case of arsine intoxication. A 36-year-old male technician who handled gas in a semiconductor laboratory was admitted with severe abdominal pain and dark-red-colored urine. He was exposed to arsine gas while changing a gas bomb, since he mistook an arsine bomb for another, a different kind of a bomb. About 30 minutes after exposure, he suffered colicky abdominal pain, nausea, vomiting and dizziness. He noticed gross hematuria one hour later. On hospital in-patient day 2, the 24 h urine arsenic level was >1,000 microgram/day, and the serum arsenic level was 309.4 microgram/L. Since BUN/ creatinine level had risen to 33/2.0 mg/dL at this stage, a hemoperfusion was performed. And then hydration was used to maintain urine output at 2 mL/kg/h. His condition had improved, although he complained of a severe headache which was a neuropathic sequela of arsenic exposure. He was discharged with a normal blood arsine level. To our knowledge, this is the second report of arsine poisoning in Korea but somewhat different from the first case.

Treatment of patients with acute arsine poisoning / 中华急诊医学杂志

Objective To study the characteristics of patients with acute arsine poisoning and its possible treatments. Methods The only use of drugs,or drugs with plasma exchange(PE)were used to treat 36 patients with acute arsine poisoning.The blood haemolysis,enzymes of creatinc kinase(CK),lactate dehydrogenase(LDH),alkaline phosphatase (ALP),alanine aminotransferase(ALT),aspartate aminotransferase(AST),?-hydroxybutyric dehydrogenase(HHBD), total bihrubin(TBIL),indirect bilirubin(IBIL),direct bilirubin(DBIL),blood urea nitrogen(BUN),serum creatinine (Cr)were observed.Results There was an exposure time-effect relation in clinical characteristics,and a linear correlation between the concentrations of arsenic in blood and urine(r=0.718,P=0.019),but no significant correlations were found between the concentrations of arsenic in blood or urine with CK,LDH,ALP,ALT,AST,HHBD,TBIL,IBIL, DBIL,BUN,Cr(P＞0.05).In patients with severe acute arsine poisoning,PE quickly controlled hemolysis within 24 hours,and prevented secondary damage in kidney and other organs,oliguria stage got much shorter,and CK,LDH,ALP, AST,HHBD,TBIL,IBIL,BUN significantly reduced at 24 to 72 hours after PE treatment(P＜0.05).Conclusions The only use of drug was enough for the treatment of mild acute arsine poisoning.To the patients with severe acute arsine poisoning,PE may be an effective method to control its blood hemolysis and prevent complications,which should be taken as early as possible.

A case of Acute Arsine Poisoning with Hemolytic Anemia and Acute Renal Failure / 대한산업의학회지

BACKGROUND: There has been no reported case of arsine poisoning in Korea so far. This article presents the first reported case of arsine poisoning with hemolytic anemia accompanied by acute renal failure. Initially we suspected an infectious agent to be the cause of this case but later discovered that it was arsine poisoning suffered while working at a zinc-smelting industry in the process of recovering the cadmium by-product. We report this case and discuss the arsine poisoning. CASE REPORT: A 27-year-old man employed at a zinc-smelting industry was exposed to arsine while working in the process to recover the cadmium by-product.On the 4th day at work, he had to redissolve defected by-product into a pot and began to experience febrile sensation, diarrhea, upper quadrant abdominal pain, jaundice, and anorexia.After he was admitted to a hospital, the laboratory results showed hemolytic anemia, acute renal failure and elevated concentration of arsenic. He was thus diagnosed as suffering from arsine-poisoning and underwent hem dialysisand supportive therapy.He recovered from the poisoning after51 days and was discharged from the hospital. DISCUSSION: When workers dealing with arsenic-containing material present with hematuria, nausea, vomiting, abdominal pain, and dyspnea followed by hemolysis with acute renal failure, arsine poisoning must be suspected and diagnosis followed by treatment must commence immediately. If any future cases occur, blood and urine samples should be kept in storage so any necessary analysis can be processed later.