Résumé
The fabrication and experimental test results were presented for a micro-electro-mechanical systems (MEMS)-based gas chromatography column. Compared with conventional column, this micro-gas chromatography column is suitable for on-line analysis and monitoring because of the small size, rapid analysis and other characteristics. These 0.5, 1 and 3 m GC columns were fabricated using a deep reactive-ion etching (DRIE) and were coated the stationary phase via a dynamic coating procedure. These GC columns perfectly separated the mixture of benzene, toluene and o-xylene in less than 200 s, where, the 3.0 m of the GC column achieved) a high resolution of 14.3 between toluene and o-xylene and yielded approximately 6160 plates. Moreover, the effect of separation performance for different column length were examined and compared. These GC columns are suitable for the application of a variety of disciplines, including environmental analysis, methane gas probes and homeland security.