RESUMO
Objective: To detect the thickness of silicon coating film for glass injection bottles by focused ion beam (FIB) emission scanning electron microscopy and investigate the stability and uniformity of the film.Methods: The boron silicon coating injection bottles were selected as the experimental samples and treated with such stability experiments as ultrasonic cleaning, high temperature resistance, heat resistance, water resistance, acid resistance and alkali resistance.The samples were vertically cut by the ion beam from an FIB field emission scanning electron microscope, and the thickness of the cutting face was measured by the built-in measuring module of the scanning electron microscope.Results: The thickness of silicon film was stable and uniform.Conclusion: The film thickness of glass bottles can be accurately detected, and the film stability and uniformity can be reflected directly and objectively by using an FIB double beam field emission scanning electron microscope.