The development and applicationof the MEMS

Xing-Ju MENG; Mei-Sheng SHI

The development and applicationof the MEMS / 医疗卫生装备

Xing-Ju MENG; Mei-Sheng SHI.

Chinese Medical Equipment Journal ; (6)2003.

Article in Chinese | WPRIM | ID: wpr-684379

ABSTRACT

ABSTRACT

This paper introduces the development of the MEMS at home and abroad,besides the key technology,the application in medicine and military about the MEMS also expounded in detail.

micro-electro-mechanical system(MEMS); MEMS unit; micromachines

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Full text: Available Index: WPRIM (Western Pacific) Language: Chinese Journal: Chinese Medical Equipment Journal Year: 2003 Type: Article