Effect of argon ion sputtering on the surface composition of some metals and alloys

ABSTRACT

The effect of argon ion sputtering [Ar[+]] on the composition of Cu, Zn, Ag, Fe, Zr, Al, brass, C-steel, Al alloys and different types of stainless steels were studied using Auger Electron Spectroscopy [AES] and X-ray Photoelectron Spectroscopy surface analytical techniques. Argon ion bombardment with an accelerating voltage of 4.5kV causes the formation of new interstitial compounds in case of Al, Fe, Zr and their alloys, while there are no changes for other metals. The peaks corresponding to the new interstitial compounds are overlapping with the peaks related to nitrogen species either in the case of AES or XPS analysis. The produced interstitial compound shows different species which depends on the metal