A High-Sensitivity Gravimetric Biosensor Based on S1 Mode Lamb Wave Resonator.
Sensors (Basel)
; 22(15)2022 Aug 08.
Article
in English
| MEDLINE | ID: covidwho-1994141
ABSTRACT
The development of MEMS acoustic resonators meets the increasing demand for in situ detection with a higher performance and smaller size. In this paper, a lithium niobate film-based S1 mode Lamb wave resonator (HF-LWR) for high-sensitivity gravimetric biosensing is proposed. The fabricated resonators, based on a 400-nm X-cut lithium niobate film, showed a resonance frequency over 8 GHz. Moreover, a PMMA layer was used as the mass-sensing layer, to study the performance of the biosensors based on HF-LWRs. Through optimizing the thickness of the lithium niobate film and the electrode configuration, the mass sensitivity of the biosensor could reach up to 74,000 Hz/(ng/cm2), and the maximum value of figure of merit (FOM) was 5.52 × 107, which shows great potential for pushing the performance boundaries of gravimetric-sensitive acoustic biosensors.
Keywords
Full text:
Available
Collection:
International databases
Database:
MEDLINE
Main subject:
Acoustics
/
Biosensing Techniques
Type of study:
Diagnostic study
Language:
English
Year:
2022
Document Type:
Article
Affiliation country:
S22155912
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