Flexible Solar-Blind Photodetectors Based on β-Ga2O3 Films Transferred by a Stamp-Based Printing Technique

ABSTRACT

A stamp-based printing technique was applied to transfer the β-Ga₂O₃ films grown by pulsed laser deposition (PLD) from Si substrates onto some flexible substrates, such as PET, PEN, and PI. It is demonstrated that the β-Ga₂O₃-based flexible solar-blind photodetectors (SBPDs) exhibit brilliant optoelectrical performances with a low dark current of 1.7 pA at 10 V, a I_254nm/I_dark ratio of 1.2×103, rise (τ_r1 = 0.079 s and τ_r2 = 0.413 s) and decay (τ_d1 = 0.029 s and τ_d2 = 0.316 s) times. In a further step, flexible imaging sensor arrays based on the β-Ga₂O₃/PET were fabricated, which exhibit good imaging capability and resolution. Moreover, wearable UVC-alarms based on the β-Ga₂O₃/PET were realized to monitor the UVC radiation in the environment in real time, which can be used in the COVID-19-related area. IEEE