Very-large-scale-integrated high quality factor nanoantenna pixels.

Metasurfaces precisely control the amplitude, polarization and phase of light, with applications spanning imaging, sensing, modulation and computing. Three crucial performance metrics of metasurfaces and their constituent resonators are the quality factor (Q factor), mode volume (Vm) and ability to control far-field radiation. Often, resonators face a trade-off between these parameters: a reduction in Vm leads to an equivalent reduction in Q, albeit with more control over radiation. Here we demonstrate that this perceived compromise is not inevitable: high quality factor, subwavelength Vm and controlled dipole-like radiation can be achieved simultaneously. We design high quality factor, very-large-scale-integrated silicon nanoantenna pixels (VINPix) that combine guided mode resonance waveguides with photonic crystal cavities. With optimized nanoantennas, we achieve Q factors exceeding 1,500 with Vm less than 0.1 ( λ / n air ) 3 . Each nanoantenna is individually addressable by free-space light and exhibits dipole-like scattering to the far-field. Resonator densities exceeding a million nanoantennas per cm2 can be achieved. As a proof-of-concept application, we show spectrometer-free, spatially localized, refractive-index sensing, and fabrication of an 8 mm × 8 mm VINPix array. Our platform provides a foundation for compact, densely multiplexed devices such as spatial light modulators, computational spectrometers and in situ environmental sensors.

Electrically driven reprogrammable phase-change metasurface reaching 80% efficiency.

Phase-change materials (PCMs) offer a compelling platform for active metaoptics, owing to their large index contrast and fast yet stable phase transition attributes. Despite recent advances in phase-change metasurfaces, a fully integrable solution that combines pronounced tuning measures, i.e., efficiency, dynamic range, speed, and power consumption, is still elusive. Here, we demonstrate an in situ electrically driven tunable metasurface by harnessing the full potential of a PCM alloy, Ge2Sb2Te5 (GST), to realize non-volatile, reversible, multilevel, fast, and remarkable optical modulation in the near-infrared spectral range. Such a reprogrammable platform presents a record eleven-fold change in the reflectance (absolute reflectance contrast reaching 80%), unprecedented quasi-continuous spectral tuning over 250 nm, and switching speed that can potentially reach a few kHz. Our scalable heterostructure architecture capitalizes on the integration of a robust resistive microheater decoupled from an optically smart metasurface enabling good modal overlap with an ultrathin layer of the largest index contrast PCM to sustain high scattering efficiency even after several reversible phase transitions. We further experimentally demonstrate an electrically reconfigurable phase-change gradient metasurface capable of steering an incident light beam into different diffraction orders. This work represents a critical advance towards the development of fully integrable dynamic metasurfaces and their potential for beamforming applications.

Dynamically tunable third-harmonic generation with all-dielectric metasurfaces incorporating phase-change chalcogenides.

Subwavelength nonlinear optical sources with high efficiency have received extensive attention, although strong dynamic controllability of these sources is still elusive. Germanium antimony telluride (GST) as a well-established phase-change chalcogenide is a promising candidate for the reconfiguration of subwavelength nanostructures due to the strong non-volatile change of the index of refraction between its amorphous and crystalline states. Here, we numerically demonstrate an electromagnetically-induced-transparency-based silicon metasurface actively controlled with a quarter-wave asymmetric Fabry-Perot cavity incorporating GST to modulate the relative phase of incident and reflected pump beams. We demonstrate a giant third-harmonic generation (THG) switch with a modulation depth as high as ∼70dB at the resonant band. We also demonstrate the possibility of multi-level THG amplitude modulation for the fundamental C-band by controlling the crystallization fraction of GST at multiple intermediate states. This study shows the high potential of GST-based fast dynamic nonlinear photonic switches for real-world applications ranging from communications to optical computing.

ITO-based microheaters for reversible multi-stage switching of phase-change materials: towards miniaturized beyond-binary reconfigurable integrated photonics.

Inducing a large refractive-index change is the holy grail of reconfigurable photonic structures, a goal that has long been the driving force behind the discovery of new optical material platforms. Recently, the unprecedentedly large refractive-index contrast between the amorphous and crystalline states of Ge-Sb-Te (GST)-based phase-change materials (PCMs) has attracted tremendous attention for reconfigurable integrated nanophotonics. Here, we introduce a microheater platform that employs optically transparent and electrically conductive indium-tin-oxide (ITO) bridges for the fast and reversible electrical switching of the GST phase between crystalline and amorphous states. By the proper assignment of electrical pulses applied to the ITO microheater, we show that our platform allows for the registration of virtually any intermediate crystalline state into the GST film integrated on the top of the designed microheaters. More importantly, we demonstrate the full reversibility of the GST phase between amorphous and crystalline states. To show the feasibility of using this hybrid GST/ITO platform for miniaturized integrated nanophotonic structures, we integrate our designed microheaters into the arms of a Mach-Zehnder interferometer to realize electrically reconfigurable optical phase shifters with orders of magnitude smaller footprints compared to existing integrated photonic architectures. We show that the phase of optical signals can be gradually shifted in multiple intermediate states using a structure that can potentially be smaller than a single wavelength. We believe that our study showcases the possibility of forming a whole new class of miniaturized reconfigurable integrated nanophotonics using beyond-binary reconfiguration of optical functionalities in hybrid PCM-photonic devices.

Dynamic Hybrid Metasurfaces.

Efficient hybrid plasmonic-photonic metasurfaces that simultaneously take advantage of the potential of both pure metallic and all-dielectric nanoantennas are identified as an emerging technology in flat optics. Nevertheless, postfabrication tunable hybrid metasurfaces are still elusive. Here, we present a reconfigurable hybrid metasurface platform by incorporating the phase-change material Ge2Sb2Te5 (GST) into metal-dielectric meta-atoms for active and nonvolatile tuning of properties of light. We systematically design a reduced-dimension meta-atom, which selectively controls the hybrid plasmonic-photonic resonances of the metasurface via the dynamic change of optical constants of GST without compromising the scattering efficiency. As a proof-of-concept, we experimentally demonstrate two tunable metasurfaces that control the amplitude (with relative modulation depth as high as ≈80%) or phase (with tunability >230°) of incident light promising for high-contrast optical switching and efficient anomalous to specular beam deflection, respectively. Our findings further substantiate dynamic hybrid metasurfaces as compelling candidates for next-generation reprogrammable meta-optics.

Synthetic Engineering of Morphology and Electronic Band Gap in Lateral Heterostructures of Monolayer Transition Metal Dichalcogenides.

Heterostructures of two-dimensional transition metal dichalcogenides (TMDs) can offer a plethora of opportunities in condensed matter physics, materials science, and device engineering. However, despite state-of-the-art demonstrations, most current methods lack enough degrees of freedom for the synthesis of heterostructures with engineerable properties. Here, we demonstrate that combining a postgrowth chalcogen-swapping procedure with the standard lithography enables the realization of lateral TMD heterostructures with controllable dimensions and spatial profiles in predefined locations on a substrate. Indeed, our protocol receives a monolithic TMD monolayer (e.g., MoSe2) as the input and delivers lateral heterostructures (e.g., MoSe2-MoS2) with fully engineerable morphologies. In addition, through establishing MoS2xSe2(1-x)-MoS2ySe2(1-y) lateral junctions, our synthesis protocol offers an extra degree of freedom for engineering the band gap energies up to ∼320 meV on each side of the heterostructure junction via changing x and y independently. Our electron microscopy analysis reveals that such continuous tuning stems from the random intermixing of sulfur and selenium atoms following the chalcogen swapping. We believe that, by adding an engineering flavor to the synthesis of TMD heterostructures, our study lowers the barrier for the integration of two-dimensional materials into practical optoelectronic platforms.

Full color generation with Fano-type resonant HfO2 nanopillars designed by a deep-learning approach.

In contrast to lossy plasmonic metasurfaces (MSs), wideband dielectric MSs comprising subwavelength nanostructures supporting Mie resonances are of great interest in the visible wavelength range. Here, for the first time to our knowledge, we experimentally demonstrate a reflective MS consisting of a square-lattice array of hafnia (HfO2) nanopillars to generate a wide color gamut. To design and optimize these MSs, we use a deep-learning algorithm based on a dimensionality reduction technique. Good agreement is observed between simulation and experimental results in yielding vivid and high-quality colors. We envision that these structures not only empower the high-resolution digital displays and sensitive colorimetric biosensors but also can be applied to on-demand applications of beaming in a wide wavelength range down to deep ultraviolet.

Extending chip-based Kerr-comb to visible spectrum by dispersive wave engineering.

Anomalous group velocity dispersion is a key parameter for generating bright solitons, and thus wideband Kerr frequency combs. Extension of the frequency combs spectrum to visible wavelengths has been a major challenge because of the strong normal dispersion of conventional photonic materials at these wavelengths. In this paper, we numerically demonstrate a wideband frequency comb extending from near-infrared to visible wavelengths (∼1200 nm to 650 nm). The proposed frequency comb micro-resonator takes advantage of a wideband blue-shifted anomalous dispersion, achieved in an optimized over-etched silicon nitride waveguide and strong power transfer to shorter wavelengths through radiative dispersive waves, achieved by modulating the dispersion in a coupled resonator architecture. We show the possibility of obtaining a close to visible dispersive Cherenkov radiation peak that is only 10 dB below the overall comb peak and can be tuned by adjusting the coupling structure in the coupled resonator architecture.

Dielectric metasurfaces solve differential and integro-differential equations.

Leveraging subwavelength resonant nanostructures, plasmonic metasurfaces have recently attracted much attention as a breakthrough concept for engineering optical waves both spatially and spectrally. However, inherent ohmic losses concomitant with low coupling efficiencies pose fundamental impediments over their practical applications. Not only can all-dielectric metasurfaces tackle such substantial drawbacks, but also their CMOS-compatible configurations support both Mie resonances that are invariant to the incident angle. Here, we report on a transmittive metasurface comprising arrayed silicon nanodisks embedded in a homogeneous dielectric medium to manipulate phase and amplitude of incident light locally and almost independently. By taking advantage of the interplay between the electric/magnetic resonances and employing general concepts of spatial Fourier transformation, a highly efficient metadevice is proposed to perform mathematical operations including solution of ordinary differential and integro-differential equations with constant coefficients. Our findings further substantiate dielectric metasurfaces as promising candidates for miniaturized, two-dimensional, and planar optical analog computing systems that are much thinner than their conventional lens-based counterparts.

Analog optical computing based on a dielectric meta-reflect array.

In this Letter, we realize the concept of analog computing using an engineered gradient dielectric meta-reflect-array. The proposed configuration consists of individual subwavelength silicon nanobricks, in combination with a fused silica spacer and silver ground plane, realizing a reflection beam with full phase coverage of 2π degrees, as well as an amplitude range of 0 to 1. Spectrally overlapping electric and magnetic dipole resonances, such high-index dielectric metasurfaces can locally and independently manipulate the amplitude and phase of the incident electromagnetic wave. This practically feasible structure overcomes substantial limitations imposed by plasmonic metasurfaces such as absorption losses and low polarization conversion efficiency in the visible range. Using such CMOS-compatible and easily integrable platforms promises highly efficient ultrathin planar wave-based computing systems that circumvent the drawbacks of conventional bulky lens-based signal processors. Based on these key properties and the general concept of spatial Fourier transformation, we design and realize broadband mathematical operators such as the differentiator and integrator in the telecommunication wavelengths.

Analog computing by Brewster effect.

Optical computing has emerged as a promising candidate for real-time and parallel continuous data processing. Motivated by recent progresses in metamaterial-based analog computing [Science343, 160 (2014)SCIEAS0036-807510.1126/science.1242818], we theoretically investigate the realization of two-dimensional complex mathematical operations using rotated configurations, recently reported in [Opt. Lett.39, 1278 (2014)OPLEDP0146-959210.1364/OL.39.001278]. Breaking the reflection symmetry, such configurations could realize both even and odd Green's functions associated with spatial operators. Based on such an appealing theory and by using the Brewster effect, we demonstrate realization of a first-order differentiator. Such an efficient wave-based computation method not only circumvents the major potential drawbacks of metamaterials, but also offers the most compact possible device compared to conventional bulky lens-based optical signal and data processors.

Analog computing using graphene-based metalines.

We introduce the new concept of "metalines" for manipulating the amplitude and phase profile of an incident wave locally and independently. Thanks to the highly confined graphene plasmons, a transmit-array of graphene-based metalines is used to realize analog computing on an ultra-compact, integrable, and planar platform. By employing the general concepts of spatial Fourier transformation, a well-designed structure of such meta-transmit-array, combined with graded index (GRIN) lenses, can perform two mathematical operations, i.e., differentiation and integration, with high efficiency. The presented configuration is about 60 times shorter than the recent structure proposed by Silva et al. [Science343, 160 (2014)SCIEAS0036-807510.1126/science.1242818]; moreover, our simulated output responses are in better agreement with the desired analytical results. These findings may lead to remarkable achievements in light-based plasmonic signal processors at nanoscale, instead of their bulky conventional dielectric lens-based counterparts.

Beam manipulating by gate-tunable graphene-based metasurfaces.

We propose an unprecedented transmit-array configuration which can mold the incident beam by modulating phase and amplitude wavefronts. The transmit-array is composed of patterned graphene metasurfaces as shunt admittance sheets. Thanks to the exceptional features of graphene such as tunability, thinness, low loss, and high confinement of graphene plasmons, the proposed subwavelength structure passes strict touchstones for nano-photonic and opto-electronic applications. Two flat-optics functionalities, i.e., focusing and splitting, are realized by means of the proposed configuration.