Broadband infrared absorber based on a sputter deposited hydrogenated carbon multilayer enhancing MEMS-based CMOS thermopile performance.

Based on pulsed DC sputter deposition of hydrogenated carbon, an absorber optical coating with maximized broadband infrared absorptance is reported. Enhanced broadband (2.5-20 µm) infrared absorptance (>90%) with reduced infrared reflection is achieved by combining a low-absorptance antireflective (hydrogenated carbon) overcoat with a broadband-absorptance carbon underlayer (nonhydrogenated). The infrared optical absorptance of sputter deposited carbon with incorporated hydrogen is reduced. As such, hydrogen flow optimization to minimize reflection loss, maximize broadband absorptance, and achieve stress balance is described. Application to complementary metal-oxide-semiconductor (CMOS) produced microelectromechanical systems (MEMS) thermopile device wafers is described. A 220% increase in thermopile output voltage is demonstrated, in agreement with modeled prediction.

Amorphous dielectric optical coatings deposited by plasma ion-assisted electron beam evaporation for gravitational wave detectors.

Coating thermal noise (CTN) in amorphous coatings is a drawback hindering their application in precision experiments such as gravitational wave detectors (GWDs). Mirrors for GWDs are Bragg's reflectors consisting of a bilayer-based stack of high- and low-refractive-index materials showing high reflectivity and low CTN. In this paper, we report the characterization of morphological, structural, optical, and mechanical properties of high-index materials such as scandium sesquioxide and hafnium dioxide and a low-index material such as magnesium fluoride deposited by plasma ion-assisted electron beam evaporation. We also evaluate their properties under different annealing treatments and discuss their potential for GWDs.

Breath emulator for simulation and modelling of expired tidal breath carbon dioxide characteristics.

BACKGROUND: In this work we describe a breath emulator system, used to simulate temporal characteristics of exhaled carbon dioxide (CO2) concentration waveform versus time simulating how much CO2 is present at each phase of the human lung respiratory process. The system provides a method for testing capnometers incorporating fast response non-dispersive infrared (NDIR) CO2 gas sensing devices - in a clinical setting, capnography devices assess ventilation which is the CO2 movement in and out of the lungs. A mathematical model describing the waveform of the expired CO2 characteristic and influence of CO2 gas sensor noise factors and speed of response is presented and compared with measured and emulated data. OBJECTIVE: A range of emulated capnogram temporal waveforms indicative of normal and restricted respiratory function demonstrated. The system can provide controlled introduction of water vapour and/ or other gases, simulating the influence of water vapour in exhaled breath and presence of other gases in a clinical setting such as anaesthetic agents (eg N2O). This enables influence of water vapour and/ or other gases to be assessed and modelled in the performance of CO2 gas sensors incorporated into capnography systems. As such the breath emulator provides a means of controlled testing of capnometer CO2 gas sensors in a non-clinical setting, allowing device optimisation before use in a medical environment. METHODS: The breath emulator uses a unique combination of mass flow controllers, needle valves and a fast acting switchable pneumatic solenoid valve (FASV), used to controllably emulate exhaled CO2 temporal waveforms for normal and restricted respiratory function. Output data from the described emulator is compared with a mathematical model using a range of input parameters such as time constants associated with inhalation/ exhalation for different parts of the respiratory cycle and CO2 concentration levels. Sensor noise performance is modelled, taking into account input parameters such as sampling period, sensor temperature, sensing light throughput and pathlength. RESULTS: The system described here produces realistic human capnographic waveforms and has the capability to emulate various waveforms associated with chronic respiratory diseases and early stage detection of exacerbations. The system has the capability of diagnosing medical conditions through analysis of CO2 waveforms. Demonstrated in this work the emulator has been used to test NDIR gas sensor technology deployed in capnometer devices prior to formal clinical trialling.

Miniaturised Infrared Spectrophotometer for Low Power Consumption Multi-Gas Sensing.

Concept, design and practical implementation of a miniaturized spectrophotometer, utilized as a mid-infrared-based multi gas sensor is described. The sensor covers an infrared absorption wavelength range of 2.9 to 4.8 um, providing detection capabilities for carbon dioxide, carbon monoxide, nitrous oxide, sulphur dioxide, ammonia and methane. A lead selenide photo-detector array and customized MEMS-based micro-hotplate are used as the detector and broadband infrared source, respectively. The spectrophotometer optics are based on an injection moulded Schwarzschild configuration incorporating optical pass band filters for the spectral discrimination. This work explores the effects of using both fixed-line pass band and linear variable optical filters. We report the effectiveness of this low-power-consumption miniaturized spectrophotometer as a stand-alone single and multi-gas sensor, usage of a distinct reference channel during gas measurements, development of ideal optical filters and spectral control of the source and detector. Results also demonstrate the use of short-time pulsed inputs as an effective and efficient way of operating the sensor in a low-power-consumption mode. We describe performance of the spectrometer as a multi-gas sensor, optimizing individual component performances, power consumption, temperature sensitivity and gas properties using modelling and customized experimental procedures.

Simulation analysis and preparation of a high optical density laser protection filter.

High optical density (OD) filters have been widely used in space observation, optical detection, and laser protection. However, the lack of high OD value filters is restricting their application. This paper reports the formulation of a three-dimensional mesh model that can help predict the effects of pinhole defects, thickness error, and uniformity on the transmittance and OD value of optical filters. A laser protection filter (LPF) with a high OD value was prepared on fused silica using a microwave plasma-assisted pulsed DC reactive sputtering technique. The transmittance and OD value of the LPF were measured. Comparing the designed, measured, and simulated results, we found that the thickness error and uniformity of the layers mainly affected the passband transmittance of the LPF and had little effect on the OD value of the blocking band. In contrast, the pinhole defects were the main factor that decreased the OD value of the blocking band. The average OD values of the prepared LPF in the blocking bands of 527-532 and 755-833 nm were 8.832 and 10.191, respectively. By comparing the transmittance and OD value of the simulated and measured results, we found that the LPF has ${\pm 1}\% $±1% uniformity error and 0.5% pinhole ratio. Suggestions for preparing high OD optical filters are provided, and further improvements are summarized.

Low-cost hyper-spectral imaging system using a linear variable bandpass filter for agritech applications.

Hyperspectral imaging for agricultural applications provides a solution for non-destructive, large-area crop monitoring. However, current products are bulky and expensive due to complicated optics and electronics. A linear variable filter was developed for implementation into a prototype hyperspectral imaging camera that demonstrates good spectral performance between 450 and 900 nm. Equipped with a feature extraction and classification algorithm, the proposed system can be used to determine potato plant health with ∼88% accuracy. This algorithm was also capable of species identification and is demonstrated as being capable of differentiating between rocket, lettuce, and spinach. Results are promising for an entry-level, low-cost hyperspectral imaging solution for agriculture applications.

Durable infrared optical coatings based on pulsed DC-sputtering of hydrogenated amorphous carbon (a-C:H).

Optical properties of low-temperature pulsed DC-sputter deposited ($ {\le} {70° {\rm C}}$≤70°C) hydrogenated carbon are presented. Increasing hydrogen incorporation into the sputter deposited carbon significantly decreases infrared optical absorption due to a decrease in deep absorptive states associated with dangling bonds. Hydrogen flow is optimized (hydrogen flow 3 sccm), achieving the best compromise between increased infrared transmittance and hardness for durable coating performance. Optical, environmental, and durability performance of pulsed DC-sputtered carbon incorporated in multilayer (a-C:H/Ge) infrared antireflective coatings indicates suitability as a durable infrared optical coating for commonly used infrared substrates, including temperature sensitive chalcogenide glass.