Energy-efficient utilization of bipolar optical forces in nano-optomechanical cavities.

Nanoscale all-optical circuits driven by optical forces have broad applications in future communication, computation, and sensing systems. Because human society faces huge challenges of energy saving and emission reduction, it is very important to develop energy-efficient nano-optomechanical devices. Due to their high quality (Q) factors, resonance modes of cavities are capable of generating much larger forces than waveguide modes. Here we experimentally demonstrate the use of resonance modes of double-coupled one-dimensional photonic crystal cavities to generate bipolar optical forces. Attractive and repulsive forces of -6.2 nN and 1.9 nN were obtained with respective launching powers of 0.81 mW and 0.87 mW in the waveguide just before cavities. Supported by flexible nanosprings (spring constant 0.166 N/m), one cavity is pulled to (pushed away from) the other cavity by 37.1 nm (11.4 nm). The shifts of the selected resonance modes of the device are mechanically and thermally calibrated with an integrated nanoelectromechanical system actuator and a temperature-controlled testing platform respectively. Based on these experimentally-obtained relations, probe mode shifts due to the optomechanical effect are decoupled from those due to the thermo-optic effect. Actuated by the third-order even pump mode, the optomechanical shift of the second-order even probe mode is found to be about 2.5 times its thermal shift, indicating a highly efficient conversion of light energy to mechanical energy.

Out-of-plane nanomechanical tuning of double-coupled one-dimensional photonic crystal cavities.

We demonstrate tuning of double-coupled one-dimensional photonic crystal cavities by their out-of-plane nanomechanical deformations. The coupled cavities are pulled by the vertical electrostatic force generated by the potential difference between the device layer and the handle layer in a silicon-on-insulator chip, and the induced deformations are analyzed by the finite element method. Applied with a voltage of 12 V, the cavities obtain a redshift of 0.0405 nm (twice the linewidth) for their second-order odd resonance mode and a blueshift of 0.0635 nm (three times the linewidth) for their second-order even resonance mode, which are mainly attributed to out-of-plane relative displacement. Out-of-plane tuning of coupled cavities does not need actuators and corresponding circuits; thus the device is succinct and compact. This working principle can be potentially applied in chip-level optoelectronic devices, such as sensors, switches, routers, and tunable filters.

Nanoelectromechanical-systems-controlled bistability of double-coupled photonic crystal cavities.

In this Letter, we report an approach to controlling the bistability of double-coupled photonic crystal cavities with a nanoelectromechanical comb drive, in which the optical force and thermo-optic effect form a feedback mechanism to the effective index of the cavities, and the gap width between the cavities is steered by the comb drive. A model based on temporal coupled mode theory is established to analyze this approach. Hysteresis loops characterizing the bistability are experimentally achieved by sweeping the gap width forward and in reverse. In addition, the experiments also demonstrate that the bistability is tunable by varying the input light power.

Tuning of split-ladder cavity by its intrinsic nano-deformation.

A wide-range split-ladder photonic crystal cavity which is tuned by changing its intrinsic gap width is designed and experimentally verified. Different from the coupled cavities that feature resonance splitting into symmetric and anti-symmetric modes, the single split-ladder cavity has only the symmetric modes of fundamental resonance and second-order resonance in its band gap. Finite-difference time-domain simulations demonstrate that bipolar resonance tuning (red shift and blue shift respectively) can be achieved by shrinking and expanding the cavity's gap, and that there is a linear relationship between the resonance shifts and changes in gap width. Simulations also show that the split-ladder cavity can possess a high Q-factor when the total number of air holes in the cavity is increased. Experimentally, comb drive actuator is used to control the extent of the cavity's gap and the variation of its displacements with applied voltage is calibrated with a scanning electron microscope. The measured wavelength of the second-order resonance shifts linearly towards blue with increase in gap width. The maximum blue shift is 17 nm, corresponding to a cavity gap increase of 26 nm with no obvious degradation of Q-factor.