1.
Opt Express
; 21(26): 32623-9, 2013 Dec 30.
Article
in English
| MEDLINE
| ID: mdl-24514856
ABSTRACT
We present the design, fabrication, and characterization of high quality factor (Q ~10(3)) and small mode volume (V ~0.75 (λ/n)(3)) planar photonic crystal cavities from cubic (3C) thin films (thickness ~200 nm) of silicon carbide (SiC) grown epitaxially on a silicon substrate. We demonstrate cavity resonances across the telecommunications band, with wavelengths from 1.25 - 1.6 µm. Finally, we discuss possible applications in nonlinear optics, optical interconnects, and quantum information science.