Microfabrication of axicons by glass blowing at a wafer-level.

This Letter reports on the generation of glass-based axicons realized at the wafer level by means of microfabrication. The technique is based on micro glass blowing allowing parallel fabrication of numerous components at a time. Blowing is achieved due to cavities containing a gas that expands when the wafer stack is introduced in a furnace. Such cavities, generated in a silicon wafer and sealed by a bonded glass wafer, act as pistons pushing locally the other side of the glass wafer where the micro-optical component profile emerges. After cavities' removal by polishing, it is shown that such a component produces nondiffracting Bessel beams.

Diffraction gratings generating orders with selective states of polarization.

We propose specially designed double anisotropic polarization diffraction gratings capable of producing a selective number of diffraction orders and with selective different states of polarization. Different polarization diffraction gratings are demonstrated, including linear polarization with horizontal, vertical and ± 45° orientations, and circular R and L polarization outputs. When illuminated with an arbitrary state of polarization, the system acts as a complete polarimeter where the intensities of the diffraction orders allow measurement of the Stokes parameters with a single shot. Experimental proof-of-concept is presented using a parallel-aligned liquid crystal display operating in a double pass architecture.

Wafer-level fabrication of multi-element glass lenses: lens doublet with improved optical performances.

This Letter reports on the fabrication of glass lens doublets arranged in arrays and realized at wafer level by means of micro-fabrication. The technique is based on the accurate vertical assembly of separately fabricated glass lens arrays. Since each one of these arrays is obtained by glass melting in silicon cavities, silicon is employed as a spacer in order to build a well-aligned and robust optical module. It is shown that optical performance achieved by the lens doublet is better than for a single lens of equivalent numerical aperture, thanks to lower optical aberrations. The technique has good potential to match the optical requirements of miniature imaging systems.

Simple method based on intensity measurements for characterization of aberrations from micro-optical components.

We report a simple method, based on intensity measurements, for the characterization of the wavefront and aberrations produced by micro-optical focusing elements. This method employs the setup presented earlier in [Opt. Express 22, 13202 (2014)] for measurements of the 3D point spread function, on which a basic phase-retrieval algorithm is applied. This combination allows for retrieval of the wavefront generated by the micro-optical element and, in addition, quantification of the optical aberrations through the wavefront decomposition with Zernike polynomials. The optical setup requires only an in-motion imaging system. The technique, adapted for the optimization of micro-optical component fabrication, is demonstrated by characterizing a planoconvex microlens.

Impact of mirror spider legs on imaging quality in Mirau micro-interferometry.

We report the impact on imaging quality of mirror suspensions, referred to as spider legs, used to support the reference mirror in a Mirau micro-interferometer that requires the vertical alignment of lens, mirror, and beamsplitter. Because the light goes from the microlens to the beamsplitter through the mirror plane, the spider legs are a source of diffraction. This impact is studied as a function of different parameters of the spider legs design. Imaging criteria, such as the resolution as well as the symmetry of the imaging system, are determined using the point spread function and the modulation transfer function of the pupil. These imaging criteria are used to determine the optimum radius of curvature, thickness, and number of legs of the spider structure. We show that 3 curved legs give performances, with specific radius of curvature and thickness, similar to a suspension-free mirror.

Dense arrays of millimeter-sized glass lenses fabricated at wafer-level.

This paper presents the study of a fabrication technique of lenses arrays based on the reflow of glass inside cylindrical silicon cavities. Lenses whose sizes are out of the microfabrication standards are considered. In particular, the case of high fill factor arrays is discussed in detail since the proximity between lenses generates undesired effects. These effects, not experienced when lenses are sufficiently separated so that they can be considered as single items, are corrected by properly designing the silicon cavities. Complete topographic as well as optical characterizations are reported. The compatibility of materials with Micro-Opto-Electromechanical Systems (MOEMS) integration processes makes this technology attractive for the miniaturization of inspection systems, especially those devoted to imaging.

A simple method for quality evaluation of micro-optical components based on 3D IPSF measurement.

This paper presents a simple method based on the measurement of the 3D intensity point spread function for the quality evaluation of high numerical aperture micro-optical components. The different slices of the focal volume are imaged thanks to a microscope objective and a standard camera. Depending on the optical architecture, it allows characterizing both transmissive and reflective components, for which either the imaging part or the component itself are moved along the optical axis, respectively. This method can be used to measure focal length, Strehl ratio, resolution and overall wavefront RMS and to estimate optical aberrations. The measurement setup and its implementation are detailed and its advantages are demonstrated with micro-ball lenses and micro-mirrors. This intuitive method is adapted for optimization of micro-optical components fabrication processes, especially because heavy equipments and/or data analysis are not required.

Arithmetic of focused vortex beams in three-dimensional optical lattice arrays.

In this work, we present a method to generate a 3D lattice of vortex beams. We apply phase look-up tables (LUTs) designed to generate gratings having an arbitrary content of diffraction orders. This phase LUT can be applied to a variety of diffraction optical elements, such as linear phase gratings, blazed diffractive lenses, and spiral phase patterns. We concentrate on combinations of all of these to create 3D structures of vortex beams. In particular, we generate all of these elements in the first output quadrant and eliminate the zero-order diffraction that often unavoidably accompanies these patterns. We discuss different ways of producing these 3D vortex gratings, and how the various output beams are related to the arithmetic of the 3D distribution of topological charges. Experimental results are provided by means of a liquid crystal spatial light modulator.

Liquid crystal spatial light modulator with very large phase modulation operating in high harmonic orders.

Unusually large phase modulation in a commercial liquid crystal spatial light modulator (LCSLM) is reported. Such a situation is obtained by illuminating with visible light a device designed to operate in the infrared range. The phase modulation range reaches 6π radians in the red region of the visible spectrum and 10π radians in the blue region. Excellent diffraction efficiency in high harmonic orders is demonstrated despite a concomitant and non-negligible Fabry-Perot interference effect. This type of SLM opens the possibility to implement diffractive elements with reduced chromatic dispersion or chromatic control.

Generalized diffractive optical elements with asymmetric harmonic response and phase control.

We report a method to generate phase-only diffractive beam splitters allowing asymmetry of the target diffracted orders, as well as providing a tailored phase difference between the diffracted orders. We apply a well-established design method that requires the determination of a set of numerical parameters, and avoids the use of image iterative algorithms. As a result, a phase lookup table is determined that can be used for any situation where a first-order (blazed) diffractive element is modified to produce higher orders with desired intensity and/or phase relation. As examples, we demonstrate the phase difference control on triplicators, as well as on other generalized diffractive elements like bifocal Fresnel lenses and phase masks for the generation of vortex beams. Results are experimentally demonstrated by encoding the calculated phase pattern onto parallel-aligned liquid crystal spatial light modulators.

Generalized phase diffraction gratings with tailored intensity.

We report the generation of continuous phase masks designed to generate a set of target diffraction orders with defined relative intensity weights. We apply a previously reported analytic calculation that requires resolving a single equation with a set of parameters defining the target diffraction orders. Then the same phase map is extended to other phase patterns such as vortex generating/sensing gratings. Results are demonstrated experimentally with a parallel-aligned spatial light modulator.

Enhancement of the broadband modulation diffraction efficiency of liquid-crystal displays.

We report a method to maximize the broadband modulation diffraction efficiency of liquid-crystal spatial light modulators for polychromatic applications requiring a wide range of wavelengths. An optimized encoding pattern based on the minimum Euclidean projection principle is applied in order to increase the diffraction efficiency at large wavelengths that exhibit phase modulation depth lower than 2π. We demonstrate modulation efficiencies over 80% on a wavelength range from 454 to 633 nm, which can reach up to 98% when the range is reduced to 60 nm. Experimental results are shown to confirm the calculations.

Fabrication of spherical microlenses by a combination of isotropic wet etching of silicon and molding techniques.

We report a novel process technology of hemispherical shaped microlenses, using isotropic wet etching of silicon in an acid solution to produce the microlenses molds. Governed by process parameters such as temperature and etchant concentration, the isotropic wet etching is controlled to minimize various defects that appear during the molding creation. From the molds, microlenses are fabricated in polymer by conventional replication techniques such as hot embossing and UV-molding. The characterization of molds and measurements of replicated microlenses demonstrate high smoothness of the surfaces, excellent repeatability of mold fabrication and good optical properties. Using the proposed method, a wide range of lens geometries and lens arrays can be achieved.

Self-interferometric technique for visualization of phase patterns encoded onto a liquid-crystal display.

We report a new self-interferometric technique for visualizing phase patterns that are encoded onto a phase-only liquid-crystal display (LCD). In our approach, the LCD generates both the desired object beam as well as the reference beam. Normally the phase patterns are encoded with a phase depth of 2pi radians, and all of the incident energy is diffracted into the first-order beam. However, by reducing this phase depth, we can generate an additional zero-order diffracted beam, which acts as the reference beam. We work at distances such that these two patterns spatially interfere, producing an interference pattern that displays the encoded phase pattern. This approach was used recently to display the phase vortices of helical Ince-Gaussian beams. Here we show additional experimental results and analyze the process.