ABSTRACT
With their sub-nanometer inter-sheet spacing, few-layer graphenes (FLGs) are alignment-free building blocks for nanosensors based on the inter-sheet effects. In this paper, we have tackled the challenges towards batch fabrication of inter-sheet graphene sensors through controlled layer engineering, edge tailoring and selective electrode fabrication on different atomic layers. An oxygen plasma etching (OPE) technique is developed to remove graphene layer by layer, enabling the batch fabrication of FLGs in a controllable fashion because of the faster speed and readiness of patterning of this process as compared to the conventional mechanical exfoliation. Vapor sensing experiments have shown that 'inter-sheet' sensors possess a higher sensitivity than conventional 'intra-sheet' ones. Vapor sensitivity is improved more than two times in normalized resistance changes by taking the 'inter-sheet' design upon exposure to 0.5% ethanol-nitrogen mixture and 500 Pa water vapor environments, respectively. These remarkable improvements can mainly be attributed to the inter-sheet effects such as electron tunneling, chemical doping, physical insertion and enhanced edge effects. Such effects may result from molecule adsorption/desorption, force/displacement, pressure, surface tension or thermal energy, and can potentially remarkably enrich the applicable transduction mechanisms.