ABSTRACT
A new technique of high-resolution micro-Raman thermometry using anatase TiO2 microparticles (0.5-3 µm) is presented. These very high spatial resolution measurements (280 nm) reveal temperature gradients even within individual microparticles. Potential applications of this technique are demonstrated by probing the temperature distribution of a micro-fabricated heater consisting of a thin silicon nitride (Si-N) membrane with a gold coil on top of the membrane. Using TiO2 microparticle micro-Raman thermometry, the temperature from the outer edge of the coil to the inner portion was measured to increase by ~40 °C. These high spatial resolution microscopic measurements were also used to measure the temperature gradient within the 20 µm wide Si-N between the gold heating coils. 2D numerical simulations of the micro heater temperature distribution are in excellent agreement with the experimental measurements of the temperatures. These measurements illustrate the potential to extend applications of micro-Raman thermometry to obtain temperature details on a sub-micrometer spatial resolution by employing microparticles.
