Miniature Fiber Optic Acoustic Pressure Sensors With Air-Backed Graphene Diaphragms.

Graphene has been known to possess exceptional mechanical properties, including its extremely high Young's modulus and atomic layer thickness. Although there are several reported fiber optic pressure sensors using graphene film, a key question that is not well understood is how the suspended graphene film interacts with the backing air cavity and affects the sensor performance. Based on our previous analytical model, we will show that the sensor performance suffers due to the significantly reduced mechanical sensitivity by the backing cavity. To remedy this limitation, we will, through experimental and numerical methods, investigate two approaches to enhance the sensitivity of fiber optic acoustic pressure sensors using graphene film. First, a graphene-silver composite diaphragm is used to enhance the optical sensitivity by increasing the reflectivity. Compared with a sensor with pure graphene diaphragm, graphene-silver composite can enhance the sensitivity by threefold, while the mechanical sensitivity is largely unchanged. Second, a fiber optic sensor is developed with enlarged backing air volume through the gap between an optical fiber and a silica capillary tube. Experimental results show that the mechanical sensitivity is increased by 10× from the case where the gap side space is filled. For both approaches, signal-to-noise ratio (SNR) is improved due to the enhanced sensitivity, and COMSOL Thermoviscous acoustics simulation compares well with the experimental results. This study is expected to not only enhance the understanding of fluid-structural interaction in sensor design but also benefit various applications requiring high-performance miniature acoustic sensors.

Miniature Diamond-Based Fiber Optic Pressure Sensor with Dual Polymer-Ceramic Adhesives.

Diamond is a good candidate for harsh environment sensing due to its high melting temperature, Young's modulus, and thermal conductivity. A sensor made of diamond will be even more promising when combined with some advantages of optical sensing (i.e., EMI inertness, high temperature operation, and miniaturization). We present a miniature diamond-based fiber optic pressure sensor fabricated using dual polymer-ceramic adhesives. The UV curable polymer and the heat-curing ceramic adhesive are employed for easy and reliable optical fiber mounting. The usage of the two different adhesives considerably improves the manufacturability and linearity of the sensor, while significantly decreasing the error from the temperature cross-sensitivity. Experimental study shows that the sensor exhibits good linearity over a pressure range of 2.0-9.5 psi with a sensitivity of 18.5 nm/psi (R2 = 0.9979). Around 275 °C of working temperature was achieved by using polymer/ceramic dual adhesives. The sensor can benefit many fronts that require miniature, low-cost, and high-accuracy sensors including biomedical and industrial applications. With an added antioxidation layer on the diamond diaphragm, the sensor can also be applied for harsh environment applications due to the high melting temperature and Young's modulus of the material.

Low cost, high performance white-light fiber-optic hydrophone system with a trackable working point.

A working-point trackable fiber-optic hydrophone with high acoustic resolution is proposed and experimentally demonstrated. The sensor is based on a polydimethylsiloxane (PDMS) cavity molded at the end of a single-mode fiber, acting as a low-finesse Fabry-Perot (FP) interferometer. The working point tracking is achieved by using a low cost white-light interferometric system with a simple tunable FP filter. By real-time adjusting the optical path difference of the FP filter, the sensor working point can be kept at its highest sensitivity point. This helps address the sensor working point drift due to hydrostatic pressure, water absorption, and/or temperature changes. It is demonstrated that the sensor system has a high resolution with a minimum detectable acoustic pressure of 148 Pa and superior stability compared to a system using a tunable laser.

On-fiber plasmonic interferometer for multi-parameter sensing.

We demonstrate a novel miniature multi-parameter sensing device based on a plasmonic interferometer fabricated on a fiber facet in the optical communication wavelength range. This device enables the coupling between surface plasmon resonance and plasmonic interference in the structure, which are the two essential mechanisms for multi-parameter sensing. We experimentally show that these two mechanisms have distinctive responses to temperature and refractive index, rendering the device the capability of simultaneous temperature and refractive index measurement on an ultra-miniature form factor. A high refractive index sensitivity of 220 nm per refractive index unit (RIU) and a high temperature sensitivity of -60 pm/ °C is achieved with our device.

Optofluidic microvalve-on-a-chip with a surface plasmon-enhanced fiber optic microheater.

We present an optofluidic microvalve utilizing an embedded, surface plasmon-enhanced fiber optic microheater. The fiber optic microheater is formed by depositing a titanium thin film on the roughened end-face of a silica optical fiber that serves as a waveguide to deliver laser light to the titanium film. The nanoscale roughness at the titanium-silica interface enables strong light absorption enhancement in the titanium film through excitation of localized surface plasmons as well as facilitates bubble nucleation. Our experimental results show that due to the unique design of the fiber optic heater, the threshold laser power required to generate a bubble is greatly reduced and the bubble growth rate is significantly increased. By using the microvalve, stable vapor bubble generation in the microchannel is demonstrated, which does not require complex optical focusing and alignment. The generated vapor bubble is shown to successfully block a liquid flow channel with a size of 125 µm × 125 µm and a flow rate of ∼10 µl/min at ∼120 mW laser power.

Enhanced acoustic sensing through wave compression and pressure amplification in anisotropic metamaterials.

Acoustic sensors play an important role in many areas, such as homeland security, navigation, communication, health care and industry. However, the fundamental pressure detection limit hinders the performance of current acoustic sensing technologies. Here, through analytical, numerical and experimental studies, we show that anisotropic acoustic metamaterials can be designed to have strong wave compression effect that renders direct amplification of pressure fields in metamaterials. This enables a sensing mechanism that can help overcome the detection limit of conventional acoustic sensing systems. We further demonstrate a metamaterial-enhanced acoustic sensing system that achieves more than 20 dB signal-to-noise enhancement (over an order of magnitude enhancement in detection limit). With this system, weak acoustic pulse signals overwhelmed by the noise are successfully recovered. This work opens up new vistas for the development of metamaterial-based acoustic sensors with improved performance and functionalities that are highly desirable for many applications.

MEMS Fabry-Perot sensor interrogated by optical system-on-a-chip for simultaneous pressure and temperature sensing.

We present a micro-electro-mechanical systems (MEMS) based Fabry-Perot (FP) sensor along with an optical system-on-a-chip (SOC) interrogator for simultaneous pressure and temperature sensing. The sensor employs a simple structure with an air-backed silicon membrane cross-axially bonded to a 45° polished optical fiber. This structure renders two cascaded FP cavities, enabling simultaneous pressure and temperature sensing in close proximity along the optical axis. The optical SOC consists of a broadband source, a MEMS FP tunable filter, a photodetector, and the supporting circuitry, serving as a miniature spectrometer for retrieving the two FP cavity lengths. Within the measured pressure and temperature ranges, experimental results demonstrate that the sensor exhibits a good linear response to external pressure and temperature changes.