ABSTRACT
A slim beam deflector that satisfies both a large steering angle and a large area can be very useful in various applications. However, a smaller electrode pitch for a large steering angle and enlargement of its area are trade-off relations due to the limited number of control channels in an electrically tunable beam deflector system. For a large steering angle in the active area where actual diffraction occurs, an indium tin oxide electrode of 2 µm pitch was implemented through a stepper lithography. The via-hole process was developed to expand the reduced active area due to the small electrode pitch. We developed a beam deflector with 7200 controllable channels in an active area of 14.4mm×14.4mm. The maximum steering angle is 7.643° at a wavelength of 532 nm.
