Lateral Extensional Mode Piezoelectric ZnO-on-Nickel RF MEMS Resonators for Back-End-of-Line Integration.

High motional resistance and incompatibility with post-CMOS fabrication due to thermal budget constraints are imperative issues associated with the back-end-of-line integration of lateral extensional vibrating micromechanical resonators. This paper presents piezoelectric ZnO-on-nickel resonators as a viable means for mitigating both of the issues. Lateral extensional mode resonators equipped with thin-film piezoelectric transducers can exhibit much lower motional impedances than their capacitive counterparts due to piezo-transducers' higher electromechanical coupling coefficients. Meanwhile, the employment of electroplated nickel as the structural material allows the process temperature to be kept lower than 300 °C, which is low enough for the post-CMOS resonator fabrication. In this work, various geometrical rectangular and square plates resonators are investigated. Moreover, parallel combination of several resonators into a mechanically coupled array was explored as a systematic approach to lower motional resistance from ~1 kΩs to 0.562 kΩs. Higher order modes were investigated for achieving higher resonance frequencies up to 1.57 GHz. Local annealing by Joule heating was also exploited for quality factor improvement after device fabrication by ~2× enhancement and breaking the record of MEMS electroplated nickel resonators in lowering insertion loss to ~10 dB.

Non-Invasive Lactate Monitoring System Using Wearable Chipless Microwave Sensors With Enhanced Sensitivity and Zero Power Consumption.

Monitoring lactate levels is an established method for determining hyperlactatemia in critically ill patients and assessing aerobic fitness. It is a widely used gold-standard technique in both professional and serious amateur sports. Non-invasive real-time lactate monitoring offers significant advantages over the current technology of finger-prick blood sampling. Possible candidate technology for developing non-invasive real-time lactate monitoring should be highly sensitive, flexible, and capable of real-time monitoring of lactate levels in interstitial fluid or within specific working muscle groups depending on the type of sport. Herein we describe a planar, flexible, passive, chipless tag resonator that is electromagnetically coupled to a reader placed in proximity to the lactate sensor tag. The tag resonator is a thin metallic tracing that can be taped on the skin. The resonance frequency of the tag fluctuates proportionately with changing lactate concentrations in a solution mimicking human interstitial fluid with very high sensitivity. The spectrum of the tag is reflected in the spectrum of the reader, which is a planar microwave resonator designed at a different frequency. The reader could be embedded in a cellphone or an application-specific wearable device for data communication and processing. The tag can accurately and reproducibly measure lactate concentrations in the range of 1 to 10 mM, which is in the physiological range of lactate observed at rest and during intense physical activity. Furthermore, the chrematistics of this technology will allow monitoring of lactate in specific working muscle groups.

Non-invasive continuous-time glucose monitoring system using a chipless printable sensor based on split ring microwave resonators.

This paper reports a highly sensitive, non-invasive sensor for real-time glucose monitoring from interstitial fluid. The structure is comprised of a chip-less tag sensor which may be taped over the patient's skin and a reader, that can be embedded in a smartwatch. The tag sensor is energized through the established electromagnetic coupling between the tag and the reader and its frequency response is reflected on the spectrum of the reader in the same manner. The tag sensor consumes zero power as there is no requirement for any active readout or communication circuitry on the tag side. When measuring changes in glucose concentrations within saline replicating interstitial fluid, the sensor was able to detect glucose with an accuracy of ~ 1 mM/l over a physiological range of glucose concentrations with 38 kHz of the resonance frequency shift. This high sensitivity is attained as a result of the proposed new design and extended field concentration on the tag. The impact of some of the possible interferences on the response of the sensor's performance was also investigated. Variations in electrolyte concentrations within the test samples have a negligible effect on the response of the sensor unless these variations are supra-physiologically large.

Crossed ring anchored disk resonator for self-alignment of the anchor.

Misalignment is a problematic challenge in RF MEMS resonators. It causes asymmetry in the ultra symmetric radial contour mode disk resonators and degrades their performance by increasing the insertion loss and decreasing their quality factors (Q). Self-alignment method seems to be a good solution for misalignment problem, but it cannot be directly applied on high performance ring shape anchored resonators. This paper discusses misalignment effects for the ring shape anchored resonators and proposes a method for reconfiguring its anchor to be compatible with self-alignment process. Simulation results validate that the crossed ring anchor structure has the same resonance characteristics with the complete ring shape anchored resonator.

Design of an ultra low power third order continuous time current mode ΣΔ modulator for WLAN applications.

This paper presents a third order continuous time current mode ΣΔ modulator for WLAN 802.11b standard applications. The proposed circuit utilized feedback architecture with scaled and optimized DAC coefficients. At circuit level, we propose a modified cascade current mirror integrator with reduced input impedance which results in more bandwidth and linearity and hence improves the dynamic range. Also, a very fast and precise novel dynamic latch based current comparator is introduced with low power consumption. This ultra fast comparator facilitates increasing the sampling rate toward GHz frequencies. The modulator exhibits dynamic range of more than 60 dB for 20 MHz signal bandwidth and OSR of 10 while consuming only 914 µW from 1.8 V power supply. The FoM of the modulator is calculated from two different methods, and excellent performance is achieved for proposed modulator.