1.
Appl Opt
; 41(1): 239-44, 2002 Jan 01.
Article
in English
| MEDLINE
| ID: mdl-11900440
ABSTRACT
An x-ray multilayer monochromator with improved resolution and a low specular background is presented. The monochromator consists of a lamellar multilayer amplitude grating with appropriate parameters used at the zeroth diffraction order. The device is fabricated by means of combining deposition of thin films on a nanometer scale, UV lithography, and reactive ion etching. The performance of this new monochromator at photon energies near 1500 eV is shown.