Collective Coupling of 3D Confined Optical Modes in Monolithic Twin Microtube Cavities Formed by Nanomembrane Origami.

We report the monolithic fabrication of twin microtube cavities by a nanomembrane origami method for achieving collective coupling of 3D confined optical modes. Owing to the well-aligned twin geometries, two sets of 3D confined optical modes in twin microtubes are spectrally and spatially matched, by which both the fundamental and higher-order axial modes are respectively coupled with each other. Multiple groups of the coupling modes provide multiple effective channels for energy exchange between coupled microcavities illustrated by the measured spatial optical field distributions. The spectral anticrossing and changing-over features of each group of coupled modes are revealed in experiments and calculations, indicating the occurrence of strong coupling. In addition, the simulated 3D mode profiles of twin microcavities confirm the collective strong coupling behavior, which shows good agreement with experiments. The collective coupling of 3D confined resonant modes promises broad applications in multichannel optical signal processing, nanophotonics, and 3D non-Hermitian systems.

Digital Electrochemistry for On-Chip Heterogeneous Material Integration.

Many modern electronic applications rely on functional units arranged in an active-matrix integrated on a single chip. The active-matrix allows numerous identical device pixels to be addressed within a single system. However, next-generation electronics requires heterogeneous integration of dissimilar devices, where sensors, actuators, and display pixels sense and interact with the local environment. Heterogeneous material integration allows the reduction of size, increase of functionality, and enhancement of performance; however, it is challenging since front-end fabrication technologies in microelectronics put extremely high demands on materials, fabrication protocols, and processing environments. To overcome the obstacle in heterogeneous material integration, digital electrochemistry is explored here, which site-selectively carries out electrochemical processes to deposit and address electroactive materials within the pixel array. More specifically, an amorphous indium-gallium-zinc oxide (a-IGZO) thin-film-transistor (TFT) active-matrix is used to address pixels within the matrix and locally control electrochemical reactions for material growth and actuation. The digital electrochemistry procedure is studied in-depth by using polypyrrole (PPy) as a model material. Active-matrix-driven multicolored electrochromic patterns and actuator arrays are fabricated to demonstrate the capabilities of this approach for material integration. The approach can be extended to a broad range of materials and structures, opening up a new path for advanced heterogeneous microsystem integration.

Self-Assembled Flexible and Integratable 3D Microtubular Asymmetric Supercapacitors.

The rapid development of microelectronics has equally rapidly increased the demand for miniaturized energy storage devices. On-chip microsupercapacitors (MSCs), as promising power candidates, possess great potential to complement or replace electrolytic capacitors and microbatteries in various applications. However, the areal capacities and energy densities of the planar MSCs are commonly limited by the low voltage window, the thin layer of the electrode materials and complex fabrication processes. Here, a new-type three-dimensional (3D) tubular asymmetric MSC with small footprint area, high potential window, ultrahigh areal energy density, and long-term cycling stability is fabricated with shapeable materials and photolithographic technologies, which are compatible with modern microelectronic fabrication procedures widely used in industry. Benefiting from the novel architecture, the 3D asymmetric MSC displays an ultrahigh areal capacitance of 88.6 mF cm-2 and areal energy density of 28.69 mW h cm-2, superior to most reported interdigitated MSCs. Furthermore, the 3D tubular MSCs demonstrate remarkable cycling stability and the capacitance retention is up to 91.8% over 12 000 cycles. It is believed that the efficient fabrication methodology can be used to construct various integratable microscale tubular energy storage devices with small footprint area and high performance for miniaturized electronics.

Self-Assembly of Integrated Tubular Microsupercapacitors with Improved Electrochemical Performance and Self-Protective Function.

Inspired by origami art, we demonstrate a tubular microsupercapacitor (TMSC) by self-assembling two-dimensional (2D) films into a "swiss roll" structure with greatly reduced footprint area. A polymeric framework consisting of swelling hydrogel and polyimide layers ensures excellent ion transport between poly(3,4-ethylenedioxythiophene) (PEDOT)-based electrodes and provides efficient self-protection of the TMSC against external compression up to about 30 MPa. Such TMSCs exhibit an areal capacitance of 82.5 mF cm-2 at 0.3 mA cm-2 with a potential window of 0.8 V, an energy density and power density of 7.73 µWh cm-2 and 17.8 mW cm-2 (0.3 and 45 mA cm-2), and an improved cycling stability with a capacitance retention up to 96.6% over 5000 cycles. Furthermore, as-fabricated TMSC arrays can be detached from their surface and transferred onto target substrates. The connection of devices in parallel/series greatly improves their capacity and voltage output. Overall, our prototype devices and fabrication methodology provide a promising route to create integratable microscale tubular energy storage devices with an efficient self-protection function and high performance for future miniaturized electronics.

Microwave Radiation Detection with an Ultrathin Free-Standing Superconducting Niobium Nanohelix.

We present a superconducting bolometer fabricated by a rolled-up technology that allows one to combine the two-dimensionality (2D) of the superconducting layer with a helical spiral curvature. The bolometer is formed as a free-standing Nb nanohelix acting as an ultrathin transition-edge sensor (TES) and having a negligible thermal contact to the substrate. We demonstrate the functionality of the thin-film TES by examining its microwave-detection performance in comparison with a commercial cryogenic bolometer from QMC Instruments. The nanohelix has been revealed to feature a noise equivalent power (NEP) of about 2 × 10-10 W Hz-1/2 at a microwave radiation power of 9 W m-2, which is 4 orders of magnitude smaller than the NEP of the QMC sensor at a similar radiation power. Furthermore, the forecast for the nanohelix is a 1 to 2 orders of magnitude shorter response time as compared to sensors based on commonly used 1 µm thick Si3N4 membranes. The reason is the extremely low heat capacity of the 50 nm thick supporting material and the few contact points between the TES and the substrate. Our findings indicate that microwave radiation detection can be substantially improved by extending 2D superconducting structures into the 3D space.

Silicon Nanomembranes with Hybrid Crystal Orientations and Strain States.

Methods to integrate different crystal orientations, strain states, and compositions of semiconductors in planar and preferably flexible configurations may enable nontraditional sensing-, stimulating-, or communication-device applications. We combine crystalline-silicon nanomembranes, patterning, membrane transfer, and epitaxial growth to demonstrate planar arrays of different orientations and strain states of Si in a single membrane, which is then readily transferable to other substrates, including flexible supports. As examples, regions of Si(001) and Si(110) or strained Si(110) are combined to form a multicomponent, single substrate with high-quality narrow interfaces. We perform extensive structural characterization of all interfaces and measure charge-carrier mobilities in different regions of a 2D quilt. The method is readily extendable to include varying compositions or different classes of materials.

In-Plane Thermal Conductivity of Radial and Planar Si/SiOx Hybrid Nanomembrane Superlattices.

Silicon, although widely used in modern electronic devices, has not yet been implemented in thermoelectric applications mainly due to its high thermal conductivity, κ, which leads to an extremely low thermoelectric energy conversion efficiency (figure of merit). Here, we present an approach to manage κ of Si thin-film-based nanoarchitectures through the formation of radial and planar Si/SiOx hybrid nanomembrane superlattices (HNMSLs). For the radial Si/SiOx HNMSLs with various numbers of windings (1, 2, and 5 windings), we observe a continuous reduction in κ with increasing number of windings. Meanwhile, the planar Si/SiOx HNMSL, which is fabricated by mechanically compressing a five-windings rolled-up microtube, shows the smallest in-plane thermal conductivity among all the reported values for Si-based superlattices. A theoretical model proposed within the framework of the Born-von Karman lattice dynamics to quantitatively interpret the experimental data indicates that the thermal conductivity of Si/SiOx HNMSLs is to a great extent determined by the phonon processes in the SiOx layers.

Biomimetic Microelectronics for Regenerative Neuronal Cuff Implants.

Smart biomimetics, a unique class of devices combining the mechanical adaptivity of soft actuators with the imperceptibility of microelectronics, is introduced. Due to their inherent ability to self-assemble, biomimetic microelectronics can firmly yet gently attach to an inorganic or biological tissue enabling enclosure of, for example, nervous fibers, or guide the growth of neuronal cells during regeneration.

Self-Assembled On-Chip-Integrated Giant Magneto-Impedance Sensorics.

A novel method relying on strain engineering to realize arrays of on-chip-integrated giant magneto-impedance (GMI) sensors equipped with pick-up coils is put forth. The geometrical transformation of an initially planar layout into a tubular 3D architecture stabilizes favorable azimuthal magnetic domain patterns. This work creates a solid foundation for further development of CMOS compatible GMI sensorics for magnetoencephalography.

Highly photocatalytic TiO2 interconnected porous powder fabricated by sponge-templated atomic layer deposition.

A titanium dioxide (TiO2) interconnected porous structure has been fabricated by means of atomic layer deposition of TiO2 onto a reticular sponge template. The obtained freestanding TiO2 with large surface area can be easily taken out of the water to solve a complex separation procedure. A compact and conformal nanocoating was evidenced by morphologic characterization. A phase transition, as well as production of oxygen vacancies with increasing annealing temperature, was detected by x-ray diffraction and x-ray photoelectron spectroscopy, respectively. The photocatalytic experimental results demonstrated that the powder with appropriate annealing treatment possessed excellent photocatalytic ability due to the co-action of high surface area, oxygen vacancies and the optimal crystal structure.

Direct transfer of magnetic sensor devices to elastomeric supports for stretchable electronics.

A novel fabrication method for stretchable magnetoresistive sensors is introduced, which allows the transfer of a complex microsensor systems prepared on common rigid donor substrates to prestretched elastomeric membranes in a single step. This direct transfer printing method boosts the fabrication potential of stretchable magnetoelectronics in terms of miniaturization and level of complexity, and provides strain-invariant sensors up to 30% tensile deformation.

High-Performance Li-O2 Batteries with Trilayered Pd/MnO x /Pd Nanomembranes.

Trilayered Pd/MnO x /Pd nanomembranes are fabricated as the cathode catalysts for Li-O2 batteries. The combination of Pd and MnO x facilitates the transport of electrons, lithium ions, and oxygen-containing intermediates, thus effectively decomposing the discharge product Li2O2 and significantly lowering the charge overpotential and enhancing the power efficiency. This is promising for future environmentally friendly applications.

High-performance magnetic sensorics for printable and flexible electronics.

High-performance giant magnetoresistive (GMR) sensorics are realized, which are printed at predefined locations on flexible circuitry. Remarkably, the printed magnetosensors remain fully operational over the complete consumer temperature range and reveal a giant magnetoresistance up to 37% and a sensitivity of 0.93 T(-1) at 130 mT. With these specifications, printed magnetoelectronics can be controlled using flexible active electronics for the realization of smart packaging and energy-efficient switches.

Wearable magnetic field sensors for flexible electronics.

Highly flexible bismuth Hall sensors on polymeric foils are fabricated, and the key optimization steps that are required to boost their sensitivity to the bulk value are identified. The sensor can be bent around the wrist or positioned on the finger to realize an interactive pointing device for wearable electronics. Furthermore, this technology is of great interest for the rapidly developing market of -eMobility, for optimization of eMotors and magnetic bearings.

Free-standing Fe2O3 nanomembranes enabling ultra-long cycling life and high rate capability for Li-ion batteries.

With Fe2O3 as a proof-of-concept, free-standing nanomembrane structure is demonstrated to be highly advantageous to improve the performance of Li-ion batteries. The Fe2O3 nanomembrane electrodes exhibit ultra-long cycling life at high current rates with satisfactory capacity (808 mAh g(-1) after 1000 cycles at 2 C and 530 mAh g(-1) after 3000 cycles at 6 C) as well as repeatable high rate capability up to 50 C. The excellent performance benefits particularly from the unique structural advantages of the nanomembranes. The mechanical feature can buffer the strain of lithiation/delithiation to postpone the pulverization. The two-dimensional transport pathways in between the nanomembranes can promote the pseudo-capacitive type storage. The parallel-laid nanomembranes, which are coated by polymeric gel-like film and SEI layer with the electrolyte in between layers, electrochemically behave like numerous "mini-capacitors" to provide the pseudo-capacitance thus maintain the capacity at high rate.

Hierarchically designed SiOx/SiOy bilayer nanomembranes as stable anodes for lithium ion batteries.

Hierarchically designed SiOx /SiOy rolled-up bilayer nanomembranes are used as anodes for lithium-ion batteries. The functionalities of the SiO(x,y) layers can be engineered by simply controlling the oxygen content, resulting in anodes that exhibit a reversible capacity of about 1300 mA h g(-1) with an excellent stability of over 100 cycles, as well as a good rate capability.

Sandwich-Stacked SnO2/Cu Hybrid Nanosheets as Multichannel Anodes for Lithium Ion Batteries.

We have introduced a facile strategy to fabricate sandwich-stacked SnO2/Cu hybrid nanosheets as multichannel anodes for lithium-ion batteries applying rolled-up nanotechnology with the use of carbon black as intersheet spacer. By employing a direct self-rolling and compressing approach, a much higher effective volume efficiency is achieved as compared to rolled-up hollow tubes. Benefiting from the nanogaps formed between each neighboring sheet, electron transport and ion diffusion are facilitated and SnO2/Cu nanosheet overlapping is prevented. As a result, the sandwich-stacked SnO2/Cu hybrid nanosheets exhibit a high reversible capacity of 764 mAh g(-1) at 100 mA g(-1) and a stable cycling performance of ~75% capacity retention at 200 mA g(-1) after 150 cycles, as well as a superior rate capability of ~470 mAh g(-1) at 1 A g(-1). This synthesis approach presents a promising route to design multichannel anodes for high performance Li-ion batteries.