1.
Appl Opt
; 32(19): 3377-400, 1993 Jul 01.
Article
in English
| MEDLINE
| ID: mdl-20829956
ABSTRACT
Optical-scatter measurements from polysilicon and aluminum surfaces were performed by using 632.8-nm illumination at 45 deg and 488-nm illumination at 76.8 deg. Scatter was recorded up to 60 deg from the specular beam by using a concentric ring photodetector. The results are compared with surface statistics derived from atomic force microscopy. Quantitative predictions of the scatter were derived from power spectral density curves and angle-resolved-scattering theory. The agreement was fair for polysilicon samples with rms surface roughnesses of ~18 and 42 nm and aluminum with 17-nm rms roughness but poor for other samples. The discrepancy is attributed primarily to internal scatter within the measuring instrument.