ABSTRACT
The availability of compact, low-cost magnetic resonance imaging instruments would further broaden the substantial impact of this technology. We report highly sensitive detection of magnetic resonance using low-stress silicon nitride (SiNx) membranes. We use these membranes as low-loss, high-frequency mechanical oscillators and find they are able to mechanically detect spin-dependent forces with high sensitivity enabling ultrasensitive magnetic resonance detection. The high force detection sensitivity stems from their high mechanical quality factor Qâ¼10(6)[1,2] combined with the low mass of the resonator. We use this excellent mechanical force sensitivity to detect the electron spin magnetic resonance using a SiNx membrane as a force detector. The demonstrated force sensitivity at 300K is 4fN/Hz, indicating a potential low temperature (4K) sensitivity of 25aN/Hz. Given their sensitivity, robust construction, large surface area and low cost, SiNx membranes can potentially serve as the central component of a compact room-temperature ESR and NMR instrument having spatial resolution superior to conventional approaches.
