ABSTRACT
Quartz length-extension resonators have already been used to obtain atomically-resolved images by frequency-modulation atomic force microscopy. Other piezoelectric materials such as gallium orthophosphate (GaPO(4)), langatate (LGT), and langasite (LGS) could be appropriate for this application. In this paper, the advantages of langasite crystal are presented and the fabrication of similar microsensors in langasite temperature-compensated cuts by chemical etching is proved. A monolithic length extension resonator, with a tip at its end, is obtained which constitutes a real advantage in regard to the existing quartz devices.
ABSTRACT
In this letter, experimental investigation of frequency-temperature effects in langatate rectangular cross-section beams are presented. It is shown that a first-order temperature compensated cut exists for the first vibrating mode of length extension.
ABSTRACT
Temperature effects in gallium orthophosphate (GaPO4) vibrating beams are reported. In addition to the well-known, thickness-shear AT-cut, temperature-compensated cuts exist in GaPO4 for length extensional modes. Experimental evidence of a temperature-compensated cut in GaPO4 rectangular beam resonator vibrating in length extension is given.
Subject(s)
Acoustics/instrumentation , Computer-Aided Design , Electronics/instrumentation , Gallium , Models, Theoretical , Transducers , Computer Simulation , Equipment Design , Equipment Failure Analysis , Phosphates , Temperature , VibrationABSTRACT
This paper shows that first order temperature compensated cut exists in Langasite rectangular cross-section beam vibrating in length extensional mode. Theoretical and experimental investigations of frequency-temperature effects are given.
ABSTRACT
Flexural modes are the basic vibrating mode of tuning forks used in quartz wrist watches; they also can be used as the basis for sensors. Very little work, if any, has been done for vibrating beam resonators in GaPO4. In this paper, the possibility of temperature-compensated cuts in GaPO4 is investigated for length-extensional and flexural vibrating modes. A theoretical investigation of rectangular cross-section GaPO4 vibrating beam resonators is accomplished by analytical methods. Modeling temperature effect is achieved by the approximate but classical method in which the effective elastic constants, beam dimensions, and crystal mass density are varied as a function of temperature. Temperature-compensated cuts are given in GaPO4 for length-extensional and flexural modes. Some temperature-compensated cuts of GaPO4 exhibit inversion points at high temperatures.
