On-chip phase-shift induced control of supercontinuum generation in a dual-core Si3N4 waveguide.

We investigate on-chip spectral control of supercontinuum generation, taking advantage of the additional spatial degree of freedom in strongly-coupled dual-core waveguides. Using numerical integration of the multi-mode generalized nonlinear Schrödinger equation, we show that, with proper waveguide cross-section design, selective excitation of supermodes can vary the dispersion to its extremes, i.e., all-normal or anomalous dispersion can be selected via phase shifting in a Mach-Zehnder input circuit. The resulting control allows to provide vastly different supercontinuum spectra with the same waveguide circuit.

Hybrid-integrated diode laser in the visible spectral range.

Generating visible light with wide tunability and high coherence based on photonic integrated circuits is of high interest for applications in biophotonics, precision metrology, and quantum technology. Here we present, to our knowledge, the first demonstration of a hybrid-integrated diode laser in the visible spectral range. Using an AlGaInP optical amplifier coupled to a low-loss Si3N4 feedback circuit based on microring resonators, we obtain a spectral coverage of 10.8 nm around 684.4 nm wavelength with up to 4.8 mW output power. The measured intrinsic linewidth is 2.3±0.2kHz.

Reflective aperiodic multilayer filters for metrology at XUV sources.

We present a general method for designing XUV aperiodic multilayer mirrors that can mimic a given target spectrum, specifically, the spectral transmission of an XUV optical system. The method is based on minimizing a merit function and using fidelity parameters that quantify the matching of the multilayer reflectivity spectrum with that of the target spectrum. To assess the feasibility of fabricating such a system, we show how to reduce the layer-to-layer thickness variations throughout the aperiodic layer stack. We demonstrate the design method using an example of an EUV optical system composed of 12 identical Mo/Si multilayer mirrors having a reflectivity peak at 13.5 nm. We found that the target spectrum can be mimicked with high fidelity either with a single reflection at an aperiodic multilayer mirror combined with standard absorbing filters or, if required, with two subsequent reflections at a mimic mirror. These examples demonstrate the applicability for metrology at XUV sources, including spectrally proper source imaging. Because our approach is of general applicability, the process can be used to mimic any other narrowband, single-peaked target spectrum in the XUV region.

Temporal model for quasi-phase matching in high-order harmonic generation.

We present a model for quasi-phase matching (QPM) in high-order harmonic generation (HHG). Using a one-dimensional description, we analyze the time-dependent, ultrafast wave-vector balance to calculate the on-axis harmonic output versus time, from which we obtain the output pulse energy. Considering, as an example, periodically patterned argon gas, as may be provided with a grid in a cluster jet, we calculate the harmonic output during different time intervals within the drive laser pulse duration. We find that identifying a suitable single spatial period is not straightforward due to the complex and ultrafast plasma dynamics that underlies HHG at increased intensities. The maximum on-axis harmonic pulse energy is obtained when choosing the QPM period to phase match HHG at the leading edge of the drive laser pulse.

Narrowband and tunable anomalous transmission filters for spectral monitoring in the extreme ultraviolet wavelength region.

We present the first experimental demonstration of a novel type of narrowband and wavelength-tunable multilayer transmission filter for the extreme ultraviolet (EUV) region. The operating principle of the filter is based on spatially overlapping the nodes of a standing wave field with the absorbing layers within the multilayer structure. For a wavelength with a matching node pattern, this increases the transmission as compared to neighboring wavelengths where anti-nodes overlap with the absorbing layers. Using Ni/Si multilayers where Ni provides strong absorption, we demonstrate the proper working of such anomalous transmission filter. The demonstration is carried out at the example of 13.5 nm wavelength and at normal incidence, providing a 0.27 nm-wide transmission peak. We also demonstrate wavelength tunability by operating the same Ni/Si filter at different wavelengths by varying the angle of incidence. As the multilayer filter is directly deposited on the active area of an EUV-sensitive photodiode, this provides an extremely compact device for easy spectral monitoring in the EUV. The transmission spectrum of the filter is modeled and found to be in good agreement with the experimental data. The agreement proves that such filters and compact monitoring devices can be straightforwardly designed and fabricated, as desired, also for other EUV wavelengths, bandwidths and angles of incidence, thereby showing a high potential for applications.

Spectral control of high-harmonic generation via drive laser pulse shaping in a wide-diameter capillary.

We experimentally investigate spectral control of high-harmonic generation in a wide-diameter (508 µm) capillary that allows using significantly lower gas pressures coupled with elevated drive laser energies to achieve higher harmonic energies. Using phase shaping to change the linear chirp of the drive laser pulses, we observe wavelength tuning of the high-harmonic output to both larger and smaller values. Comparing tuning via the gas pressure with the amount of blue shift in the transmitted drive laser spectrum, we conclude that both adiabatic and non-adiabatic effects cause pulse-shaping induced tuning of high harmonics. We obtain a fractional wavelength tuning, Δλ/λ, in the range from -0.007 to + 0.01, which is comparable to what is achieved with standard capillaries of smaller diameter and higher pressures.

Single-shot fluctuations in waveguided high-harmonic generation.

For exploring the application potential of coherent soft x-ray (SXR) and extreme ultraviolet radiation (XUV) provided by high-harmonic generation, it is important to characterize the central output parameters. Of specific importance are pulse-to-pulse (shot-to-shot) fluctuations of the high-harmonic output energy, fluctuations of the direction of the emission (pointing instabilities), and fluctuations of the beam divergence and shape that reduce the spatial coherence. We present the first single-shot measurements of waveguided high-harmonic generation in a waveguided (capillary-based) geometry. Using a capillary waveguide filled with Argon gas as the nonlinear medium, we provide the first characterization of shot-to-shot fluctuations of the pulse energy, of the divergence and of the beam pointing. We record the strength of these fluctuations vs. two basic input parameters, which are the drive laser pulse energy and the gas pressure in the capillary waveguide. In correlation measurements between single-shot drive laser beam profiles and single-shot high-harmonic beam profiles we prove the absence of drive laser beam-pointing-induced fluctuations in the high-harmonic output. We attribute the main source of high-harmonic fluctuations to ionization-induced nonlinear mode mixing during propagation of the drive laser pulse inside the capillary waveguide.

Fabrication and characterization of free-standing, high-line-density transmission gratings for the vacuum UV to soft X-ray range.

We present state-of-the-art high resolution transmission gratings, applicable for spectroscopy in the vacuum ultraviolet (VUV) and the soft X-ray (SRX) wavelength range, fabricated with a novel process using ultraviolet based nano imprint lithography (UV-NIL). Free-standing, high-line-density gratings with up to 10,000 lines per mm and various space-to-period ratios were fabricated. An optical characterization of the gratings was carried out in the range from 17 to 34 nm wavelength using high-harmonic generation in a capillary waveguide filled with Ne, and around 13.5 nm wavelength (from 10 to 17 nm) using a Xenon discharge plasma.

Q-factor measurements through injection locking of a semiconductor-glass hybrid laser with unknown intracavity losses.

The injection locking properties of a newly developed waveguide-based external cavity semiconductor laser have been investigated. Using the injection locking properties to measure the Q-factor of complex optical cavities with unknown internal losses, has been demonstrated for the first time.

Subwavelength single layer absorption resonance antireflection coatings.

We present theoretically derived design rules for an absorbing resonance antireflection coating for the spectral range of 100 - 400 nm, applied here on top of a molybdenum-silicon multilayer mirror (Mo/Si MLM) as commonly used in extreme ultraviolet lithography. The design rules for optimal suppression are found to be strongly dependent on the thickness and optical constants of the coating. For wavelengths below λ ∼ 230 nm, absorbing thin films can be used to generate an additional phase shift and complement the propagational phase shift, enabling full suppression already with film thicknesses far below the quarter-wave limit. Above λ ∼ 230 nm, minimal absorption (k < 0.2) is necessary for low reflectance and the minimum required layer thickness increases with increasing wavelength slowly converging towards the quarter-wave limit.As a proof of principle, SixCyNz thin films were deposited that exhibit optical constants close to the design rules for suppression around 285 nm. The thin films were deposited by electron beam co-deposition of silicon and carbon, with N+ ion implantation during growth and analyzed with variable angle spectroscopic ellipsometry to characterize the optical constants. We report a reduction of reflectance at λ = 285 nm, from 58% to 0.3% for a Mo/Si MLM coated with a 20 nm thin film of Si0.52C0.16N0.29.

High precision wavelength estimation method for integrated optics.

A novel and simple approach to optical wavelength measurement is presented in this paper. The working principle is demonstrated using a tunable waveguide micro ring resonator and single photodiode. The initial calibration is done with a set of known wavelengths and resonator tunings. The combined spectral sensitivity function of the resonator and photodiode at each tuning voltage was modeled by a neural network. For determining the unknown wavelengths, the resonator was tuned with a set of heating voltages and the corresponding photodiode signals were collected. The unknown wavelength was estimated, based on the collected photodiode signals, the calibrated neural networks, and an optimization algorithm. The wavelength estimate method provides a high spectral precision of about 8 pm (5 · 10(-6) at 1550 nm) in the wavelength range between 1549 nm to 1553 nm. A higher precision of 5 pm (3 · 10(-6)) is achieved in the range between 1550.3 nm to 1550.8 nm, which is a factor of five improved compared to a simple lookup of data. The importance of our approach is that it strongly simplifies the optical system and enables optical integration. The approach is also of general importance, because it may be applicable to all wavelength monitoring devices which show an adjustable wavelength response.

Extended theory of soft x-ray reflection for realistic lamellar multilayer gratings.

An extended set of coupled wave equations were derived to describe non-idealized lamellar multilayer grating structures with properties as obtained with state-of-the-art fabrication techniques. These generalized equations can include all relevant effects describing the influence of passivation and contamination layers, non-rectangular lamel profiles and sidewall scalloping. The calculations showed that passivation and contamination plays an important role in that it may significantly reduce peak reflectivity. However, we also derived a condition for layer thicknesses having negligible effects. Slightly positive tapered lamel profiles are shown to further reduce the bandwidth as compared to a rectangular lamel profile, whereas negative tapers significantly increased the bandwidth. The influence of intriguing effects, such as the sidewall scalloping caused by Bosch Deep Reactive Ion Etching, are also modeled. We identified the signature of such scalloping as additional side peaks in the reflectivity spectrum and present parameters with which these can be effectively suppressed.

Method to map individual electromagnetic field components inside a photonic crystal.

We present a method to map the absolute electromagnetic field strength inside photonic crystals. We apply the method to map the dominant electric field component Ez of a two-dimensional photonic crystal slab at microwave frequencies. The slab is placed between two mirrors to select Bloch standing waves and a subwavelength spherical scatterer is scanned inside the resulting resonator. The resonant Bloch frequencies shift depending on the electric field at the position of the scatterer. To map the electric field component Ez we measure the frequency shift in the reflection and transmission spectrum of the slab versus the scatterer position. Very good agreement is found between measurements and calculations without any adjustable parameters.

Analytic theory of soft x-ray diffraction by Lamellar Multilayer Gratings.

An analytic theory describing soft x-ray diffraction by Lamellar Multilayer Gratings (LMG) has been developed. The theory is derived from a coupled waves approach for LMGs operating in the single-order regime, where an incident plane wave can only excite a single diffraction order. The results from calculations based on these very simple analytic expressions are demonstrated to be in excellent agreement with those obtained using the rigorous coupled-waves approach. The conditions for maximum reflectivity and diffraction efficiency are deduced and discussed. A brief investigation into p-polarized radiation diffraction is also performed.

Wavelength-swept Yb-fiber master-oscillator-power-amplifier with 70 nm rapid tuning range.

A continuous-wave all-polarization maintaining ytterbium-doped fiber master oscillator power amplifier, with a tuning range of 70 nm addressable at tuning rates of up to 20 nm/ms, is described. Up to 10 W of linearly polarized output was generated with an amplified spontaneous emission content of less than 0.2% throughout the tuning range.

Generating ultrarelativistic attosecond electron bunches with laser wakefield accelerators.

Femtosecond electron bunches with ultrarelativistic energies were recently generated by laser wakefield accelerators. Here we predict that laser wakefield acceleration can generate even attosecond bunches, due to a strong chirp of the betatron frequency. We show how the bunch duration scales with the acceleration parameters and that, after acceleration, the bunches can propagate over many tens of centimeters without a significant increase in duration.

High-resolution, high-reflectivity operation of lamellar multilayer amplitude gratings: identification of the single-order regime.

High resolution while maintaining high peak reflectivities can be achieved for Lamellar Multilayer Amplitude Gratings (LMAG) in the soft-x-ray (SXR) region. Using the coupled waves approach (CWA), it is derived that for small lamellar widths only the zeroth diffraction order needs to be considered for LMAG performance calculations, referred to as the single-order regime. In this regime, LMAG performance can be calculated by assuming a conventional multilayer mirror with decreased density, which significantly simplifies the calculations. Novel analytic criteria for the design of LMAGs are derived from the CWA and it is shown, for the first time, that the resolution of an LMAG operating in the single-order regime is not limited by absorption as in conventional multilayer mirrors. It is also shown that the peak reflectivity of an LMAG can then still be as high as that of a conventional multilayer mirror (MM). The performance of LMAGs operating in the single-order regime are thus only limited by technological factors.

Frequency control of a 1163 nm singly resonant OPO based on MgO:PPLN.

We report the realization of a singly resonant optical parametric oscillator (SRO) that is designed to provide narrow-bandwidth, continuously tunable radiation at a wavelength of 1163 nm for optical cooling of osmium ions. The SRO is based on periodically poled, magnesium-oxide-doped lithium niobate and pumped at 532 nm. The output coupling of the resonant idler wave is adjusted to yield up to 400 mW of 1163 nm radiation, with a bandwidth of a few megahertz. For continuous frequency tuning of the idler wave, the SRO is equipped with an intracavity etalon, and the cavity length is controlled with a piezo-actuated mirror synchronized to the etalon angle.

Time-dependent, three-dimensional simulation of free-electron-laser oscillators.

We describe a procedure for the simulation of free-electron-laser (FEL) oscillators. The simulation uses a combination of the MEDUSA simulation code for the FEL interaction and the OPC code to model the resonator. The simulations are compared with recent observations of the oscillator at the Thomas Jefferson National Accelerator Facility and are in substantial agreement with the experiment.

High-efficiency mid-infrared ZnGeP2 optical parametric oscillator directly pumped by a lamp-pumped, Q-switched CrTmHo:YAG laser.

We report a singly resonant optical parametric oscillator (SRO) based on a ZnGeP(2) crystal directly pumped by a lamp-pumped Q-switched CrTmHo:YAG laser. The IR was tunable from 4.7 to 7.8 microm via crystal angle tuning. A maximum optical to optical efficiency of 56% was obtained from the pump (2.09 microm) to total IR at a pump energy of 6.5 mJ. The corresponding idler energy was 1.45 mJ. The SRO was measured to have a slope efficiency of 64% and a threshold of 1 mJ. The spatial beam quality of the idler, characterized by the M(2) parameter, was 1.38 when the SRO was pumped at 2.5 times threshold. These results show that ZnGeP(2) optical parametric oscillators directly pumped by a CrTmHo:YAG laser can be operated efficiently, while maintaining good IR beam quality.