1.
Appl Opt
; 27(9): 1840-3, 1988 May 01.
Article
in English
| MEDLINE
| ID: mdl-20531664
ABSTRACT
The near- and far-field performance of three practical positive branch unstable resonator designs was compared for a commercial excimer laser operating on ArF and KrF. Atmospheric attenuation at 193 and 248 nm was measured.
2.