Effect of postdeposition annealing on the structure, composition, and the mechanical and optical characteristics of niobium and tantalum oxide films.

Optical, mechanical, and thermal properties of optical thin films are very important for a reliable device performance. In the present work, the effect of annealing on the stability and the characteristics of niobium and tantalum oxide films grown at room temperature (RT) by dual ion beam sputtering were studied. The refractive index (n(λ)), extinction coefficient (k(λ)), hardness (H), reduced Young's modulus (E(r)), and film stress (σ) were investigated as a function of the annealing temperature (T(A)). X-ray diffraction analysis showed that all as-deposited films were amorphous, and crystallization was observed only after annealing at 700°C. Compositional analyses confirmed that the atomic ratio of oxygen to metal in as-deposited and annealed films was close to 2.5, indicating that the films were stoichiometric pentoxides of Nb and Ta. The properties of Nb(2)O(5) and Ta(2)O(5) films were, respectively, affected by postdeposition annealing: n(λ) values (at 550 nm) decreased from 2.30 to 2.20 and from 2.14 to 2.08, the average H and E(r) values increased from 5.6 to 7.4 GPa, and from 121 to 132 GPa for Nb(2)O(5), and from 6.5 to 8.3 GPa, and from 132 to 144 GPa for Ta(2)O(5), and the initial low compressive stress for both materials changed to tensile. We explain the variation of the coating material properties in terms of film stoichiometry, crystallinity, electronic structure, and possible reactions at the film-substrate interface.

Optical and tribomechanical stability of optically variable interference security devices prepared by dual ion beam sputtering.

Optical security devices applied to banknotes and other documents are exposed to different types of harsh environments involving the cycling of temperature, humidity, chemical agents, and tribomechanical intrusion. In the present work, we study the stability of optically variable devices, namely metameric interference filters, prepared by dual ion beam sputtering onto polycarbonate and glass substrates. Specifically, we assess the color difference as well as the changes in the mechanical properties and integrity of all-dielectric and metal-dielectric systems due to exposure to bleach, detergent and acetone agents, and heat and humidity. The results underline a significant role of the substrate material, of the interfaces, and of the nature and microstructure of the deposited films in long term stability under everyday application conditions.