Slow-wave-enhanced on-chip Michelson interferometer sensor.

We experimentally demonstrated slow-wave-enhanced phase and spectral sensitivity in asymmetric Michelson interferometer (MI) sensors. Compared to Mach-Zehnder interferometers (MZI) that experimentally demonstrated a phase sensitivity of 84,000 rad/RIU-cm, the reflected path enhancement of the optical path length coupled with slow light enhancement with photonic crystal waveguides in on-chip slow light Michelson interferometer sensors resulted in experimentally demonstrated phase sensitivity of 277,750 rad/RIU-cm with theoretical phase sensitivity as high as 461,810 rad/RIU-cm, at the same form factor as the MZI of identical interferometer arm lengths.

Foundry-compatible thin film lithium niobate modulator with RF electrodes buried inside the silicon oxide layer of the SOI wafer.

Ever-increasing complexity of communication systems demands the co-integration of electronics and photonics. But there are still some challenges associated with the integration of thin film lithium niobate (TFLN) electro-optic modulators with the standard and well-established silicon photonics. Current TFLN platforms are mostly not compatible with the silicon photonics foundry process due to the choice of substrate or complicated fabrication requirements, including silicon substrate removal and formation of radio-frequency (RF) electrodes on the top of the TFLN. Here, we report on a platform where all the optical and RF waveguiding structures are fabricated first, and then the TFLN is bonded on top of the silicon photonic chip as the only additional step. Hence, the need for substrate removal is eliminated, and except for the last step of TFLN bonding, its fabrication process is silicon foundry compatible and much more straightforward compared to other fabrication methods.

Pedestal subwavelength grating metamaterial waveguide ring resonator for ultra-sensitive label-free biosensing.

Mode volume overlap factor is one of the parameters determining the sensitivity of a sensor. In past decades, many approaches have been proposed to increase the mode volume overlap. As the increased mode volume overlap factor results in reduced mode confinement, the maximum value is ultimately determined by the micro- and nano-structure of the refractive index distribution of the sensing devices. Due to the asymmetric index profile along the vertical direction on silicon-on-insulator platform, further increasing the sensitivity of subwavelength grating metamaterial (SGM) waveguide based sensors is challenging. In this paper, we propose and demonstrate pedestaled SGM which reduces the asymmetricity and thus allows further increasing the interaction between optical field and analytes. The pedestal structure can be readily formed by a controlled undercut etching. Both theoretical analysis and experimental demonstration show a significant improvement of sensitivity. The bulk sensitivity and surface sensitivity are improved by 28.8% and 1000 times, respectively. The detection of streptavidin at a low concentration of 0.1 ng/mL (∼1.67 pM) is also demonstrated through real-time monitoring of the resonance shift. A ∼400 fM streptavidin limit of detection is expected with a 0.01nm resolution spectrum analyzer based on the real-time measurement of streptavidin detection results from two-site binding model fitting.

Electrokinetic Manipulation Integrated Plasmonic-Photonic Hybrid Raman Nanosensors with Dually Enhanced Sensitivity.

To detect biochemicals with ultrahigh sensitivity, efficiency, reproducibility, and specificity has been the holy grail in the development of nanosensors. In this work, we report an innovative type of photonic-plasmonic hybrid Raman nanosensor integrated with electrokinetic manipulation by rational design, which offers dual mechanisms that enhance the sensitivity for molecule detection directly in solution. For the first time, we integrate large arrays of synthesized plasmonic nanocapsules with densely surface distributed silver (Ag) nanoparticles (NPs) on lithographically patterned photonic crystal slabs via electric-field assembling. With the interdigital microelectrodes, the applied electric fields not only assemble the hybrid plasmonic nanocapsules on photonic crystal slabs, but also generate electrokinetic flows that focus analyte molecules to the Ag hot spots on the nanocapsules for surface-enhanced Raman scattering (SERS) detection. The synergistic effects of plasmonic-photonic resonance and the electrokinetic molecular focusing can promote the SERS enhancement factor (EF) robustly to ∼2 × 109. Various molecules including SERS probing molecules, nucleobases, and unsafe food additives can be detected directly from suspension. The innovative mechanism, design, and fabrication reported in this work can inspire a new paradigm for achieving high-performance Raman nanosensors, which is pivotal for lab-on-chip disease diagnosis and environmental protection.

Improving the detection limit for on-chip photonic sensors based on subwavelength grating racetrack resonators.

Compared to the conventional strip waveguide microring resonators, subwavelength grating (SWG) waveguide microring resonators have better sensitivity and lower detection limit due to the enhanced photon-analyte interaction. As sensors, especially biosensors, are usually used in absorptive ambient environment, it is very challenging to further improve the detection limit of the SWG ring resonator by simply increasing the sensitivity. The high sensitivity resulted from larger mode-analyte overlap also brings significant absorption loss, which deteriorates the quality factor of the resonator. To explore the potential of the SWG ring resonator, we theoretically and experimentally optimize an ultrasensitive transverse magnetic mode SWG racetrack resonator to obtain maximum quality factor and thus lowest detection limit. A quality factor of 9800 around 1550 nm and sensitivity of 429.7 ± 0.4nm/RIU in water environment are achieved. It corresponds to a detection limit (λ/S·Q) of 3.71 × 10-4 RIU, which marks a reduction of 32.5% compared to the best value reported for SWG microring sensors.

One-dimensional photonic crystal slot waveguide for silicon-organic hybrid electro-optic modulators.

In an on-chip silicon-organic hybrid electro-optic (EO) modulator, the mode overlap with EO materials, in-device effective r33, and propagation loss are among the most critical factors that determine the performance of the modulator. Various waveguide structures have been proposed to optimize these factors, yet there is a lack of comprehensive consideration on all of them. In this Letter, a one-dimensional (1D) photonic crystal (PC) slot waveguide structure is proposed that takes all these factors into consideration. The proposed structure takes advantage of the strong mode confinement within a low-index region in a conventional slot waveguide and the slow-light enhancement from the 1D PC structure. Its simple geometry makes it robust to resist fabrication imperfections and helps reduce the propagation loss. Using it as a phase shifter in a Mach-Zehnder interferometer structure, an integrated silicon-organic hybrid EO modulator was experimentally demonstrated. The observed effective EO coefficient is as high as 490 pm/V. The measured half-wave voltage and length product is less than 1 V·cm and can be further improved. A potential bandwidth of 61 GHz can be achieved and further improved by tailoring the doping profile. The proposed structure offers a competitive novel phase-shifter design, which is simple, highly efficient, and with low optical loss, for on-chip silicon-organic hybrid EO modulators.

Unique surface sensing property and enhanced sensitivity in microring resonator biosensors based on subwavelength grating waveguides.

In this paper, unique surface sensing property and enhanced sensitivity in microring resonator biosensors based on subwavelength grating (SWG) waveguides are studied and demonstrated. The SWG structure consists of periodic silicon pillars in the propagation direction with a subwavelength period. Effective sensing region in the SWG microring resonator includes not only the top and side of the waveguide, but also the space between the silicon pillars on the light propagation path. It leads to greatly increased sensitivity and a unique surface sensing property in contrast to common evanescent wave sensors: the surface sensitivity remains constantly high as the surface layer thickness grows. Microring resonator biosensors based on both SWG waveguides and conventional strip waveguides were compared side by side in surface sensing experiment and the enhanced surface sensing capability in SWG based microring resonator biosensors was demonstrated.

Microfluidic channels with ultralow-loss waveguide crossings for various chip-integrated photonic sensors.

Traditional silicon waveguides are defined by waveguide trenches on either side of the high-index silicon core that leads to fluid leakage orifices for over-layed microfluidic channels. Closing the orifices needs additional fabrication steps which may include oxide deposition and planarization. We experimentally demonstrated a new type of microfluidic channel design with ultralow-loss waveguide crossings (0.00248 dB per crossings). The waveguide crossings and all other on-chip passive-waveguide components are fabricated in one step with no additional planarization steps which eliminates any orifices and leads to leak-free fluid flow. Such designs are applicable in all optical-waveguide-based sensing applications where the analyte must be flowed over the sensor. The new channel design was demonstrated in a L55 photonic crystal sensor operating between 1540 and 1580 nm.

Silicon on-chip bandpass filters for the multiplexing of high sensitivity photonic crystal microcavity biosensors.

A method for the dense integration of high sensitivity photonic crystal (PC) waveguide based biosensors is proposed and experimentally demonstrated on a silicon platform. By connecting an additional PC waveguide filter to a PC microcavity sensor in series, a transmission passband is created, containing the resonances of the PC microcavity for sensing purpose. With proper engineering of the passband, multiple high sensitivity PC microcavity sensors can be integrated into microarrays and be interrogated simultaneously between a single input and a single output port. The concept was demonstrated with a 2-channel L55 PC biosensor array containing PC waveguide filters. The experiment showed that the sensors on both channels can be monitored simultaneously from a single output spectrum. Less than 3 dB extra loss for the additional PC waveguide filter is observed.

Experimental demonstration of propagation characteristics of mid-infrared photonic crystal waveguides in silicon-on-sapphire.

We provide the first experimental demonstration of optical transmission characteristics of a W1 photonic crystal waveguide in silicon on sapphire at mid infrared wavelength of 3.43 µm. Devices are studied as a function of lattice constant to tune the photonic stop band across the single wavelength of the source laser. The shift in the transmission profile as a function of temperature and refractive index is experimentally demonstrated and compared with simulations. In addition to zero transmission in the stop gap, propagation losses less than 20 dB/cm are observed for group indices greater than 20 below the light line while more than 300 dB/cm propagation losses are observed above the light line, characteristic of the waveguiding behavior of photonic crystal line defect modes.

Flexible single-crystal silicon nanomembrane photonic crystal cavity.

Flexible inorganic electronic devices promise numerous applications, especially in fields that could not be covered satisfactorily by conventional rigid devices. Benefits on a similar scale are also foreseeable for silicon photonic components. However, the difficulty in transferring intricate silicon photonic devices has deterred widespread development. In this paper, we demonstrate a flexible single-crystal silicon nanomembrane photonic crystal microcavity through a bonding and substrate removal approach. The transferred cavity shows a quality factor of 2.2×10(4) and could be bent to a curvature of 5 mm radius without deteriorating the performance compared to its counterparts on rigid substrates. A thorough characterization of the device reveals that the resonant wavelength is a linear function of the bending-induced strain. The device also shows a curvature-independent sensitivity to the ambient index variation.

The role of group index engineering in series-connected photonic crystal microcavities for high density sensor microarrays.

We experimentally demonstrate an efficient and robust method for series connection of photonic crystal microcavities that are coupled to photonic crystal waveguides in the slow light transmission regime. We demonstrate that group index taper engineering provides excellent optical impedance matching between the input and output strip waveguides and the photonic crystal waveguide, a nearly flat transmission over the entire guided mode spectrum and clear multi-resonance peaks corresponding to individual microcavities that are connected in series. Series connected photonic crystal microcavities are further multiplexed in parallel using cascaded multimode interference power splitters to generate a high density silicon nanophotonic microarray comprising 64 photonic crystal microcavity sensors, all of which are interrogated simultaneously at the same instant of time.

Grating-coupled silicon-on-sapphire integrated slot waveguides operating at mid-infrared wavelengths.

We demonstrate subwavelength bidirectional grating (SWG) coupled slot waveguide fabricated in silicon-on-sapphire for transverse electric polarized wave operation at 3.4 µm wavelength. Coupling efficiency of 29% for SWG coupler is experimentally achieved. Propagation loss of 11 dB/cm has been experimentally obtained for slot waveguides. Two-step taper mode converters with an insertion loss of 0.13 dB are used to gradually convert the strip waveguide mode into slot waveguide mode.

Analysis of ultra-high sensitivity configuration in chip-integrated photonic crystal microcavity bio-sensors.

We analyze the contributions of quality factor, fill fraction, and group index of chip-integrated resonance microcavity devices, to the detection limit for bulk chemical sensing and the minimum detectable biomolecule concentration in biosensing. We analyze the contributions from analyte absorbance, as well as from temperature and spectral noise. Slow light in two-dimensional photonic crystals provide opportunities for significant reduction of the detection limit below 1 × 10-7 RIU (refractive index unit) which can enable highly sensitive sensors in diverse application areas. We demonstrate experimentally detected concentration of 1 fM (67 fg/ml) for the binding between biotin and avidin, the lowest reported till date.

Guided-Mode Resonance Grating with Self-Assembled Silver Nanoparticles for Surface-Enhanced Raman Scattering Spectroscopy.

We designed and fabricated guided-mode resonance (GMR) gratings on indium-tin-oxide (ITO) thin film to generate a significantly enhanced local electric field for surface-enhanced Raman scattering (SERS) spectroscopy. Ag nanoparticles (NPs) were self-assembled onto the surface of the grating, which can provide a large amount of "hot-spots" for SERS sensing. The ITO gratings also exhibit excellent tolerance to fabrication deviations due to the large refractive index contrast of the ITO grating. Quantitative experimental results of 5,5'-dithiobis(2-nitrobenzoic acid) (DTNB) demonstrate the best enhancement factor of ~14× on ITO gratings when compared with Ag NPs on a flat ITO film, and the limit of detection (LOD) of DTNB is as low as 10 pM.

Wide optical spectrum range, subvolt, compact modulator based on an electro-optic polymer refilled silicon slot photonic crystal waveguide.

We design and demonstrate a compact and low-power, band-engineered, electro-optic (EO) polymer refilled silicon slot photonic crystal waveguide (PCW) modulator. The EO polymer is engineered for large EO activity and near-infrared transparency. A PCW step coupler is used for optimum coupling to the slow-light mode of the band-engineered PCW. The half-wave switching voltage is measured to be Vπ = 0.97 ± 0.02 V over an optical spectrum range of 8 nm, corresponding to the effective in-device r(33) of 1199 pm/V and V(π) × L = 0.291 ± 0.006 V × mm in a push-pull configuration. Excluding the slow-light effect, we estimate that the EO polymer is poled with an efficiency of 89 pm/V in the slot.

Multiplexed detection of xylene and trichloroethylene in water by photonic crystal absorption spectroscopy.

We experimentally demonstrate simultaneous selective detection of xylene and trichloroethylene (TCE) using multiplexed photonic crystal waveguides (PCWs) by near-infrared optical absorption spectroscopy on a chip. Based on the slow light effect of photonic crystal structure, the sensitivity of our device is enhanced to 1 ppb (v/v) for xylene and 10 ppb (v/v) for TCE in water. Multiplexing is enabled by multimode interference power splitters and Y-combiners that integrate multiple PCWs on a silicon chip in a silicon-on-insulator platform.

Slow light enhanced sensitivity of resonance modes in photonic crystal biosensors.

We demonstrate experimentally that in photonic crystal sensors with a side-coupled cavity-waveguide configuration, group velocity of the propagating mode in the coupled waveguide at the frequency of the resonant mode plays an important role in enhancing the sensitivity. In linear L13 photonic crystal microcavities, with nearly same resonance mode quality factors ∼7000 in silicon-on-insulator devices, sensitivity increased from 57 nm/RIU to 66 nm/RIU as group index in the coupled waveguide increased from 10.2 to 13.2. Engineering for highest sensitivity in such planar integrated sensors, thus, requires careful slow light design for optimized sensor sensitivity.

Multiplexed specific label-free detection of NCI-H358 lung cancer cell line lysates with silicon based photonic crystal microcavity biosensors.

We experimentally demonstrate label-free photonic crystal (PC) microcavity biosensors in silicon-on-insulator (SOI) to detect the epithelial-mesenchymal transition (EMT) transcription factor, ZEB1, in minute volumes of sample. Multiplexed specific detection of ZEB1 in lysates from NCI-H358 lung cancer cells down to an estimated concentration of 2 cells per micro-liter is demonstrated. L13 photonic crystal microcavities, coupled to W1 photonic crystal waveguides, are employed in which resonances show high Q in the bio-ambient phosphate buffered saline (PBS). When the sensor surface is derivatized with a specific antibody, the binding of the corresponding antigen from a complex whole-cell lysate generates a change in refractive index in the vicinity of the photonic crystal microcavity, leading to a change in the resonance wavelength of the resonance modes of the photonic crystal microcavity. The shift in the resonance wavelength reveals the presence of the antigen. The sensor cavity has a surface area of ∼11µm(2). Multiplexed sensors permit simultaneous detection of many binding interactions with specific immobilized antibodies from the same bio-sample at the same instant of time. Specificity was demonstrated using a sandwich assay which further amplifies the detection sensitivity at low concentrations. The device represents a proof-of-concept demonstration of label-free, high throughput, multiplexed detection of cancer cells with specificity and sensitivity on a silicon chip platform.

Coupling loss minimization of slow light slotted photonic crystal waveguides using mode matching with continuous group index perturbation.

We experimentally demonstrate highly efficient coupling into a slow light slotted photonic crystal waveguide. With optical mode converters and group index tapers that provide good optical mode matching and impedance matching, a nearly flat transmission over the entire guided mode spectrum of 68.8 nm range with 2.4 dB minimum insertion loss is demonstrated. Measurements also show up to 20 dB baseline enhancement and 30 dB enhancement in the slow light region, indicating that it is possible to design highly efficient and compact devices that benefit from the slow light enhancement without increasing the coupling loss.