MEMS-based self-referencing cascaded line-scan camera using single-pixel detectors.

A microelectromechanical systems (MEMS) based self-referencing cascaded line-scan camera using single-pixel detectors is proposed and verified. Single-pixel detectors make it an attractive low-cost alternative of a traditional line-scan camera that can operate at any wavelength. The proposed system is composed of several identical cascaded line imager units driven by a common actuator. Each unit is an integration of an imaging slit, a MEMS encoding mask, a light concentrator and a single-pixel detector. The spatial resolution of the proposed line-scan camera can thus be N-fold immediately by cascading N units to achieve high spatial resolution. For prototype demonstration, a cascaded line-scan camera composed of two imager units are prepared, with each unit having a single-pixel detector and being capable of resolving 71 spatial pixels along the slit. Hadamard transform multiplexing detection is applied to enhance the camera's signal-to-noise ratio (SNR). The MEMS encoding mask is resonantly driven at 250 Hz indicating an ideal frame-rate of 500 fps of the line-scan camera prototype. Further increase of frame-rate can be achieved through optimization of the MEMS actuator. Additionally, the MEMS encoding mask incorporates a self-referencing design which simplifies data acquisition process, thus enabling the camera system to work in a simple but efficient open-loop condition.

Design of an on-chip Fourier transform spectrometer using waveguide directional couplers and NEMS.

A novel concept of on-chip Fourier transform spectrometer is proposed. It consists of semiconductor waveguide directional couplers and NEMS actuators. The optical path difference can be tuned by controlling the NEMS actuators to couple or decouple the directional couplers. With 9 stages of directional couplers, we demonstrate numerically that the spectral resolution can reach up to 4 nm in 1.5 µm to 1.8 µm wavelength range. Further enhancement can be achieved by increasing the number of integrated NEMS driven directional couplers. This design meets the requirement of small size, weight and power and may be useful in future on-chip spectroscopic sensors.

Ultra-compact optical zoom endoscope using solid tunable lenses.

We report an ultra-compact optical zoom endoscope containing two tunable Alvarez lenses. The two tunable lenses are controlled synchronously by piezoelectric benders to move in directions perpendicular to the optical axis to achieve optical zoom while keeping images in clear focus without moving the scope. The piezoelectric benders are arranged circumferentially surrounding the endoscope optics with a diameter about 2 mm, which results in an ultra-compact form. The demonstrated endoscope is capable of optical zoom close to 3 × from field of view (FOV) 50° to 18° continuously with the required movements for its constituent optical elements less than 110 µm. Such optical zoom endoscopes may find their potential uses in healthcare and industrial inspection systems.

Precise control of coupling strength in photonic molecules over a wide range using nanoelectromechanical systems.

Photonic molecules have a range of promising applications including quantum information processing, where precise control of coupling strength is critical. Here, by laterally shifting the center-to-center offset of coupled photonic crystal nanobeam cavities, we demonstrate a method to precisely and dynamically control the coupling strength of photonic molecules through integrated nanoelectromechanical systems with a precision of a few GHz over a range of several THz without modifying the nature of their constituent resonators. Furthermore, the coupling strength can be tuned continuously from negative (strong coupling regime) to zero (weak coupling regime) and further to positive (strong coupling regime) and vice versa. Our work opens a door to the optimization of the coupling strength of photonic molecules in situ for the study of cavity quantum electrodynamics and the development of efficient quantum information devices.

On-chip integrated optofluidic complex refractive index sensing using silicon photonic crystal nanobeam cavities.

Complex refractive index sensing is proposed and experimentally demonstrated in optofluidic sensors based on silicon photonic crystal nanobeam cavities. The sensitivities are 58 and 139 nm/RIU, respectively, for the real part (n) and the imaginary part (κ) of the complex refractive index, and the corresponding detection limits are 1.8×10(-5) RIU for n and 4.1×10(-6) RIU for κ. Moreover, the capability of the complex refractive index sensing method to detect the concentration composition of the ternary mixture is demonstrated without the surface immobilization of functional groups, which is impossible to realize with the conventional refractive index sensing scheme.

Effects of viscosity and acoustic streaming on the interparticle radiation force between rigid spheres in a standing wave.

The total acoustic radiation force acting on interacting spheres in a viscous fluid consists of the primary and secondary forces. The primary force pushes rigid spheres to the pressure node due to the incident standing wave. The secondary force is the interparticle force caused by the interaction between spheres in the standing wave. In this study, an algorithm based on the multipole series expansion and Stokeslet method is proposed for calculating the primary and secondary radiation forces acting on a pair of spheres in a viscous fluid. It is concluded that the acoustical interaction between a pair of spheres is considerably stronger in a viscous fluid compared to the inviscid case due to the streaming effects in the viscous fluid. For spheres located far from each other, the interaction becomes considerably weak; thus, the spheres move mainly due to the primary radiation force.

Solid electrically tunable dual-focus lens using freeform surfaces and microelectro-mechanical-systems actuator.

In this Letter, a miniature solid tunable dual-focus (DF) lens, which is designed using freeform optical surfaces and driven by one microelectro-mechanical-systems rotary actuator, is reported. Such a lens consists of two optical elements, each having a flat surface and one freeform surface optimized by ray-tracing technology. By changing the relative rotation angle of the two lens elements, the lens configuration can form double foci with corresponding focal lengths varied simultaneously, resulting in a tunable DF effect. Results show that one of the focal lengths is tuned from about 30 to 20 mm, while the other one is varied from about 30 to 60 mm, with a maximum rotation angle of about 8.2 deg.

Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators.

This article reviews mechanically-tunable photonic devices with on-chip integrated MEMS/NEMS actuators. With related reports mostly published within the last decade, this review focuses on the tuning mechanisms of various passive silicon photonic devices, including tunable waveguides, couplers, ring/disk resonators, and photonic crystal cavities, and their results are selectively elaborated upon and compared. Applications of the mechanisms are also discussed. Future development of mechanically-tunable photonics is considered and one possible approach is based on plasmonics, which can confine light energy in the nano-scale space. Optomechanics is another innovation, derived from the strong coupling of optical and mechanical degrees of freedom. State-of-the-art studies of mechanically-tunable plasmonics and on-chip optomechanics are also selectively reviewed.

Tuning the quality factor of split nanobeam cavity by nanoelectromechanical systems.

A split nanobeam cavity is theoretically designed and experimentally demonstrated. Compared with the traditional photonic crystal nanobeam cavities, it has an air-slot in its center. Through the longitudinal and lateral movement of half part of the cavity, the resonance wavelength and quality factor are tuned. Instead of achieving a cavity with a large tunable wavelength range, the proposed split nanobeam cavity demonstrates a considerable quality factor change but the resonance wavelength is hardly varied. Using a nanoelectromechanical system (NEMS) comb-drive actuator to control the longitudinal and lateral movement of the split nanobeam cavity, the experimentally-measured change of quality factor agrees well with the simulated value. Meanwhile, the variation range of resonance wavelength is smaller than the full width at half maximum of the resonance. The proposed structure may have potential application in Q-switched lasers.

Miniature adjustable-focus endoscope with a solid electrically tunable lens.

The design, fabrication and characterization of a miniature adjustable-focus endoscope are reported. Such an endoscope consists of a solid tunable lens for optical power tuning, two slender piezoelectric benders for laterally moving the lens elements perpendicular to the optical axis, and an image fiber bundle for image transmission. Both optical and mechanical designs are presented in this paper. Dynamic tuning of optical powers from about 135 diopters to about 205 diopters is experimentally achieved from the solid tunable lens, which contains two freeform surfaces governed by 6-degree polynomials and optimized by ray tracing studies. Results show that there is no obvious distortion or blurring in the images obtained, and the recorded resolution of the lens reaches about 30 line pairs per mm. Three test targets located at various object distances of 20 mm, 50 mm and 150 mm are focused individually by the endoscope by applying different driving DC voltages to demonstrate its adjustable-focus capability.

Tuning all-Optical Analog to Electromagnetically Induced Transparency in nanobeam cavities using nanoelectromechanical system.

We report the observations of all-optical electromagnetically induced transparency in nanostructures using waveguide side-coupled with photonic crystal nanobeam cavities, which has measured linewidths much narrower than individual resonances. The quality factor of transparency resonance can be 30 times larger than those of measured individual resonances. When the gap between cavity and waveguide is reduced to 10 nm, the bandwidth of destructive interference region can reach 10 nm while the width of transparency resonance is 0.3 nm. Subsequently, a comb-drive actuator is introduced to tune the line shape of the transparency resonance. The width of the peak is reduced to 15 pm and the resulting quality factor exceeds 10(5).

Design of mechanically-tunable photonic crystal split-beam nanocavity.

Photonic crystal split-beam nanocavities allow for ultra-sensitive optomechanical transductions but are degraded due to their relatively low optical quality factors. We have proposed and experimentally demonstrated a new type of one-dimensional photonic crystal split-beam nanocavity optimized for an ultra-high optical-quality factor. The design is based on the combination of the deterministic method and hill-climbing algorithm. The latter is the simplest and most straightforward method of the local search algorithm that provides the local maximum of the chosen quality factors. This split-beam nanocavity is made up of two mechanical uncoupled cantilever beams with Bragg mirrors patterned onto it and separated by a 75-nm air gap. Experimental results emphasize that the quality factor of the second-order TE mode can be as high as 1.99×10(4). Additionally, one beam of the device is actuated in the lateral direction with the aid of a NEMS actuator, and the quality factor maintains quite well even if there is a lateral offset up to 64 nm. Potentially promising applications, such as sensitive optomechanical torque sensor, local tuning of Fano resonance, all-optical-reconfigurable filters, etc., are foreseen.

Numerical study of interparticle radiation force acting on rigid spheres in a standing wave.

Acoustic radiation force can be used to move micro-sized particles, such as cells, in microfluidic devices. Although the number of particles in a microfluidic device is large, typically 2.5% (weight/volume), the acoustic force acting on a particle is commonly calculated using an analytical formula for a single particle in infinite medium. The interparticle forces are typically ignored as these are not easily accounted for and calculated with simple closed-form solutions. Based on the isothermal theory for an ideal fluid, a numerical scheme is hereby proposed to calculate the total radiation force, including the interparticle forces. The method uses the multipole series expansion and the weighted residual method to solve the governing Helmholtz equation with the necessary boundary conditions on the particle surface. The effect of different parameters on the primary and interparticle forces is studied using the proposed numerical scheme. It is shown that, near the pressure node, the interparticle forces are dominant and configurations of the spheres are determined by the interparticle forces. The proposed numerical scheme can be used for various sizes of spherical particles.

Numerical calculation of acoustic radiation forces acting on a sphere in a viscous fluid.

In this work, a numerical scheme based on multipoles and Stokeslet is proposed for calculating the radiation force acting on a single rigid sphere in a viscous fluid. First-order velocity and pressure are obtained from the multipole series solution, and the volumetric force in the acoustic streaming is subsequently calculated from the first-order velocity and pressure. The acoustic streaming equations are solved using the Stokeslet method within a finite domain descretized by tetrahedral elements. The boundary conditions for streaming are imposed using the weighted residue method to obtain the unknown coefficients in the multipole series expansion for the second-order velocity potentials. The radiation forces obtained from this multipole-Stokeslet method match well with Doinikov's series solution, for a wide range of the sphere size. Compared to the complicated series solution, the multipole-Stokeslet method can be easily implemented without the evaluation of the semi-infinite integrals.

Torsional optical spring effect in coupled nanobeam photonic crystal cavities.

Compared to probe-tuned optomechanical cavity systems, coupled cavity systems have the merit of having much stronger optomechanical interactions. However, to date, the torsional optomechanical effects of coupled cavities have rarely been investigated. In this Letter, we report a torsional optical spring effect in coupled nanobeam photonic crystal cavities. One of the cavities is suspended by a multi-degree-of-freedom spring mechanism that supports torsional vibration modes. The cavities' light field acts in reverse on the selected torsional mode, thus generating a torsional optical spring effect. The experimental results show that the third-order torsional mode of the spring mechanism is optically stiffened and a maximum frequency increase of 77.1 Hz is obtained. The device provides a novel configuration for the optomechanical design of a new degree of freedom (torsional motion) and the coupled cavities are favorable for strong optomechanical interactions in the torsional direction.

Energy-efficient utilization of bipolar optical forces in nano-optomechanical cavities.

Nanoscale all-optical circuits driven by optical forces have broad applications in future communication, computation, and sensing systems. Because human society faces huge challenges of energy saving and emission reduction, it is very important to develop energy-efficient nano-optomechanical devices. Due to their high quality (Q) factors, resonance modes of cavities are capable of generating much larger forces than waveguide modes. Here we experimentally demonstrate the use of resonance modes of double-coupled one-dimensional photonic crystal cavities to generate bipolar optical forces. Attractive and repulsive forces of -6.2 nN and 1.9 nN were obtained with respective launching powers of 0.81 mW and 0.87 mW in the waveguide just before cavities. Supported by flexible nanosprings (spring constant 0.166 N/m), one cavity is pulled to (pushed away from) the other cavity by 37.1 nm (11.4 nm). The shifts of the selected resonance modes of the device are mechanically and thermally calibrated with an integrated nanoelectromechanical system actuator and a temperature-controlled testing platform respectively. Based on these experimentally-obtained relations, probe mode shifts due to the optomechanical effect are decoupled from those due to the thermo-optic effect. Actuated by the third-order even pump mode, the optomechanical shift of the second-order even probe mode is found to be about 2.5 times its thermal shift, indicating a highly efficient conversion of light energy to mechanical energy.

Out-of-plane nanomechanical tuning of double-coupled one-dimensional photonic crystal cavities.

We demonstrate tuning of double-coupled one-dimensional photonic crystal cavities by their out-of-plane nanomechanical deformations. The coupled cavities are pulled by the vertical electrostatic force generated by the potential difference between the device layer and the handle layer in a silicon-on-insulator chip, and the induced deformations are analyzed by the finite element method. Applied with a voltage of 12 V, the cavities obtain a redshift of 0.0405 nm (twice the linewidth) for their second-order odd resonance mode and a blueshift of 0.0635 nm (three times the linewidth) for their second-order even resonance mode, which are mainly attributed to out-of-plane relative displacement. Out-of-plane tuning of coupled cavities does not need actuators and corresponding circuits; thus the device is succinct and compact. This working principle can be potentially applied in chip-level optoelectronic devices, such as sensors, switches, routers, and tunable filters.

Nanoelectromechanical-systems-controlled bistability of double-coupled photonic crystal cavities.

In this Letter, we report an approach to controlling the bistability of double-coupled photonic crystal cavities with a nanoelectromechanical comb drive, in which the optical force and thermo-optic effect form a feedback mechanism to the effective index of the cavities, and the gap width between the cavities is steered by the comb drive. A model based on temporal coupled mode theory is established to analyze this approach. Hysteresis loops characterizing the bistability are experimentally achieved by sweeping the gap width forward and in reverse. In addition, the experiments also demonstrate that the bistability is tunable by varying the input light power.

Microelectromechanically-driven miniature adaptive Alvarez lens.

A miniature solid-state varifocal lens based on Alvarez principle with lens elements having free-form surfaces is reported. The Alvarez lens elements are implemented with diamond-turning and replication molding processes. They are integrated with electrostatically-driven MEMS comb-drive actuators fabricated using SOI micromachining. Dynamic tuning of focal length more than 1.5 times (from 3 mm to 4.65 mm) is experimentally demonstrated with only small MEMS-driven lateral movements of 40 µm. Such varifocal lens may be useful in miniature cameras for autofocus and zooming due to its advantages including ease of packaging and fast tuning speed.

Tuning of split-ladder cavity by its intrinsic nano-deformation.

A wide-range split-ladder photonic crystal cavity which is tuned by changing its intrinsic gap width is designed and experimentally verified. Different from the coupled cavities that feature resonance splitting into symmetric and anti-symmetric modes, the single split-ladder cavity has only the symmetric modes of fundamental resonance and second-order resonance in its band gap. Finite-difference time-domain simulations demonstrate that bipolar resonance tuning (red shift and blue shift respectively) can be achieved by shrinking and expanding the cavity's gap, and that there is a linear relationship between the resonance shifts and changes in gap width. Simulations also show that the split-ladder cavity can possess a high Q-factor when the total number of air holes in the cavity is increased. Experimentally, comb drive actuator is used to control the extent of the cavity's gap and the variation of its displacements with applied voltage is calibrated with a scanning electron microscope. The measured wavelength of the second-order resonance shifts linearly towards blue with increase in gap width. The maximum blue shift is 17 nm, corresponding to a cavity gap increase of 26 nm with no obvious degradation of Q-factor.