ABSTRACT
The paper reports on high voltage (HV)-isolated MEMS quad-solenoid transformers for compact isolated gate drivers and bias power supplies. The component is wafer-level fabricated via a novel MEMS micro-casting technique, where the tightly coupled quad-solenoid chip consists of monolithically integrated 3D inductive coils and an inserted ferrite magnetic core for high-efficiency isolated power transmission through electromagnetic coupling. The proposed HV-isolated transformer demonstrates a high inductance value of 743.2 nH, along with a small DC resistance of only 0.39 Ω in a compact footprint of 6 mm2, making it achieve a very high inductance integration density (123.9 nH/mm2) and the ratio of L/R (1906 nH/Ω). More importantly, with embedded ultra-thick serpentine-shaped (S-shaped) SiO2 isolation barriers that completely separate the primary and secondary windings, an over 2 kV breakdown voltage is obtained. In addition, the HV-isolated transformer chips exhibit a superior power transfer efficiency of over 80% and ultra-high dual-phase saturation current of 1.4 A, thereby covering most practical cases in isolated, integrated bias power supplies such as high-efficiency high-voltage-isolated gate driver solutions.
ABSTRACT
In this paper, an event-driven wireless sensor node is proposed and demonstrated. The primary design objective is to devise a wireless sensor node with miniaturization, integration, and high-accuracy recognition ability. The proposed wireless sensor node integrates two vibration-threshold-triggered energy harvesters that sense and power a threshold voltage control circuit for power management, a microcontroller unit (MCU) for system control, a one-dimensional convolutional neural network (1D-CNN) environment data analysis and vibration events distribution, and a radio frequency (RF) digital baseband transmitter with IEEE 802.15.4-/.6 protocols. The dimensions of the wireless sensor node are 4 × 2 × 1 cm3. Finally, the proposed wireless sensor node was fabricated and tested. The alarming time for detecting the vibration event is less than 6 s. The measured recognition accuracy of three events (knock, shake, and heat) is over 97.5%. The experimental results showed that the proposed integrated wireless sensor node is very suitable for wireless environmental monitoring systems.
ABSTRACT
This paper proposes a piezoresistive high-temperature absolute pressure sensor based on (100)/(111) hybrid SOI (silicon-on-insulator) silicon wafers, where the active layer is (100) silicon and the handle layer is (111) silicon. The 1.5 MPa ranged sensor chips are designed with the size as tiny as 0.5 × 0.5 mm, and the chips are fabricated only from the front side of the wafer for simple, high-yield and low-cost batch production. Herein, the (100) active layer is specifically used to form high-performance piezoresistors for high-temperature pressure sensing, while the (111) handle layer is used to single-side construct the pressure-sensing diaphragm and the pressure-reference cavity beneath the diaphragm. Benefitting from front-sided shallow dry etching and self-stop lateral wet etching inside the (111)-silicon substrate, the thickness of the pressure-sensing diaphragm is uniform and controllable, and the pressure-reference cavity is embedded into the handle layer of (111) silicon. Without the conventionally used double-sided etching, wafer bonding and cavity-SOI manufacturing, a very small sensor chip size of 0.5 × 0.5 mm is achieved. The measured performance of the 1.5 MPa ranged pressure sensor exhibits a full-scale output of approximately 59.55 mV/1500 kPa/3.3 VDC in room temperature and a high overall accuracy (combined with hysteresis, non-linearity and repeatability) of 0.17%FS within the temperature range of -55 °C to 350 °C. In addition, the thermal hysteresis is also evaluated as approximately 0.15%FS at 350 °C. The tiny-sized high temperature pressure sensors are promising in various industrial automatic control applications and wind tunnel testing systems.
ABSTRACT
A silicon-chip-based 3D metal solenoidal transformer is proposed and developed to achieve AC-DC conversion for integrated power supply applications. With wafer-level micro electromechanical systems (MEMS) fabrication technique to form the metal casting mold and the following micro-casting technique to rapidly (within 6 min) fill molten ZnAl alloy into the pre-micromachined silicon mold, 45-turns primary solenoid and 7-turns secondary solenoid are fabricated in silicon wafers, where the two intertwining solenoids are located at inner deck and outer deck, respectively. Permalloy soft magnetic core is inserted into a pre-etched channel in the silicon chip, which is surrounded by the solenoids. The size of the chip-style transformer is as small as 8.5 mm × 6.6 mm × 2.5 mm. The internal resistance of the primary solenoid is 1.82 Ω and that of the secondary solenoid is 0.16 Ω. The working frequency of the transformer is 60 kHz. Combined with the testing circuit of the switch mode power supply, the DC voltage of 13.02 V is obtained when the input is 110 V at 50 Hz/60 Hz. Furthermore, the on-chip 3D solenoidal transformer is used for lighting four LEDs, which shows great potential for AC-DC power supply. The wafer-level fabricated chip-style solenoidal AC-DC transformer for integrated power supply is advantageous in uniform fabrication, small size and volume applications.
ABSTRACT
A silicon-chip based double-deck three-dimensional (3D) solenoidal electromagnetic (EM) kinetic energy harvester is developed to convert low-frequency (<100 Hz) vibrational energy into electricity with high efficiency. With wafer-level micro electro mechanical systems (MEMS) fabrication to form a metal casting mold and the following casting technique to rapidly (within minutes) fill molten ZnAl alloy into the pre-micromachined silicon mold, the 300-turn solenoid coils (150 turns for either inner solenoid or outer solenoid) are fabricated in silicon wafers for saw dicing into chips. A cylindrical permanent magnet is inserted into a pre-etched channel for sliding upon external vibration, which is surrounded by the solenoids. The size of the harvester chip is as small as 10.58 mm × 2.06 mm × 2.55 mm. The internal resistance of the solenoids is about 17.9 Ω. The maximum peak-to-peak voltage and average power output are measured as 120.4 mV and 43.7 µW. The EM energy harvester shows great improvement in power density, which is 786 µW/cm3 and the normalized power density is 98.3 µW/cm3/g. The EM energy harvester is verified by experiment to be able to generate electricity through various human body movements of walking, running and jumping. The wafer-level fabricated chip-style solenoidal EM harvesters are advantageous in uniform performance, small size and volume applications.
ABSTRACT
We report here a biophysical and biochemical approach to determine the differences in interactions of NiCR and NiCR-2H with DNA. Our goal is to determine whether such interactions are responsible for the recently observed differences in their cytotoxicity toward MCF-7 cancer cells. Viscosity measurement and fluorescence displacement titration indicated that both NiCR and NiCR-2H bind weakly to duplex DNA in the grooves. The coordination of NiCR-2H with the N-7 of 2'-deoxyguanosine 5'-monophosphate (5'-dGMP) is stronger than that of NiCR as determined by (1)H NMR. NiCR-2H, like NiCR, can selectively oxidize guanines present in distinctive DNA structures (e.g., bulges), and notably, NiCR-2H oxidizes guanines more efficiently than NiCR. In addition, UV and (1)H NMR studies revealed that NiCR is oxidized into NiCR-2H in the presence of KHSO(5) at low molar ratios with respect to NiCR (
ABSTRACT
[reaction: see text] Synthesis of glycosyl cyanides was optimized with a new catalyst system. Reduction of tri-O-acetyl-beta-L-fucopyranosyl cyanide with Pd-hydrogen, in the presence of Ac(2)O and Boc(2)O, gave N-protected-mono- and -di-(2,3,4-tri-O-acetyl-beta-L-fucopyranosylmethyl)-amines, which allow for the syntheses of small cluster oligosaccharide mimetics of fucopyranosylomethyl-substituted ureas. From di-(2,3,4-tri-O-acetyl-beta-L-fucopyranosylmethyl) amine was also prepared a carbamoyl chloride as a potentially useful synthon for preparation of more complex C-glycosidic conjugates.
