Hybrid Metrology for Nanostructured Optical Metasurfaces.

Metasurfaces have garnered increasing research interest in recent years due to their remarkable advantages, such as efficient miniaturization and novel functionalities compared to traditional optical elements such as lenses and filters. These advantages have facilitated their rapid commercial deployment. Recent advancements in nanofabrication have enabled the reduction of optical metasurface dimensions to the nanometer scale, expanding their capabilities to cover visible wavelengths. However, the pursuit of large-scale manufacturing of metasurfaces with customizable functions presents challenges in controlling the dimensions and composition of the constituent dielectric materials. To address these challenges, the combination of block copolymer (BCP) self-assembly and sequential infiltration synthesis (SIS), offers an alternative for fabrication of high-resolution dielectric nanostructures with tailored composition and optical functionalities. However, the absence of metrological techniques capable of providing precise and reliable characterization of the refractive index of dielectric nanostructures persists. This study introduces a hybrid metrology strategy that integrates complementary synchrotron-based traceable X-ray techniques to achieve comprehensive material characterization for the determination of the refractive index on the nanoscale. To establish correlations between material functionality and their underlying chemical, compositional and dimensional properties, TiO2 nanostructures model systems were fabricated by SIS of BCPs. The results from synchrotron-based analyses were integrated into physical models, serving as a validation scheme for laboratory-scale measurements to determine effective refractive indices of the nanoscale dielectric materials.

A new sample chamber for hybrid detection of scattering and fluorescence, using synchrotron radiation in the soft x-ray and extreme ultraviolet (EUV) spectral range.

Smaller and more complex nanostructures in the semiconductor industry require a constant upgrade of accompanying metrological methods and equipment. A central task for nanometrology is the precise determination of structural features of gratings in the nanometer range as well as their elemental composition. Scatterometry and x-ray fluorescence in the soft x-ray and extreme ultraviolet spectral ranges are ideally suited to this task. We here present a new, compact measurement chamber that can simultaneously detect the elastically scattered signal and the fluorescence, originating from nanoscale grating samples. Its geometry enables detecting scattered intensity over a wide angular range with a variable angle of incidence. We show first experiments on industry-relevant test structures from the commissioning process alongside the specifications of the setup, located at PTB's soft x-ray radiometry beamline at the synchrotron radiation facility BESSY II in Berlin.

Nanoscale grating characterization using EUV scatterometry and soft x-ray scattering with plasma and synchrotron radiation.

Modern semiconductor structures reach sizes in the nanometer regime. Optical metrology characterizes test structures for the quality assessment of semiconductor fabrication. The limits of radiation to resolve nanometer structure sizes can be overcome by shortening the wavelength. The compact source extreme ultraviolet (EUV) scatterometer presented here characterizes samples in the EUV spectral range using plasma radiation. Reference measurements with synchrotron radiation are carried out using a beamline scatterometer. A comparison including Markov chain Monte Carlo sampling shows that the compact source and beamline setups can both determine the given dimensional parameters of a nanoscale grating with uncertainties in the sub-nanometer range. Grating characterization based on soft x ray scattering has increased accuracy.

Determination of optical constants of thin films in the EUV.

The determination of fundamental optical parameters is essential for the development of new optical elements such as mirrors, gratings, or photomasks. Especially in the extreme ultraviolet (EUV) and soft x-ray spectral range, the existing databases for the refractive indices of many materials and compositions are insufficient or are a mixture of experimentally measured and calculated values from atomic scattering factors. Since the physical properties of bulk materials and thin films with thicknesses in the nanometer range are not identical, measurements need to be performed on thin layers. In this study we demonstrate how optical constants of various thin film samples on a bulk substrate can be determined from reflection measurements in the EUV photon energy range from 62 eV to 124 eV. Thin films with thickness of 20 nm to 50 nm of pure Mo, Ni, Pt, Ru, Ta, and Te and different compositions of NixAlx, PtTe, PtxMo, RuxTax, Ru3Re, Ru2W, and TaTeN were prepared by DC magnetron sputtering and measured using EUV reflectometry. The determination optical constants of the different materials are discussed and compared to existing tabulated values.

Non-linear Raman scattering intensities in graphene.

We show that the Raman scattering signals of the two dominant Raman bands G and 2D of graphene sensitively depend on the laser intensity in opposite ways. High electronic temperatures reached for pulsed laser excitation lead to an asymmetric Fermi-Dirac distribution at the different optically resonant states contributing to Raman scattering. This results in a partial Pauli blocking of destructively interfering quantum pathways for G band scattering, which is observed as a super-linear increase of the G band intensity with laser power. The 2D band, on the other hand, exhibits sub-linear intensity scaling due to the blocking of constructively interfering contributions. The opposite intensity dependencies of the two bands are found to reduce the observed 2D/G ratio, a key quantity used for characterizing graphene samples, by more than factor two for electronic temperatures around 3000 K.

Vibrational Spectroscopy and Morphological Studies on Protein-Capped Biosynthesized Silver Nanoparticles.

Silver nanoparticles (AgNPs) have a large number of applications in technology and physical and biological sciences. These nanomaterials can be synthesized by chemical and biological methods. The biological synthesis using fungi represents a green approach for nanomaterial production that has the advantage of biocompatibility. This work studies silver nanoparticles (AgNPs) produced by fungi Rhodotorula glutinis and Rhodotorula mucilaginosa found in ordinary soil of the Universidade Federal do Ceará campus (Brazil). The biosynthesized AgNPs have a protein-capping layer involving a metallic Ag core. The focus of this paper is to investigate the size and structure of the capping layer, how it interacts with the Ag core, and how sensitive the system (core + protein) is to visible light illumination. For this, we employed SEM, AFM, photoluminescence spectroscopy, SERS, and dark-field spectroscopy. The AgNPs were isolated, and SEM measurements showed the average size diameter between 58 nm for R. glutinis and 30 nm for R. mucilaginosa. These values are in agreement with the AFM measurements, which also provided the average size diameter of 85 nm for R. glutinis and 56 nm for R. mucilaginosa as well as additional information about the average size of the protein-capping layers, whose found values were 24 and 21 nm for R. mucilaginosa and R. glutinis nanoparticles, respectively. The protein-capping layer structure seemed to be easily disturbed, and the SERS spectra were unstable. It was possible to identify Raman peaks that might be related to α-helix, ß-sheet, and protein mixed structures. Finally, dark-field microscopy showed that the silver cores are very stable, but some are affected by the laser energy due to heating or melting.

Controlling photon antibunching from 1D emitters using optical antennas.

Single-photon emission is a hallmark of atom-like 0D quantum emitters, such as luminescent semiconductor nanocrystals, nitrogen vacancies in diamond and organic dye molecules. In higher dimensional nanostructures, on the other hand, multiple spatially separated electronic excitations may exist giving rise to more than one emitted photon at a time. We show that optical nanoantennas can be used to control the photon emission statistic of 1D nanostructures and to convert them into single-photon sources. Antenna-control exploits spatially confined near-field enhanced absorption and emission rates resulting in locally increased annihilation of mobile excitons and radiative recombination. As proof of concept, we experimentally demonstrate the improvement of the degree of antibunching in the photoluminescence of single carbon nanotubes using a metal tip at room temperature. Our results indicate that, in addition to improving the performance of single photon sources, optical antennas have the potential to open up a broad range of materials for quantum information technology.

Temperature-Dependent Ambipolar Charge Carrier Mobility in Large-Crystal Hybrid Halide Perovskite Thin Films.

Perovskite-based thin-film solar cells today reach power conversion efficiencies of more than 22%. Methylammonium lead iodide (MAPI) is prototypical for this material class of hybrid halide perovskite semiconductors and at the focal point of interest for a growing community in research and engineering. Here, a detailed understanding of the charge carrier transport and its limitations by underlying scattering mechanisms is of great interest to the material's optimization and development. In this article, we present an all-optical study of the charge carrier diffusion properties in large-crystal MAPI thin films in the tetragonal crystal phase from 170 K to room temperature. We probe the local material properties of individual crystal grains within a MAPI thin film and find a steady decrease of the charge carrier diffusion constant with increasing temperature. From the resulting charge carrier mobility, we find a power law dependence of µ ∝ T m with m = -(1.8 ± 0.1). We further study the temperature-dependent mobility of the orthorhombic crystal phase from 50 to 140 K and observe a distinctly different exponent of m = -(1.2 ± 0.1).

Grain Boundaries Act as Solid Walls for Charge Carrier Diffusion in Large Crystal MAPI Thin Films.

Micro- and nanocrystalline methylammonium lead iodide (MAPI)-based thin-film solar cells today reach power conversion efficiencies of over 20%. We investigate the impact of grain boundaries on charge carrier transport in large crystal MAPI thin films using time-resolved photoluminescence (PL) microscopy and numerical model calculations. Crystal sizes in the range of several tens of micrometers allow for the spatially and time resolved study of boundary effects. Whereas long-ranged diffusive charge carrier transport is observed within single crystals, no detectable diffusive transport occurs across grain boundaries. The observed PL transients are found to crucially depend on the microscopic geometry of the crystal and the point of observation. In particular, spatially restricted diffusion of charge carriers leads to slower PL decay near crystal edges as compared to the crystal center. In contrast to many reports in the literature, our experimental results show no quenching or additional loss channels due to grain boundaries for the studied material, which thus do not negatively affect the performance of the derived thin-film devices.

Phase retrieval of ultrashort laser pulses using a MIIPS algorithm.

We developed a new method for retrieving the group delay dispersion of a laser from Multiphoton Intra-pulse Interference Phase Scan (MIIPS) data. The method takes into account the spectral amplitude of the laser pulse and provides a direct feedback on the accuracy of the retrieval. The main advantage of the method derives from providing sufficiently high accuracy to avoid the need for multiple experimental iterations. Another advantage is that the new method can discriminate among pulses with different spectral phase and amplitude profiles, in which MIIPS traces occupy the same position in the phase-frequency MIIPS map.

Raman Radiation Patterns of Graphene.

We report the angular distribution of the G and 2D Raman scattering from graphene on glass by detecting back focal plane patterns. The G Raman emission can be described by a superposition of two incoherent orthogonal point dipoles oriented in the graphene plane. Due to double resonant Raman scattering, the 2D emission can be represented by the sum of either three incoherent dipoles oriented 120° with respect to each other, or two orthogonal incoherent ones with a 3:1 weight ratio. Parameter-free calculations of the G and 2D intensities are in excellent agreement with the experimental radiation patterns. We show that the 2D polarization ratio and the 2D/G intensity ratio depend on the numerical aperture of the microscope objective. This is due to the depolarization of the emission and excitation light when graphene is on a dielectric substrate, as well as to tight focusing. The polarization contrast decreases substantially for increasing collection angle, due to polarization mixing caused by the air-dielectric interface. This also influences the intensity ratio I(2D)/I(G), a crucial quantity for estimating the doping in graphene. Our results are thus important for the quantitative analysis of the Raman intensities in confocal microscopy. In addition, they are relevant for understanding the influence of signal enhancing plasmonic antenna structures, which typically modify the sample's radiation pattern.

Graphene Near-Degenerate Four-Wave Mixing for Phase Characterization of Broadband Pulses in Ultrafast Microscopy.

We investigate near-degenerate four-wave mixing in graphene using femtosecond laser pulse shaping microscopy. Intense near-degenerate four-wave mixing signals on either side of the exciting laser spectrum are controlled by amplitude and phase shaping. Quantitative signal modeling for the input pulse parameters shows a spectrally flat phase response of the near-degenerate four-wave mixing due to the linear dispersion of the massless Dirac Fermions in graphene. Exploiting these properties we demonstrate that graphene is uniquely suited for the intrafocus phase characterization and compression of broadband laser pulses, circumventing disadvantages of common methods utilizing second or third harmonic light.

Microscopic view on the ultrafast photoluminescence from photoexcited graphene.

We present a joint theory-experiment study on ultrafast photoluminescence from photoexcited graphene. On the basis of a microscopic theory, we reveal two distinct mechanisms behind the occurring photoluminescence: besides the well-known incoherent contribution driven by nonequilibrium carrier occupations, we found a coherent part that spectrally shifts with the excitation energy. In our experiments, we demonstrate for the first time the predicted appearance and spectral shift of the coherent photoluminescence.

Radiation channels close to a plasmonic nanowire visualized by back focal plane imaging.

We investigated the angular radiation patterns, a key characteristic of an emitting system, from individual silver nanowires decorated with rare earth ion-doped nanocrystals. Back focal plane radiation patterns of the nanocrystal photoluminescence after local two-photon excitation can be described by two emission channels: excitation of propagating surface plasmons in the nanowire followed by leakage radiation and direct dipolar emission observed also in the absence of the nanowire. Theoretical modeling reproduces the observed radiation patterns which strongly depend on the position of excitation along the nanowire. Our analysis allows us to estimate the branching ratio into both emission channels and to determine the diameter-dependent surface plasmon quasi-momentum, important parameters of emitter-plasmon structures.