1.
Sensors (Basel)
; 17(9)2017 Sep 12.
Article
in English
| MEDLINE
| ID: mdl-28895906
ABSTRACT
Silicon nitride photonics is on the rise owing to the broadband nature of the material, allowing applications of biophotonics, tele/datacom, optical signal processing and sensing, from visible, through near to mid-infrared wavelengths. In this paper, a review of the state of the art of silicon nitride strip waveguide platforms is provided, alongside the experimental results on the development of a versatile 300 nm guiding film height silicon nitride platform.