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Opt Express ; 21(6): 6807-25, 2013 Mar 25.
Article in English | MEDLINE | ID: mdl-23546063

ABSTRACT

The scattering of a partially-coherent wave from a statistically rough material surface is investigated via derivation of the scattered field cross-spectral density function. Two forms of the cross-spectral density are derived using the physical optics approximation. The first is applicable to smooth-to-moderately rough surfaces and is a complicated expression of source and surface parameters. Physical insight is gleaned from its analytical form and presented in this work. The second form of the cross-spectral density function is applicable to very rough surfaces and is remarkably physical. Its form is discussed at length and closed-form expressions are derived for the angular spectral degree of coherence and spectral density radii. Furthermore, it is found that, under certain circumstances, the cross-spectral density function maintains a Gaussian Schell-model form. This is consistent with published results applicable only in the paraxial regime. Lastly, the closed-form cross-spectral density functions derived here are rigorously validated with scatterometer measurements and full-wave electromagnetic and physical optics simulations. Good agreement is noted between the analytical predictions and the measured and simulated results.


Subject(s)
Manufactured Materials , Models, Theoretical , Photometry/methods , Scattering, Radiation , Computer Simulation , Light , Photons , Surface Properties
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