ABSTRACT
In a popular integration process for quantum information technologies, localization microscopy of quantum emitters guides lithographic placement of photonic structures. However, a complex coupling of microscopy and lithography errors degrades registration accuracy, severely limiting device performance and process yield. We introduce a methodology to solve this widespread but poorly understood problem. A new foundation of traceable localization enables rapid characterization of lithographic standards and comprehensive calibration of cryogenic microscopes, revealing and correcting latent systematic effects. Of particular concern, we discover that scale factor deviation and complex optical distortion couple to dominate registration errors. These novel results parameterize a process model for integrating quantum dots and bullseye resonators, predicting higher yield by orders of magnitude, depending on the Purcell factor threshold as a quantum performance metric. Our foundational methodology is a key enabler of the lab-to-fab transition of quantum information technologies and has broader implications to cryogenic and correlative microscopy.
ABSTRACT
Acoustic wave devices provide a promising chip-scale platform for efficiently coupling radio frequency (RF) and optical fields. Here, we use an integrated piezo-optomechanical circuit platform that exploits both the piezoelectric and photoelastic coupling mechanisms to link 2.4 GHz RF waves to 194 THz (1550 nm) optical waves, through coupling to propagating and localized 2.4 GHz acoustic waves. We demonstrate acousto-optic modulation, resonant in both the optical and mechanical domains, in which waveforms encoded on the RF carrier are mapped to the optical field. We also show opto-acoustic gating, in which the application of modulated optical pulses interferometrically gates the transmission of propagating acoustic pulses. The time-domain characteristics of this system under both pulsed RF and pulsed optical excitation are considered in the context of the different physical pathways involved in driving the acoustic waves, and modelled through the coupled mode equations of cavity optomechanics.
ABSTRACT
We report a photoluminescence imaging system for locating single quantum emitters with respect to alignment features. Samples are interrogated in a 4 K closed-cycle cryostat by a high numerical aperture (NA = 0.9, 100× magnification) objective that sits within the cryostat, enabling high efficiency collection of emitted photons without image distortions due to the cryostat windows. The locations of single InAs/GaAs quantum dots within a >50 µm × 50 µm field of view are determined with ≈4.5 nm uncertainty (one standard deviation) in a 1 s long acquisition. The uncertainty is determined through a combination of a maximum likelihood estimate for localizing the quantum dot emission, and a cross correlation method for determining the alignment mark center. This location technique can be an important step in the high-throughput creation of nanophotonic devices that rely upon the interaction of highly confined optical modes with single quantum emitters.
ABSTRACT
Optomechanical cavities have been studied for applications ranging from sensing to quantum information science. Here, we develop a platform for nanoscale cavity optomechanical circuits in which optomechanical cavities supporting co-localized 1550 nm photons and 2.4 GHz phonons are combined with photonic and phononic waveguides. Working in GaAs facilitates manipulation of the localized mechanical mode either with a radio frequency (RF) field through the piezo-electric effect, which produces acoustic waves that are routed and coupled to the optomechanical cavity by phononic crystal waveguides, or optically through the strong photoelastic effect. Along with mechanical state preparation and sensitive readout, we use this to demonstrate an acoustic wave interference effect, similar to atomic coherent population trapping, in which RF-driven coherent mechanical motion is cancelled by optically-driven motion. Manipulating cavity optomechanical systems with equal facility through both photonic and phononic channels enables new architectures for signal transduction between the optical, electrical, and mechanical domains.
ABSTRACT
Cavity optomechanical systems are being studied for their potential in areas such as metrology, communications, and quantum information science. For a number of recently proposed applications in which multiple optical and mechanical modes interact, an outstanding challenge is to develop multimode architectures that allow flexibility in the optical and mechanical sub-system designs while maintaining the strong interactions that have been demonstrated in single-mode systems. To that end, we demonstrate slot-mode optomechanical crystals, devices in which photonic and phononic crystal nanobeams separated by a narrow slot are coupled via optomechanical interactions. These nanobeam pairs are patterned to confine a mechanical breathing mode at the center of one beam and a low-loss optical mode in the slot between the beams. This architecture affords great design flexibility towards multimode optomechanics, as well as substantial optomechanical coupling rates. We show this by producing slot-mode devices in stoichiometric Si3N4, with optical modes in the 980 nm band coupled to mechanical modes at 3.4 GHz, 1.8 GHz, and 400 MHz. We exploit the Si3N4 tensile stress to achieve slot widths down to 24 nm, which leads to enhanced optomechanical coupling, sufficient for the observation of optomechanical self-oscillations at all studied frequencies. We then develop multimode optomechanical systems with triple-beam geometries, in which two optical modes couple to a single mechanical mode, and two mechanical modes couple to a single optical mode. Taken together, these results demonstrate great flexibility in the design of multimode chip-scale optomechanical systems with large optomechanical coupling.
