Ultrasonic spectroscopy of sessile droplets coupled to optomechanical sensors.

We describe a system for interrogating the acoustic properties of sub-nanoliter liquid samples within an open microfluidics platform. Sessile droplets were deposited onto integrated optomechanical sensors, which possess ambient-medium-noise-limited sensitivity and can thus passively sense the thermally driven acoustic spectrum of the droplets. The droplet acoustic breathing modes manifest as resonant features in the thermomechanical noise spectrum of the sensor, in some cases hybridized with the sensor's own vibrational modes. Excellent agreement is found between experimental observations and theoretical predictions, over the entire ∼0-40 MHz operating range of our sensors. As an application example, we used the technique to monitor the temporal evolution of evaporating droplets. With suitable control over droplet size and morphology, this technique has the potential for precision acoustic sensing of small-volume biological and chemical samples.

Enhanced emission from hBN in sputtered microcavities.

In this observational study, we embed few-layer hexagonal boron nitride (hBN) inside a planar Fabry-Perot cavity fabricated using a pulsed DC magnetron sputtering system and show that the hBN retains its inherent visible range, defect-based luminescent properties following relatively energetic deposition processing. The observed surface-normal emission enhancement factor of ∼40 is in good agreement with theoretical predictions. We also found that embedded hBN subjected to a rapid thermal annealing treatment exhibits a cracking effect where the edges of the material glow distinctly brighter than adjacent regions. Our results might inform future efforts involving monolithic integration of hBN active layers.

Ultrasound sensing at thermomechanical limits with optomechanical buckled-dome microcavities.

We describe the use of monolithic, buckled-dome cavities as ultrasound sensors. Patterned delamination within a compressively stressed thin film stack produces high-finesse plano-concave optical resonators with sealed and empty cavity regions. The buckled mirror also functions as a flexible membrane, highly responsive to changes in external pressure. Owing to their efficient opto-acousto-mechanical coupling, thermal-displacement-noise limited sensitivity is achieved at low optical interrogation powers and for modest optical (Q ∼ 103) and mechanical (Q ∼ 102) quality factors. We predict and verify broadband (up to ∼ 5 MHz), air-coupled ultrasound detection with noise-equivalent pressure (NEP) as low as ∼ 30-100 µPa/Hz1/2. This corresponds to an ultrasonic force sensitivity ∼ 2 × 10-13 N/Hz1/2 and enables the detection of MHz-range signals propagated over distances as large as ∼ 20 cm in air. In water, thermal-noise-limited sensitivity is demonstrated over a wide frequency range (up to ∼ 30 MHz), with NEP as low as ∼ 100-800 µPa/Hz1/2. These cavities exhibit a nearly omnidirectional response, while being ∼ 3-4 orders of magnitude more sensitive than piezoelectric devices of similar size. Easily realized as large arrays and naturally suited to direct coupling by free-space beams or optical fibers, they offer significant practical advantages over competing optical devices, and thus could be of interest for several emerging applications in medical and industrial ultrasound imaging.

Polymer transfer technique for strain-activated emission in hexagonal boron nitride.

We present a hexagonal boron nitride (hBN) polymer-assisted transfer technique and discuss subtleties about the process. We then demonstrate localized emission from strained regions of the film draped over features on a prepatterned substrate. Notably, we provide insight into the brightness distribution of these emitters and show that the brightest emission is clearly localized to the underlyin-g substrate features rather than unintentional wrinkles present in the hBN film. Our results aide in the current discussion surrounding scalability of single photon emitter arrays.

Pressure sensing with high-finesse monolithic buckled-dome microcavities.

We describe the use of on-chip buckled-dome Fabry-Perot microcavities as pressure sensing elements. These cavities, fabricated by a controlled thin-film buckling process, are inherently sealed and support stable optical modes (finesse >103), which are well-suited to coupling by single-mode fibers. Changes in external pressure deflect the buckled upper mirror, leading to changes in resonance wavelengths. Experimental shifts are shown to be in good agreement with theoretical predictions. Sensitivities as large as ∼1nm/kPa, attributable to the low thickness (<2µm) of the buckled mirror, and resolution ∼10Pa are demonstrated. We discuss potential advantages over traditional low-finesse, quasi-planar Fabry-Perot pressure sensors.

Monolithically integrated membrane-in-the-middle cavity optomechanical systems.

We describe curved-mirror Fabry-Perot cavities with embedded silicon nitride membranes, fabricated using a monolithic surface-micromachining process. The presence of the suspended membranes was confirmed by confocal microscopy, and their properties were verified through optical studies and thermomechanical calibration of mechanical/vibrational noise spectra measured at room temperature and atmospheric pressure. The cavities exhibit reflectance-limited finesse (F ∼ 103) and wavelength-scale mode volumes (VM ∼ 10·λ3). The short cavity length (L ∼ 2·λ) results in large optomechanical coupling, which is desirable for numerous applications in sensing and quantum information.

Tunable bandpass imaging filter based on resonant tunneling through a ball lens assembly.

We describe a ball lens assembly, which functions as a broadly tunable bandpass filter and polarizer with imaging capabilities. The physical basis is resonant tunneling of light through an air gap between two half-ball lenses symmetrically coated by few-layer (Si/SiO2 or Ta2O5/SiO2) admittance matching stacks. Tuning is achieved by simultaneous adjustments of the incident angle and the air gap thickness. Individual filters with operational ranges spanning visible (∼400-700nm) and near-infrared (∼1000-1800nm) wavelengths were assembled using 10 mm diameter lenses. We show that these filters, configured as a stand-alone scanning spectrometer, can provide a resolving power ∼100 and f-number ∼2.5 for a fiber-compatible input aperture <15µm in diameter. We also demonstrate that, with supplementary optics, the tunable ball filter might be used to implement a compact hyperspectral imaging system.

Liquid infiltration of monolithic open-access Fabry-Perot microcavities.

We describe a monolithic approach to fabricating large-scale arrays of high-finesse and low-mode-volume Fabry-Perot microcavities with open access to the air core. A stress-driven buckling self-assembly technique was used to form half-symmetric curved-mirror cavities, and a dry etching process was subsequently used to create micropores through the upper mirror. We show that the cavities retain excellent optical properties, with reflectance-limited finesse ∼2500 and highly predictable Laguerre-Gaussian modes. We furthermore demonstrate the ability to introduce liquids into the cavity region by microinjection through the pores. Applications in sensing, optofluidics, and cavity quantum electrodynamics are envisioned.

Widely tunable bandpass filter based on resonant optical tunneling.

We describe a tunable bandpass filter and polarizer based on resonant tunneling through an air gap between two hemi-cylindrical prisms coated with 4-layer a-Si/SiO2 matching stacks. Tuning is achieved by simultaneous variations in the incident angle and the air gap thickness, enabling the pass-band center wavelength to be continuously adjusted over a very wide range (potentially ~1000 - 1800 nm) with an approximately fixed fractional bandwidth (Δλ/λ ~1%). An analytical derivation of the conditions required to produce a flat-top TE pass-band at a desired wavelength is given. The filter provides excellent out-of-band rejection and strong suppression of the orthogonal TM polarization over the entire tuning range. For applications involving collimated light, it could be a useful alternative to existing widely tunable filters based on gratings or liquid crystals.

Cooperativity enhancement in buckled-dome microcavities with omnidirectional claddings.

We describe a theoretical study of dipole emitters inside buckled-dome Fabry-Perot cavities with Si/SiO2-based omnidirectional Bragg mirrors. The low penetration depth of the mirrors contributes to low mode volumes, potentially enabling large enhancement of spontaneous emission into moderate-quality-factor cavity modes. Furthermore, the omnidirectional mirrors can significantly inhibit background emission. For a representative cavity operating in a fundamental spatial mode regime at λ ~1550 nm, and an optimally located emitter, we predict simultaneous enhancement of emission into the cavity mode by ~120 and suppression of background emission by ~25, implying the potential for a cooperativity C ~1500. This is combined with Q ~103, significantly lower than is required to attain similar values of C without background inhibition, and thus implying better compatibility for broad line-width emitters.

Visible-range hollow waveguides by guided buckling of Ta2O5/SiO2 multilayers.

Hollow waveguides operating near 550 nm wavelength were fabricated by guided formation of delamination buckles within Ta2O5/SiO2 multilayers. The fabrication process employed a pair of sequentially deposited 10-period Bragg mirrors separated by a patterned, low-adhesion fluorocarbon layer. Propagation loss as low as a few dB/cm was measured, consistent with theoretical predictions.

Air gap resonant tunneling bandpass filter and polarizer.

We describe a bandpass filter based on resonant tunneling through an air layer in the frustrated total internal reflection regime, and show that the concept of induced transmission can be applied to the design of thin film matching stacks. Experimental results are reported for Si/SiO2-based devices exhibiting a polarization-dependent passband, with bandwidth on the order of 10 nm in the 1550 nm wavelength range, peak transmittance on the order of 80%, and optical density greater than 5 over most of the near infrared region.

Bistability in buckled dome microcavities.

We describe optical bistability in monolithically integrated, curved-mirror Fabry-Perot microcavities. The cavities were fabricated by controlled formation of circular delamination buckles within sputtered Si/SiO(2) multilayers. The dominant source of the bistability is heating due to residual absorption in the mirror layers, which leads to out-of-plane deflection of the buckled mirror. Hysteresis occurs for submilliwatt input powers.

Wavelength interrogation of fiber Bragg grating sensors using tapered hollow Bragg waveguides.

We describe an integrated system for wavelength interrogation, which uses tapered hollow Bragg waveguides coupled to an image sensor. Spectral shifts are extracted from the wavelength dependence of the light radiated at mode cutoff. Wavelength shifts as small as ~10 pm were resolved by employing a simple peak detection algorithm. Si/SiO2-based cladding mirrors enable a potential operational range of several hundred nanometers in the 1550 nm wavelength region for a taper length of ~1 mm. Interrogation of a strain-tuned grating was accomplished using a broadband amplified spontaneous emission (ASE) source, and potential for single-chip interrogation of multiplexed sensor arrays is demonstrated.

Transparency and stability of Ag-based metal-dielectric multilayers.

We fabricated and tested periodic metal (Ag)-dielectric (SiO2 or TiO2) multilayers with transparency bands in the visible range. For samples with Ag-TiO2 interfaces, the optical properties exhibited relatively poor predictability, likely due to oxidation of the Ag layers. Ag/SiO2-based multilayers were found to be more predictable and stable, but the relatively low refractive index of SiO2 limits their inherent transparency and pass-band bandwidth. We show that termination of the multilayer with a single high-index layer reduces the admittance mismatch with the ambient media, and thus improves the properties of the transparency band.

Visible-band dispersion by a tapered air-core Bragg waveguide.

We describe out-coupling of visible band light from a tapered hollow waveguide with TiO(2)/SiO(2) Bragg cladding mirrors. The mirrors exhibit an omnidirectional band for TE-polarized modes in the ~490 to 570 nm wavelength range, resulting in near-vertical radiation at mode cutoff positions. Since cutoff is wavelength-dependent, white light is spatially dispersed by the taper. Resolution on the order of 2 nm is predicted and corroborated by experimental results. These tapers can potentially form the basis for compact micro-spectrometers in lab-on-a-chip and optofluidic micro-systems.

Conditions for admittance-matched tunneling through symmetric metal-dielectric stacks.

We used the theory of potential transmittance to derive a general expression for reflection-less tunneling through a periodic stack with a dielectric-metal-dielectric unit cell. For normal-incidence from air, the theory shows that only a specific (and typically impractically large) dielectric index can enable a perfect admittance match. For off-normal incidence of TE-polarized light, an admittance match is possible at a specific angle that depends on the index of the ambient and dielectric media and the thickness and index of the metal. For TM-polarized light, admittance matching is possible within the evanescent-wave range (i.e. for tunneling mediated by surface plasmons). The results provide insight for research on transparent metals and superlenses.

High-finesse cavities fabricated by buckling self-assembly of a-Si/SiO2 multilayers.

Arrays of half-symmetric Fabry-Perot micro-cavities were fabricated by controlled formation of circular delamination buckles within a-Si/SiO(2) multilayers. Cavity height scales approximately linearly with diameter, in reasonable agreement with predictions based on elastic buckling theory. The measured finesse (F > 10(3)) and quality factors (Q > 10(4) in the 1550 nm range) are close to reflectance limited predictions, indicating that the cavities have low roughness and few defects. Degenerate Hermite-Gaussian and Laguerre-Gaussian modes were observed, suggesting a high degree of cylindrical symmetry. Given their silicon-based fabrication, these cavities hold promise as building blocks for integrated optical sensing systems.

Hollow Bragg waveguides fabricated by controlled buckling of Si/SiO2 multilayers.

We describe integrated air-core waveguides with Bragg reflector claddings, fabricated by controlled delamination and buckling of sputtered Si/SiO2 multilayers. Thin film deposition parameters were tailored to produce a desired amount of compressive stress, and a patterned, embedded fluorocarbon layer was used to define regions of reduced adhesion. Self-assembled air channels formed either spontaneously or upon heating-induced decomposition of the patterned film. Preliminary optical experiments confirmed that light is confined to the air channels by a photonic band-gap guidance mechanism, with loss ~5 dB/cm in the 1550 nm wavelength region. The waveguides employ standard silicon processes and have potential applications in MEMS and lab-on-chip systems.

Thermal tuning of hollow waveguides fabricated by controlled thin-film buckling.

We describe the thermal tuning of air-core Bragg waveguides, fabricated by controlled formation of delamination buckles within a multilayer stack of chalcogenide glass and polymer. The upper cladding mirror is a flexible membrane comprising high thermal expansion materials, enabling large tuning of the air-core dimensions for small changes in temperature. Measurements on the temperature dependence of feature heights showed good agreement with theoretical predictions. We applied this mechanism to the thermal tuning of modal cutoff conditions in waveguides with a tapered core profile. Due to the omnidirectional nature of the cladding mirrors, these tapers can be viewed as waveguide-coupled, tunable Fabry-Perot filters.