1.
Opt Express
; 18(3): 2296-301, 2010 Feb 01.
Article
in English
| MEDLINE
| ID: mdl-20174058
ABSTRACT
Mesa-structuring of InGaAs/InAlAs photoconductive layers is performed employing a chemical assisted ion beam etching (CAIBE) process. Terahertz photoconductive antennas for 1.5 microm operation are fabricated and evaluated in a time domain spectrometer. Order-of-magnitude improvements versus planar antennas are demonstrated in terms of emitter power, dark current and receiver sensitivity.