Optimized design of block copolymers with covarying properties for nanolithography.

The ability to impart multiple covarying properties into a single material represents a grand challenge in manufacturing. In the design of block copolymers (BCPs) for directed self-assembly and nanolithography, materials often balance orthogonal properties to meet constraints related to processing, structure and defectivity. Although iterative synthesis strategies deliver BCPs with attractive properties, identifying materials with all the required attributes has been difficult. Here we report a high-throughput synthesis and characterization platform for the discovery and optimization of BCPs with A-block-(B-random-C) architectures for lithographic patterning in semiconductor manufacturing. Starting from a parent BCP and using thiol-epoxy 'click' chemistry, we synthesize a library of BCPs that cover a large and complex parameter space. This allows us to readily identify feature-size-dependent BCP chemistries for 8-20-nm-pitch patterns. These blocks have similar surface energies for directed self-assembly, and control over the segregation strength to optimize the structure (favoured at higher segregation strengths) and defectivity (favoured at lower segregation strengths).

Confinement and Processing Can Alter the Morphology and Periodicity of Bottlebrush Block Copolymers in Thin Films.

Bottlebrush block copolymers (BBCPs) are intriguing architectural variations on linear BCPs with highly tunable structure. Confinement can have a significant impact on polymer assembly, giving rise to changes in morphology, assembly kinetics, and properties like the glass transition. Given that confinement leads to significant changes in the persistence length of bottlebrush homopolymers, it is reasonable to expect that BBCPs will see significant changes in their structure and periodicity relative to the bulk morphology. Understanding how confinement influences assembly will be important for designing BBCPs for thin film applications including membranes, integrated photonic structures, and potentially BCP lithography. In order to study the effects of confinement on BBCP conformation and morphology, a blade coating was used to prepare films with continuous variation in film thickness. Unlike thin films of linear BCPs, islands/holes were not observed, and instead mixtures of parallel and perpendicular morphologies emerge after annealing. The lamellar periodicity (L0) of the morphologies is found to be thickness dependent, increasing L0 with decreasing film thickness for blade coated films. Films coated out of tetrahydrofuran (THF) resulted in a single well-defined lamellar periodicity, verified through atomic force microscopy (AFM) and grazing incidence small-angle X-ray scattering (GISAXS), which increases dramatically from the bulk value (30.6 nm) and continues to increase as the film thickness decreases. The largest observed L0 was 65.5 nm, and this closely approaches the estimated upper limit of 67 nm corresponding to a fully extended backbone in a bilayer arrangement. Films coated out of propylene glycol methyl ether acetate (PGMEA) resulted in a mixture of perpendicular lamellae and a smaller, likely cylindrical morphology. The lamellar portion of the film shows the same thickness dependence as the lamellae observed in the THF coated films. The scaling of the lamellar L0 with respect to film thickness follows predictions for confined semiflexible polymers with weak excluded volume interactions and can be related to models for confinement of DNA. Spin coated films shows the same reduction in periodicity, although at very different film thicknesses. This result suggests that the material has shallow free-energy barriers to transitioning between different L0 and morphologies, a property that could be taken advantage of for patterning diverse structures with a single material.

Intrinsic Ion Transport Properties of Block Copolymer Electrolytes.

Knowledge of intrinsic properties is of central importance for materials design and assessing suitability for specific applications. Self-assembling block copolymer electrolytes (BCEs) are of great interest for applications in solid-state energy storage devices. A fundamental understanding of ion transport properties, however, is hindered by the difficulty in deconvoluting extrinsic factors, such as defects, from intrinsic factors, such as the presence of interfaces between the domains. Here, we quantify the intrinsic ion transport properties of a model BCE system consisting of poly(styrene-block-ethylene oxide) (SEO) and lithium bis(trifluoromethanesulfonyl)imide (LiTFSI) salt using a generalizable strategy of depositing thin films on interdigitated electrodes and self-assembling fully connected parallel lamellar structures throughout the films. Comparison between conductivity in homopolymer poly(ethylene oxide) (PEO)-LiTFSI electrolytes and the analogous conducting material in SEO over a range of salt concentrations (r, molar ratio of lithium ion to ethylene oxide repeat units) and temperatures reveals that between 20% and 50% of the PEO in SEO is inactive. Using mean-field theory calculations of the domain structure and monomer concentration profiles at domain interfaces-both of which vary substantially with salt concentration-the fraction of inactive PEO in the SEO, as derived from conductivity measurements, can be quantitatively reconciled with the fraction of PEO that is mixed with greater than a few volume percent of polystyrene. Despite the detrimental interfacial effects for ion transport in BCEs, the intrinsic conductivity of the SEO studied here (ca. 10-3 S/cm at 90 °C, r = 0.085) is an order of magnitude higher than reported values from bulk samples of similar molecular weight SEO (ca. 10-4 S/cm at 90 °C, r = 0.085). Overall, this work provides motivation and methods for pursuing improved BCE chemical design, interfacial engineering, and processing.

Direct Imaging of Interfacial Fluctuations in Confined Block Copolymer with in Situ Slow-Scan-Disabled Atomic Force Microscopy.

Using environmentally controlled, high-speed atomic force microscopy (AFM), we examine dynamic fluctuations of topographically confined poly(styrene-block-methyl methacrylate) (PS-b-PMMA) cylinders. During thermal annealing, fluctuations drive perturbations of the block copolymer (BCP) interface between polymer domains, leading to pattern roughness. Whereas previous investigations have examined roughness in room-temperature and kinetically quenched samples, we directly visualize the dynamics of PS/PMMA interfaces in real space and time at in situ temperatures above the glass transition temperature, Tg. Imaging under these experimentally challenging thermal annealing conditions is critical to understanding the inherent connection between thermal fluctuations and BCP pattern assembly. Through the use of slow-scan-disabled AFM, we dramatically improve the imaging time resolution for tracking polymer dynamics. Fluctuations increase in intensity with temperature and, at high temperatures, become spatially coherent across their confining potential. Additionally, we observe that topographic confinement suppresses fluctuations and correlations in the proximity of the guiding field. In situ imaging at annealing temperatures represents a significant step in capturing the dynamics of chain mobility at BCP interfaces.

Combining double patterning with self-assembled block copolymer lamellae to fabricate 10.5 nm full-pitch line/space patterns.

Directed self-assembly of block copolymers and self-aligned double patterning are two commonly used pitch scaling techniques to increase the density of lithographic features. In this work, both of these pitch scaling techniques were combined, enabling patterning at even higher densities. In this process, directed self-assembly of a high-χ block copolymer was used to form a line/space pattern, which served as a template for mandrels. Via these mandrels, atomic layer deposition was used to deposit a thin aluminium oxide spacer. By this method, a total pitch scaling factor of 8, equivalent to a 10.5 nm full pitch, was reached. The types of defects and the line roughness at the different steps of the process were discussed.

Role of Defects in Ion Transport in Block Copolymer Electrolytes.

Ion conducting block copolymers can overcome traditional limitations of homopolymer electrolytes by phase separating into nanoarchitectures that can be simultaneously optimized for two or more orthogonal material properties such as high ionic conductivity and mechanical stability. A key challenge in understanding the ion transport properties of these materials is the difficulty of extracting structure-function relationships without having complete knowledge of all nanoscale transport pathways in bulk samples. Here we demonstrate a method for deriving structure-transport relationships for ion conducting block copolymers using thin films and interdigitated electrodes. Well-defined and directly imaged structure in films of poly(styrene)-block-poly(2-vinylpyridine) is controlled using techniques of directed self-assembly then the poly(2-vinylpyridine) is selectively converted into an ion conductor. The ion conductivity is found to be directly proportional to the total number of connected paths between electrodes and the path length. A single defect such as a dislocation anywhere in the path of an ion conducting route disconnects and precludes that pathway from contributing to the conductivity and results in an increase in the dielectric parameter of the film. When all the ion conduction pathways are blocked between electrodes, the conductivity is negligible, 4 orders of magnitude lower compared to a completely connected morphology and the dielectric parameter increases by a factor of 50. These results have profound implications for the interpretation, design, and processing of block copolymer electrolytes for applications as ion conducting membranes.

Engineering the anchoring behavior of nematic liquid crystals on a solid surface by varying the density of liquid crystalline polymer brushes.

Controlling the orientation of liquid crystal (LC) molecules towards contacting surfaces is a crucial requirement for the development of LC displays and passive electro-optical devices. Up to now, research has been focused on photo-responses of a LC azobenzene polymer system to obtain either planar or homeotropic orientation of LCs. It remains a challenge, however, to tune the polar angle of LC molecules on the solid surface and gain more insights about the polymer chain conformation extending in LC medium. Here, we deposit a liquid crystalline side chain polymer brush, poly(6-(4-methoxy-azobenzene-4'-oxy)hexyl methacrylate) (PMMAZO), onto the solid surface with film thickness varying between ∼3 nm and 13 nm; therefore, the grafting density of the brush layer ranges from 0.0219 to 0.0924 chains per nm2. When LCs are confined in hybrid cells with a top surface eliciting uniform homeotropic anchoring and a bottom surface covered by the PMMAZO brush, the out-of-plane polar angle of 4-pentyl-4'-cyanobiphenyl (5CB) on the brush layer gradually changes from ∼0° to ∼62° by simply increasing the grafting brush density. The surface forces apparatus (SFA) measurement is used to determine 5CB as a good solvent for the PMMAZO brush and understand the relationship between the chain conformation in 5CB and the anchoring behavior of LC molecules on the polymer brush layer. For high grafting density, the polymer chain in 5CB extends significantly away from the substrate, making the side chain mesogens on average almost parallel to the substrate; for the low-density case, the main chain extends in the narrow region around the surface for aligning the mesogens perpendicular to the substrate.

Engineering the Kinetics of Directed Self-Assembly of Block Copolymers toward Fast and Defect-Free Assembly.

Directed self-assembly (DSA) of block copolymers (BCPs) can achieve perfectly aligned structures at thermodynamic equilibrium, but the self-assembling morphology can become kinetically trapped in defective states. Understanding and optimizing the kinetic pathway toward domain alignment is crucial for enhancing process throughput and lowering defectivity to levels required for semiconductor manufacturing, but there is a dearth of experimental, three-dimensional studies of the kinetic pathways in DSA. Here, we combined arrested annealing and TEM tomography to probe the kinetics and structural evolution in the chemoepitaxy DSA of PS- b-PMMA with density multiplication. During the initial stages of annealing, BCP domains developed independently at first, with aligned structures at the template interface and randomly oriented domains at the top surface. As the grains coarsened, the assembly became cooperative throughout the film thickness, and a metastable stitch morphology was formed, representing a kinetic barrier. The stitch morphology had a three-dimensional structure consisting of both perpendicular and parallel lamellae. On the basis of the mechanistic information, we studied the effect of key design parameters on the kinetics and evolution of structures in DSA. Three types of structural evolutions were observed at different film thicknesses: (1) immediate alignment and fast assembly when thickness < L0 ( L0 = BCP natural periodicity); (2) formation of stitch morphology for 1.25-1.45 L0; (3) fingerprint formation when thickness >1.64 L0. We found that the DSA kinetics can be significantly improved by avoiding the formation of the metastable stitch morphology. Increasing template topography also enhanced the kinetics by increasing the PMMA guiding surface area. A combination of 0.75 L0 BCP thickness and 0.50 L0 template topography achieved perfect alignment over 100 times faster than the baseline process. This research demonstrates that an improved understanding of the evolution of structures during DSA can significantly improve the DSA process.

Ultrathin and Conformal Initiated Chemical-Vapor-Deposited Layers of Systematically Varied Surface Energy for Controlling the Directed Self-Assembly of Block CoPolymers.

Directed self-assembly (DSA) of block copolymer (BCP) thin films is a promising approach to enable next-generation patterning at increasingly smaller length scales. DSA utilizes interfacial wetting layers to force the BCP domains to self-assemble with the desired orientation with respect to the substrate. Here, we demonstrate that initiated chemical-vapor-deposited (iCVD) polydivinylbenzene (pDVB) ultrathin films can direct the self-assembly of poly(styrene- block-methylmethacrylate). We found that the methyl radicals formed at increased filament temperatures during the iCVD process result in the backbone methylation of pDVB. By tuning the degree of backbone methylation, we systematically changed the wetting properties of the iCVD pDVB from a slight poly(methylmethacrylate) preference to complete poly(styrene) preference. Additionally, we utilize the conformal nature of the iCVD to form a wetting layer over a topographical line and space pattern, which is subsequently used to produce self-assembled BCP films with both perpendicular orientation and long-range alignment.