ABSTRACT
A new and potentially cost efficient kind of vibration-tolerant surface measurement interferometer based on the Fizeau-principle is demonstrated. The crucial novelty of this approach is the combination of two optoelectronic sensors: an image sensor with high spatial resolution and an arrangement of photodiodes with high temporal resolution. The photodiodes continuously measure the random-phase-shifts caused by environmental vibrations in three noncollinear points of the test surface. The high spatial resolution sensor takes several "frozen" images of the test surface by using short exposure times. Under the assumption of rigid body movement the continuously measured phase shifts of the three surface points enable the calculation of a virtual plane that is representative for the position and orientation of the whole test surface. For this purpose a new random-phase-shift algorithm had to be developed. The whole system was tested on an optical table without vibration isolation under the influence of random vibrations. The analysis of the root-mean-square (RMS) over ten different measurements shows a measurement repeatability of about 0.004 wave (approximately 2.5 nm for 632.8 nm laser wavelength).
