ABSTRACT
A novel design of a MEMS (Micro-Electromechanical System) capacitive accelerometer fabricated by surface micromachining, with a structure enabling precise auto-calibration during operation, is presented. Precise auto-calibration was introduced to ensure more accurate acceleration measurements compared to standard designs. The standard mechanical structure of the accelerometer (seismic mass integrated with elastic suspension and movable plates coupled with fixed plates forming a system of differential sensing capacitors) was equipped with three movable detection electrodes coupled with three fixed electrodes, thus creating three atypical tunneling displacement transducers detecting three specific positions of seismic mass with high precision, enabling the auto-calibration of the accelerometer while it was being operated. Auto-calibration is carried out by recording the accelerometer indication while the seismic mass occupies a specific position, which corresponds to a known value of acting acceleration determined in a pre-calibration process. The diagram and the design of the mechanical structure of the accelerometer, the block diagram of the electronic circuits, and the mathematical relationships used for auto-calibration are presented. The results of the simulation studies related to mechanical and electric phenomena are discussed.
ABSTRACT
A review of various kinds of solid tilts sensors, using a free mechanical member for generation of electric-contact (mostly a ball), is presented. Standard and original solutions are discussed. The latest patents are described. A classification of the existing solutions with respect to their sensing principle is proposed. Possible types of the electric/electronic circuits are discussed. Advantages of these sensors are emphasized: mainly optional operation without power supply, resistance to electrostatic discharges, and simplicity of signal processing. Technological details are briefly introduced, along with miniaturization prospects. Additionally, liquid tilt sensors are succinctly characterized. The most typical tilt sensing techniques are concisely compared.
