Industrial Fault Detection Employing Meta Ensemble Model Based on Contact Sensor Ultrasonic Signal.

Ultrasonic diagnostics is the earliest way to predict industrial faults. Usually, a contact microphone is employed for detection, but the recording will be contaminated with noise. In this paper, a dataset that contains 10 main faults of pipelines and motors is analyzed from which 30 different features in the time and frequency domains are extracted. Afterward, for dimensionality reduction, principal component analysis (PCA), linear discriminant analysis (LDA), and t-distributed stochastic neighbor embedding (t-SNE) are performed. In the subsequent phase, recursive feature elimination (RFE) is employed as a strategic method to analyze and select the most relevant features for the classifiers. Next, predictive models consisting of k-Nearest Neighbor (KNN), Logistic Regression (LR), Decision Tree (DT), Gaussian Naive Bayes (GNB), and Support Vector Machine (SVM) are employed. Then, in order to solve the classification problem, a stacking classifier based on a meta-classifier which combines multiple classification models is introduced. Furthermore, the k-fold cross-validation technique is employed to assess the effectiveness of the model in handling new data for the evaluation of experimental results in ultrasonic fault detection. With the proposed method, the accuracy is around 5% higher over five cross folds with the least amount of variation. The timing evaluation of the meta model on the 64 MHz Cortex M4 microcontroller unit (MCU) revealed an execution time of 11 ms, indicating it could be a promising solution for real-time monitoring.

Design of an Integrated Micro-Viscometer for Monitoring Engine Oil.

This paper proposes a novel integrated micro-viscometer for engine-oil monitoring. The final solution consists of a capacitive micromachined ultrasonic transducer (CMUT) and an application-specific integrated circuit (ASIC). The CMUT is used to generate and capture acoustic waves while immersed in engine oil. The low power transceiver ASIC is interfaced with the CMUT structure for actuation and reception. An integrated charge pump boosts the supply voltage from 3.3 to 22 V to generate the DC polarization voltage of the CMUT. The receiver has a power consumption of 72 µW with an input-referred noise current of 3.2pAHz and a bandwidth of 7 MHz. The CMUT array occupies an area of 3.5 × 1 mm, whereas the ASIC has a chip area of 1 × 1 mm. The system was tested using engine oils of different types and ages at different temperatures. Measurement results show a significant frequency shift due to the dynamic viscosity change that occurs as oil ages. A shift of -1.9 kHz/cP was measured, which corresponds to a shift of 33 Hz/mile. This work paves the way for high accuracy-integrated solutions for oil condition monitoring and is expected to play a significant role in a more economic and environmentally friendly usage of oil.

Towards the World's Smallest Gravimetric Particulate Matter Sensor: A Miniaturized Virtual Impactor with a Folded Design.

The increasing air pollution across the globe has given rise to a global health crisis that is increasing at an alarming rate. Every year, millions of people lose their lives due to health risks caused by air pollutants. Hence, there is a pressing need for better solutions to accurately measure the amount of air pollution. This work is aimed at designing a highly compact, accurate, low-cost, self-resettable, and easy-to-use gravimetric-based particulate matter sensor solution for portable applications. Previous attempts have failed to realize true miniaturization, due to the size constraints of the virtual impactor needed-a mechanism that segregates the particulate matters based on their sizes. Our complete particulate matter sensor solution consists of three components (i) a piezoelectric resonating membrane, (ii) a virtual impactor, and (iii) a thermophoretic mechanism to reset the sensor. This paper presents a novel design of the virtual impactor, based on a folded configuration. This helps realize the entire system in a volume of 20 mm × 20 mm × 10 mm. We report here the design, working principles, fabrication, and experimental results of the virtual impactor.

A Sub-mW 18-MHz MEMS Oscillator Based on a 98-dBΩ Adjustable Bandwidth Transimpedance Amplifier and a Lamé-Mode Resonator.

This paper presents a microelectromechanical system (MEMS)-based oscillator based on a Lamé-mode capacitive micromachined resonator and a fully differential high-gain transimpedance amplifier (TIA). The proposed TIA is designed using TSMC 65 nm CMOS technology and consumes only 0.9 mA from a 1-V supply. The measured mid-band transimpedance gain is 98 dB Ω and the TIA features an adjustable bandwidth with a maximum bandwidth of 142 MHz for a parasitic capacitance C P of 4 pF. The measured input-referred current noise of the TIA at mid-band is below 15 pA/ Hz . The TIA is connected to a Lamé-mode resonator, and the oscillator performance in terms of phase noise and frequency stability is presented. The measured phase noise under vacuum is -120 dBc/Hz at a 1-kHz offset, while the phase noise floor reaches -127 dBc/Hz. The measured short-term stability of the MEMS-based oscillator is ±0.25 ppm.

870 000 Q -Factor Capacitive Lamé Mode Resonator With Gap Closing Electrodes Enabling 4.4 k Ω Equivalent Resistance at 50 V.

This work presents a Lamé mode resonator featuring a novel gap closing mechanism, which employs electrostatic force to reduce the capacitive transduction gaps to submicrometer values in order to overcome fabrication technology critical spacing limitations. This leads to significant resonator loss and motional resistance reduction while maintaining high Q -factor even in air. Prototypes were fabricated in two commercial silicon-on-insulator processes. Upon the application of a dc voltage of 55 V between the resonator structure and the electrodes, the gaps sizes are reduced to as low as 200 nm. A resonance frequency of 18 MHz with Q -factors as high as 866 000 was observed under 1 mtorr vacuum and as high as 32 000 at atmospheric pressure. A loss of 33 dB was measured at 55 V, which corresponds to an equivalent resistance of 4.4 [Formula: see text], more than 60 times lower than that of a similar design without a gap closing mechanism at the same voltage. This significantly reduces the complexity of the oscillation sustaining circuitry. The frequency tuning range is also increased significantly as a result of the gap reduction, which can be useful for overcoming ambient conditions and fabrication variations.

Hard-Baked Photoresist as a Sacrificial Layer for Sub-180 °C Surface Micromachining Processes.

This letter proposes a method for utilizing a positive photoresist, Shipley 1805, as a sacrificial layer for sub-180 °C fabrication process flows. In the proposed process, the sacrificial layer is etched at the end to release the structures using a relatively fast wet-etching technique employing resist remover and a critical point dryer (CPD). This technique allows high etching selectivity over a large number of materials, including silicon-based structural materials such as silicon-carbide, metals such as titanium and aluminum, and cured polymers. This selectivity, as well as the low processing thermal budget, introduces more flexibility in material selection for monolithic integration above complementary metal oxide semiconductor (CMOS) as well as flexible substrates.

Effects of Proof Mass Geometry on Piezoelectric Vibration Energy Harvesters.

Piezoelectric energy harvesters have proven to have the potential to be a power source in a wide range of applications. As the harvester dimensions scale down, the resonance frequencies of these devices increase drastically. Proof masses are essential in micro-scale devices in order to decrease the resonance frequency and increase the strain along the beam to increase the output power. In this work, the effects of proof mass geometry on piezoelectric energy harvesters are studied. Different geometrical dimension ratios have significant impact on the resonance frequency, e.g., beam to mass lengths, and beam to mass widths. A piezoelectric energy harvester has been fabricated and tested operating at a frequency of about 4 kHz within the audible range. The responses of various prototypes were studied, and an optimized T-shaped piezoelectric vibration energy harvester design is presented for improved performance.

Rotating Circular Micro-Platform with Integrated Waveguides and Latching Arm for Reconfigurable Integrated Optics.

This work presents a laterally rotating micromachined platform integrated under optical waveguides to control the in-plane propagation direction of light within a die to select one of multiple outputs. The platform is designed to exhibit low constant optical losses throughout the motion range and is actuated electrostatically using an optimized circular comb drive. An angular motion of ±9.5° using 180 V is demonstrated. To minimize the optical losses between the moving and fixed parts, a gap-closing mechanism is implemented to reduce the initial air gap to submicron values. A latch structure is implemented to hold the platform in place with a resolution of 0.25° over the entire motion range. The platform was integrated with silicon nitride waveguides to create a crossbar switch and preliminary optical measurements are reported. In the bar state, the loss was measured to be 14.8 dB with the gap closed whereas in the cross state it was 12.2 dB. To the authors' knowledge, this is the first optical switch based on a rotating microelectromechanical device with integrated silicon nitride waveguides reported to date.