Multi-Transduction-Mechanism Technology, an Emerging Approach to Enhance Sensor Performance.

Conventional sensor systems employ single-transduction technology where they respond to an input stimulus and transduce the measured parameter into a readable output signal. As such, the technology can only provide limited corresponding data of the detected parameters due to relying on a single transformed output signal for information acquisition. This limitation commonly results in the need for utilizing sensor array technology to detect targeted parameters in complex environments. Multi-transduction-mechanism technology, on the other hand, may combine more than one transduction mechanism into a single structure. By employing this technology, sensors can be designed to simultaneously distinguish between different input signals from complex environments for greater degrees of freedom. This allows a multi-parameter response, which results in an increased range of detection and improved signal-to-noise ratio. In addition, utilizing a multi-transduction-mechanism approach can achieve miniaturization by reducing the number of required sensors in an array, providing further miniaturization and enhanced performance. This paper introduces the concept of multi-transduction-mechanism technology by exploring different candidate combinations of fundamental transduction mechanisms such as piezoresistive, piezoelectric, triboelectric, capacitive, and inductive mechanisms.

Strategies for the Voltammetric Detection of Loop-Mediated Isothermal Amplification.

Loop-mediated isothermal amplification (LAMP) is rapidly developing into an important tool for the point-of-use detection of pathogens for both clinical and environmental samples, largely due to its sensitivity, rapidity, and adaptability to portable devices. Many methods are used to monitor LAMP, but not all are amenable to point-of-use applications. Common methods such as fluorescence often require bulky equipment, whereas colorimetric and turbidimetric methods can lack sensitivity. Electrochemical biosensors are becoming increasingly important for these applications due to their potential for low cost, high sensitivity, and capacity for miniaturization into integrated devices. This review provides an overview of the use of voltammetric sensors for monitoring LAMP, with a specific focus on how electroactive species are used to interface between the biochemical products of the LAMP reaction and the voltammetric sensor. Various strategies for the voltammetric detection of DNA amplicons as well as pyrophosphate and protons released during LAMP are presented, ranging from direct DNA binding by electroactive species to the creative use of pyrophosphate-detecting aptamers and pH-sensitive oligonucleotide structures. Hurdles for adapting these devices to point-of-use applications are also discussed.

Piezoelectric Micromachined Ultrasonic Transducers (PMUTs): Performance Metrics, Advancements, and Applications.

With the development of technology, systems gravitate towards increasing in their complexity, miniaturization, and level of automation. Amongst these systems, ultrasonic devices have adhered to this trend of advancement. Ultrasonic systems require transducers to generate and sense ultrasonic signals. These transducers heavily impact the system's performance. Advancements in microelectromechanical systems have led to the development of micromachined ultrasonic transducers (MUTs), which are utilized in miniaturized ultrasound systems. Piezoelectric micromachined ultrasonic transducers (PMUTs) exhibit higher capacitance and lower electrical impedance, which enhances the transducer's sensitivity by minimizing the effect of parasitic capacitance and facilitating their integration with low-voltage electronics. PMUTs utilize high-yield batch microfabrication with the use of thin piezoelectric films. The deposition of thin piezoelectric material compatible with complementary metal-oxide semiconductors (CMOS) has opened novel avenues for the development of miniaturized compact systems with the same substrate for application and control electronics. PMUTs offer a wide variety of applications, including medical imaging, fingerprint sensing, range-finding, energy harvesting, and intrabody and underwater communication links. This paper reviews the current research and recent advancements on PMUTs and their applications. This paper investigates in detail the important transduction metrics and critical design parameters for high-performance PMUTs. Piezoelectric materials and microfabrication processes utilized to manufacture PMUTs are discussed. Promising PMUT applications and outlook on future advancements are presented.

A Review on Advanced Sensing Materials for Agricultural Gas Sensors.

This work is a comprehensive review of sensing materials, which interact with several target gases pertinent to agricultural monitoring applications. Sensing materials which interact with carbon dioxide, water vapor (relative humidity), hydrogen sulfide, ethylene and ethanol are the focus of this work. Performance characteristics such as dynamic range, recovery time, operating temperature, long-term stability and method of deposition are discussed to determine the commercial viability of the sensing materials considered in this work. In addition to the sensing materials, deposition methods are considered to obtain the desired sensing material thickness based on the sensor's mechanism of operation. Various material classes including metal oxides, conductive polymers and carbon allotropes are included in this review. By implementing multiple sensing materials to detect a single target analyte, the issue of selectivity due to cross sensitivity can be mitigated. For this reason, where possible, it is desirable to utilize more than one sensing material to monitor a single target gas. Among those considered in this work, it is observed that PEDOT PSS/graphene and TiO2-coated g-C3N4 NS are best suited for CO2 detection, given their wide dynamic range and modest operating temperature. To monitor the presence of ethylene, BMIM-NTf2, SWCNTs and PtTiO2 offer a dynamic range most suitable for the application and require no active heating. Due to the wide dynamic range offered by SiO2/Si nanowires, this material is best suited for the detection of ethanol; a gas artificially introduced to prolong the shelf life of the harvested crop. Finally, among all other sensing materials investigated, it observed that both SWCNTs and CNTs/SnO2/CuO are most suitable for H2S detection in the given application.

Capacitive Based Micromachined Resonators for Low Level Mass Detection.

Advancements in microfabrication technologies and novel materials have led to new innovations in miniaturized gas sensors that can identify miniscule changes in a complex environment. Micromachined resonators with the capability to offer high sensitivity and selectivity in array integration make mass loading a potential mechanism for electronic nose applications. This paper investigates the mass sensing characteristics of progressive capacitive based micromachined resonators as potential candidates for volatile organic compound detection where also there is a need for miniaturized array configuration. In this paper, a detailed investigative review of the major three geometric designs of capacitive based micromachined resonators, namely, the microcantilever, the microbridge and the clamped membrane sensors is performed. Although many reviews are present in literature regarding mass sensors, however there is a gap in the literature regarding the common capacitive based micromachined mass sensors. This research gives a review on the foundation for capacitive based micromachined mass sensors while highlighting the potential capabilities of each geometric design to be developed further. Moreover, this paper also introduces the advancements based on the geometric designs of the capacitive based micromachined mass sensors. An in-depth analysis is done for each geometric design, to identify the critical design parameters, which affect the sensors' performances. Furthermore, the theoretically achievable mass sensitivity for each capacitive based micromachined mass sensor is modeled and analyzed using finite element analysis with mass variation in the picogram range. Finally, a critical analysis is done on the sensor sensitivities and further discussed in detail wherein each design is compared to each other and its current advances. Additionally, an insight to the advantages and disadvantages associated with each simulated geometry and its different advances are given. The results of the investigative review and analysis indicate that the sensitivities of the capacitive based micromachined sensors are dependent not only on the material composition of the devices but also on the varying degrees of clamping between the sensor geometries. In essence, the paper provides future research the groundwork to choose proper candidate geometry for a capacitive based micromachined mass sensor, with its several advantages over other mass sensors, based on the needed application.

A Method to Enhance Stroke Level of a MEMS Micromirror with Repulsive Electrostatic Force.

This paper presents a method to enhance the stroke level of a MEMS micromirror that, unlike conventional micromirrors, is actuated using a repulsive electrostatic force. The designed and proposed micromirror is held by L-shaped arms suspended over a set of bottom electrodes. In this configuration, three bottom electrodes are centered below each arm and are separated with a designed gap from each other to optimize the generated repulsive force. Using this approach, the micromirror surface is forced to deflect upward compared with the conventional downward deflection. The designed micromirror is proposed to utilize the PolyMUMPs fabrication technique from MEMSCAP Inc. In this work and in an unconventional approach, an air cavity of 2.75 µm can be achieved by combining the two available oxide layers through an additional removal of a polysilicon structural layer. It is shown that this design can significantly enhance the stroke level of the proposed micromirror to 5 µm at 150 V DC.

Advanced Micro- and Nano-Gas Sensor Technology: A Review.

Micro- and nano-sensors lie at the heart of critical innovation in fields ranging from medical to environmental sciences. In recent years, there has been a significant improvement in sensor design along with the advances in micro- and nano-fabrication technology and the use of newly designed materials, leading to the development of high-performance gas sensors. Advanced micro- and nano-fabrication technology enables miniaturization of these sensors into micro-sized gas sensor arrays while maintaining the sensing performance. These capabilities facilitate the development of miniaturized integrated gas sensor arrays that enhance both sensor sensitivity and selectivity towards various analytes. In the past, several micro- and nano-gas sensors have been proposed and investigated where each type of sensor exhibits various advantages and limitations in sensing resolution, operating power, response, and recovery time. This paper presents an overview of the recent progress made in a wide range of gas-sensing technology. The sensing functionalizing materials, the advanced micro-machining fabrication methods, as well as their constraints on the sensor design, are discussed. The sensors' working mechanisms and their structures and configurations are reviewed. Finally, the future development outlook and the potential applications made feasible by each category of the sensors are discussed.

An Air-Coupled Multiple Moving Membrane Micromachined Ultrasonic Transducer With Inverse Biasing Functionality.

A novel air-coupled multiple moving membrane-capacitive micromachined ultrasonic transducer ( [Formula: see text]-CMUT) with individually biased deflectable plates has been developed. Unlike the conventional capacitive micromachined ultrasonic transducer, this device cell structure includes an additional deflectable plate that is suspended underneath the transducer top plate. This added flexible plate contributes to the device signal transmission and reception. It is demonstrated that due to the presence of this added moving plate, the transducer is capable of operating under inverse bias condition, where the driving voltage is sandwiched between two grounded electrodes. COMSOL electromechanical simulations were conducted to investigate the influence of the transducer additional moving plate. A set of three individuals and an array of [Formula: see text]-CMUT transducers were fabricated using a sacrificial technique and with resonant frequencies ranging from 0.8 to 2.1 MHz. Electrical, optical, and pitch-catch acoustic measurements were performed to characterize the transducers properties under inverse bias condition. The experimental results are shown to be in good agreement with the simulation results for all of the fabricated transducers. It is shown that these transducers are fully functional under both normal and inverse bias conditions without any degradation in the transducer performance.