ABSTRACT
We present a high speed optical profiler (HSOP) using frequency-scanning lasers for three-dimensional profile measurements of microscopic structures. To improve upon previous techniques for implementing the HSOP, we developed frequency-scanning lasers and a compact microscopic interferometer. The controller of the HSOP was also modified to generate proper phase-shifting steps. For measurements of step height specimens, the HSOP showed results comparable with a commercial optical profiler, even with much higher measurement speeds (up to 30 Hz). The typical repeatability of step height measurement was less than 1 nm. We also present measurements of microscopic structures to verify the HSOP's ability to perform high speed inline inspection for the semiconductor and flat-panel display industries.
