Nanometer resolution optical coherence tomography using broad bandwidth XUV and soft x-ray radiation.

Optical coherence tomography (OCT) is a non-invasive technique for cross-sectional imaging. It is particularly advantageous for applications where conventional microscopy is not able to image deeper layers of samples in a reasonable time, e.g. in fast moving, deeper lying structures. However, at infrared and optical wavelengths, which are commonly used, the axial resolution of OCT is limited to about 1 µm, even if the bandwidth of the light covers a wide spectral range. Here, we present extreme ultraviolet coherence tomography (XCT) and thus introduce a new technique for non-invasive cross-sectional imaging of nanometer structures. XCT exploits the nanometerscale coherence lengths corresponding to the spectral transmission windows of, e.g., silicon samples. The axial resolution of coherence tomography is thus improved from micrometers to a few nanometers. Tomographic imaging with an axial resolution better than 18 nm is demonstrated for layer-type nanostructures buried in a silicon substrate. Using wavelengths in the water transmission window, nanometer-scale layers of platinum are retrieved with a resolution better than 8 nm. XCT as a nondestructive method for sub-surface tomographic imaging holds promise for several applications in semiconductor metrology and imaging in the water window.

Direct inversion of digital 3D Fraunhofer holography maps.

Differential Fourier holography (DFH) gives an exact mathematical solution of the inverse problem of diffraction in the Fraunhofer regime. After the first publication [Opt. Express15, 9954 (2007)], DFH was successfully applied in many experiments to obtain amplitude and phase information about two-dimensional images. In this paper, we demonstrate numerically the possibility to apply DFH also for investigation of unknown three-dimensional objects. The first simulation is made for a double-spiral structure plus a line as a reference object.

Influence of higher harmonics of the undulator in X-ray polarimetry and crystal monochromator design.

The spectrum of the undulator radiation of beamline P01 at Petra III has been measured after passing a multiple reflection channel-cut polarimeter. Odd and even harmonics up to the 15th order, as well as Compton peaks which were produced by the high harmonics in the spectrum, could been measured. These additional contributions can have a tremendous influence on the performance of the polarimeter and have to be taken into account for further polarimeter designs.

Bent crystal spectrometer for both frequency and wavenumber resolved x-ray scattering at a seeded free-electron laser.

We present a cylindrically curved GaAs x-ray spectrometer with energy resolution ΔE/E = 1.1 × 10(-4) and wave-number resolution of Δk/k = 3 × 10(-3), allowing plasmon scattering at the resolution limits of the Linac Coherent Light Source (LCLS) x-ray free-electron laser. It spans scattering wavenumbers of 3.6 to 5.2/Å in 100 separate bins, with only 0.34% wavenumber blurring. The dispersion of 0.418 eV/13.5 µm agrees with predictions within 1.3%. The reflection homogeneity over the entire wavenumber range was measured and used to normalize the amplitude of scattering spectra. The proposed spectrometer is superior to a mosaic highly annealed pyrolytic graphite spectrometer when the energy resolution needs to be comparable to the LCLS seeded bandwidth of 1 eV and a significant range of wavenumbers must be covered in one exposure.

An extreme ultraviolet Michelson interferometer for experiments at free-electron lasers.

We present a Michelson interferometer for 13.5 nm soft x-ray radiation. It is characterized in a proof-of-principle experiment using synchrotron radiation, where the temporal coherence is measured to be 13 fs. The curvature of the thin-film beam splitter membrane is derived from the observed fringe pattern. The applicability of this Michelson interferometer at intense free-electron lasers is investigated, particularly with respect to radiation damage. This study highlights the potential role of such Michelson interferometers in solid density plasma investigations using, for instance, extreme soft x-ray free-electron lasers. A setup using the Michelson interferometer for pseudo-Nomarski-interferometry is proposed.

Microfocus Cu K(alpha) source for femtosecond x-ray science.

We demonstrate a subpicosecond 1 kHz femtosecond x-ray source with a well-accessible quasi-point size (10 microm diameter) providing Cu K(alpha) emission with a maximum flux of 6.8 x 10(10) photons/s for continuous operation of 10 h. A new geometry that essentially facilitates the adjustment and diminishes the temporal jitter between the x-ray probe and the laser pump pulse is implemented for time-resolved diffraction experiments.

Population kinetics on K alpha lines of partially ionized Cl atoms.

A population kinetics code was developed to analyze K alpha emission from partially ionized chlorine atoms in hydrocarbon plasmas. Atomic processes are solved under collisional-radiative equilibrium for two-temperature plasmas. It is shown that the fast electrons dominantly contribute to ionize the K-shell bound electrons (i.e., inner-shell ionization) and the cold electrons to the outer-shell bound ones. Ratios of K alpha lines of partially ionized atoms are presented as a function of cold-electron temperature. The model was validated by observation of the K alpha lines from a chlorinated plastic target irradiated with 1 TW Ti:sapphire laser pulses at 1.5 x 10(17) W/cm(2), inferring a plasma temperature of about 100 eV on the target surface.