ABSTRACT
Optical trap assisted nanopatterning is a laser direct-write technique that uses an optically trapped microsphere as a near-field objective. The type of feature that one can create with this technique depends on several factors, one of which is the shape of the microbead. In this paper, we examine how the geometry of the bead affects the focus of the light through a combination of experiments and simulations. We realize nanopatterning using non-spherical dielectric particles to shape the light-material interaction. We model the resulting nanoscale features with a finite difference time domain simulation and obtain very good agreement with the experiments. This work opens the way to systematic engineering of the microparticle geometry in order to tailor the near-field focus to specific nanopatterning applications.
ABSTRACT
There exist many optical lithography techniques for generating nanostructures on hard, flat surfaces over large areas. However, few techniques are able to create such patterns on soft materials or surfaces with pre-existing structure. To address this need, we demonstrate the use of parallel optical trap assisted nanopatterning (OTAN) to provide an efficient and robust direct-write method of producing nanoscale features without the need for focal plane adjustment. Parallel patterning on model surfaces of polyimide with vertical steps greater than 1.5 µm shows a feature size uncertainty better than 4% across the step and lateral positional accuracy of 25 nm. A Brownian motion model is used to describe the positional accuracy enabling one to predict how variation in system parameters will affect the nanopatterning results. These combined results suggest that OTAN is a viable technique for massively parallel direct-write nanolithography on non-traditional surfaces.
