Determination of volatile organic compounds in workplace air by multisorbent adsorption/thermal desorption-GC/MS.

Investigation of volatile organic compounds (VOCs) was first conducted in the air of class-100 cleanrooms at liquid crystal display (LCD) fabrication facilities. Air samples were collected on multisorbent tubes (including Carbopack B, Carbopack C, and Carbosieve S-III) and analyzed using adsorption/thermal desorption coupled with gas chromatography-mass spectrometry (GC-MS). Optimal conditions lead to average recoveries in the range of 96.2-98.2%, and method detection limits between 0.38 and 0.78 ppb, under the condition of 1-l sampling volume and 80% relative humidity. The method appears to be accurate, sensitive, simple and well-suited for determining VOC distributions from various stages of LCD manufacturing process and temporal variations of the analyte concentrations. About 15 VOCs were identified in workplace air. The major pollutants such as propylene glycol methyl ether acetate (PGMEA), butyl acetate, and acetone that are commonly used in the opto-electronics industry were detected and accurately quantified with the established method.

Measurement of toxic volatile organic compounds in indoor air of semiconductor foundries using multisorbent adsorption/thermal desorption coupled with gas chromatography-mass spectrometry.

A method for the qualitative and quantitative analysis of volatile organic compounds (VOCs) in the air of class-100 clean rooms at semiconductor fabrication facilities was developed. Air samples from two semiconductor factories were collected each hour on multisorbent tubes (including Carbopack B, Carbopack C, and Carbosieve SIII) with a 24-h automatic active sampling system and analyzed using adsorption/thermal desorption coupled with gas chromatography-mass spectrometry. Experimental parameters, including thermal desorption temperature, desorption time, and cryofocusing temperature, were optimized. The average recoveries and the method detection limits for the target compounds were in the range 94-101% and 0.31-0.89 ppb, respectively, under the conditions of a 1 L sampling volume and 80% relative humidity. VOCs such as acetone, isopropyl alcohol, 2-heptanone, and toluene, which are commonly used in the semiconductor and electronics industries, were detected and accurately quantified with the established method. Temporal variations of the analyte concentrations observed were attributed to the improper use of organic solvents during operation.