X-ray multilayer monochromator with enhanced performance.

An x-ray multilayer monochromator with improved resolution and a low specular background is presented. The monochromator consists of a lamellar multilayer amplitude grating with appropriate parameters used at the zeroth diffraction order. The device is fabricated by means of combining deposition of thin films on a nanometer scale, UV lithography, and reactive ion etching. The performance of this new monochromator at photon energies near 1500 eV is shown.

Decomposition of Wavelength Dispersive X-Ray Spectra.

Line shapes of atomic lines and soft x-ray emission bands measured with a wavelength dispersive spectrometer (WDS) with the Electron Probe Micro Analyzer (EPMA) are reviewed. Least square fitting to pseudo-Voigt profiles of the digitally measured spectra are used to account for the presence of non-diagram features (high and low energy satellites) and instrumental induced distortions. The effect of line width and relative intensities on the quality of fits is illustrated. Spectral distortions resulting from the presence of absorption edges within the analyzed wavelength region are illustrated for the case of FeLα,ß emission bands for pure Fe and iron oxides. For quantitative analysis, an analytical approach is presented where the measured soft x-ray emission bands are corrected for self absorption before extracting the intensities from the experimental data.