ABSTRACT
We present a method for fabricating flexible multilayer circuits for interconnection to 2-D array ultrasound transducers. In addition, we describe four 2-D arrays in which such flexible interconnect is implemented, including transthoracic arrays with 438 channels operating at up to 7 MHz and intracardiac catheter arrays with 70 channels operating at up to 7 MHz. We employ thin and thick film microfabrication techniques to batch produce the interconnect circuits with minimum dimensions of 12-mum lines, 40-mum vias, and 150-mum array pitch. The arrays show 50-Omega insertion loss of -60 to -84 dB and a fractional bandwidth of 27 to 67%. The arrays are used to obtain real time, in vivo volumetric scans.
ABSTRACT
The design, fabrication, and evaluation of two dimensional array transducers for real-time volumetric imaging are described. The transducers we have previously described operated at frequencies below 3 MHz and were unwieldy to the operator because of the interconnect schemes used in connecting to the transducer handle. Several new transducers have been developed using new connection technology. A 40 x 40 = 1,600 element, 3.5 MHz array was fabricated with 256 transmit and 256 receive elements. A 60 x 60 = 3,600 element 5.0 MHz array was constructed with 248 transmit and 256 receive elements. An 80 x 80 = 6,400 element, 2.5 MHz array was fabricated with 256 transmit and 208receive elements. 2-D transducer arrays were also developed for volumetric scanning in an intra cardiac catheter, a 10 x 10 = 100 element 5.0 MHz forward-looking array and an 11 x 13 = 143 element 5.0 MHz side-scanning array. The-6dB fractional bandwidths for the different arrays varied from 50% to 63%, and the 50 omega insertion loss for all the transducers was about-64 dB. The transducers were used to generate real-time volumetric images in phantoms and in vivo using the Duke University real time volumetric imaging system, which is capable of generating multiple planes at any desired angle and depth within the pyramidal volume.
