ABSTRACT
We report the fabrication of low-loss, low temperature deposited polysilicon waveguides via laser crystallization. The process involves pre-patterning amorphous silicon films to confine the thermal energy during the crystallization phase, which helps to control the grain growth and reduce the heat transfer to the surrounding media, making it compatible with CMOS integration. Micro-Raman spectroscopy, Secco etching and X-ray diffraction measurements reveal the high crystalline quality of the processed waveguides with the formation of millimeter long crystal grains. Optical losses as low as 5.3 dB/cm have been measured, indicating their suitability for the development of high-density integrated circuits.
ABSTRACT
Reported here is the fabrication of tapered silicon core fibers possessing a nano-spike input that facilitates their seamless splicing to conventional single mode fibers. A proof-of-concept 30 µm cladding diameter fiber-based device is demonstrated with nano-spike coupling and propagation losses below 4 dB and 2 dB/cm, respectively. Finite-element-method-based simulations show that the nano-spike coupling losses could be reduced to below 1 dB by decreasing the cladding diameters down to 10 µm. Such efficient and robust integration of the silicon core fibers with standard fiber devices will help to overcome significant barriers for all-fiber nonlinear photonics and optoelectronics.
