Vertical van der Waals heterojunction diodes comprising 2D semiconductors on 3D ß-Ga2O3.

Wide bandgap semiconductors such as gallium oxide (Ga2O3) have attracted much attention for their use in next-generation high-power electronics. Although single-crystal Ga2O3 substrates can be routinely grown from melt along various orientations, the influence of such orientations has been seldom reported. Further, making rectifying p-n diodes from Ga2O3 has been difficult due to lack of p-type doping. In this study, we fabricated and optimized 2D/3D vertical diodes on ß-Ga2O3 by varying the following three factors: substrate planar orientation, choice of 2D material and metal contacts. The quality of our devices was validated using high-temperature dependent measurements, atomic-force microscopy (AFM) techniques and technology computer-aided design (TCAD) simulations. Our findings suggest that 2D/3D ß-Ga2O3 vertical heterojunctions are optimized by substrate planar orientation (-201), combined with 2D WS2 exfoliated layers and Ti contacts, and show record rectification ratios (>106) concurrently with ON-Current density (>103 A cm-2) for application in power rectifiers.

High-Photoresponsivity Self-Powered a-, ε-, and ß-Ga2O3/p-GaN Heterojunction UV Photodetectors with an In Situ GaON Layer by MOCVD.

In this paper, self-powered ultraviolet (UV) photodetectors with high response performance based on Ga2O3/p-GaN were fabricated by metal-organic chemical vapor deposition (MOCVD). The effects of different crystal phases of Ga2O3 (including a, ε, ε/ß, and ß) grown on p-GaN films on the performance of photodetectors were systematically studied. Moreover, an in situ GaON dielectric layer improved the responsivity of Ga2O3/p-GaN photodetectors by 20 times. All Ga2O3/p-GaN photodetectors showed self-power capability without bias. An ultralow dark current of 3.08 pA and a Iphoto/Idark ratio of 4.1 × 103 (1.8 × 103) under 254 nm (365 nm) light were obtained for the ß-Ga2O3/p-GaN photodetector at 0 V bias. Furthermore, the ß-Ga2O3/p-GaN photodetector showed excellent sensitivity with a high responsivity of 3.8 A/W (0.83 A/W), a fast response speed of 66/36 ms (36/73 ms), and a high detectivity of 1.12 × 1014 Jones (2.44 × 1013 Jones) under 254 nm (365 nm) light at 0 V bias. The carrier transport mechanism of the Ga2O3/p-GaN self-powered photodetector was also analyzed through the device energy band diagram. This work provides critical information for the design and fabrication of high-performance self-powered Ga2O3/p-GaN UV photodetectors, opening the door to a variety of photonic systems and applications without an external power supply.

Study of crystalline defect induced optical scattering loss inside photonic waveguides in UV-visible spectral wavelengths using volume current method.

In this work, we study the crystalline defect induced optical scattering loss inside photonic waveguide. Volume current method is implemented with a close form of dyadic Green's function derived. More specifically, threading dislocation induced scattering loss inside AlN waveguides in UV-visible spectrum wavelengths are studied since this material is intrinsically accompanied with high densities of dislocations (typically on order of 108-1010cm-2). The results from this study reveal that threading dislocations contribute significant amount of scattering loss when material is not MOCVD grown. Additionally, the scattering loss is strongly dependent on polarization and waveguide geometries: TM modes exhibit higher scattering loss compared with TE modes, and the multimode large core waveguides are more susceptible to threading dislocations compared with single mode waveguides and high-aspect-ratio waveguides. Conclusions from this work can be supported by several recently published investigations on III-N based photonic devices. The model derived from this work can also be easily altered to fit other material systems with other types of crystalline defects.

Steep-slope field-effect transistors with AlGaN/GaN HEMT and oxide-based threshold switching device.

We report the demonstration of a steep-slope field-effect transistor with AlGaN/GaN MIS-HEMTs employing SiO2-based threshold switching devices in series with the source. The SiO2-based threshold switching devices exhibited steep slope when changing resistance states. The integrated steep-slope transistor showed a low subthreshold swing of sub-5 mV/dec with a transition range of over 105 in the transfer characteristics in both sweep directions at room temperature, as well as the low leakage current (10-5 µA µm-1) and a high I ON/I OFF ratio (>107). Moreover, with the SiO2-based threshold switching devices we also observed a positive shift of threshold voltages of the integrated device. Results from more than 50 transfer characteristics measurements also indicate the good repeatability and practicability of such a steep-switching device, where the average steep slopes are below 10 mV/decade. This steep-slope transistor with oxide-based threshold switching devices can be further extended to various transistor platforms like Si and III-V and are of potential interest for the development of power switching and high frequency devices.

Characterizations of the nonlinear optical properties for (010) and (2¯01) beta-phase gallium oxide.

We report, for the first time, the characterizations on optical nonlinearities of beta-phase gallium oxide (ß-Ga2O3), where both (010) ß-Ga2O3 and (2¯01) ß-Ga2O3 were examined for two-photon absorption coefficient, Kerr nonlinear refractive index, and their polarization dependence. The wavelength dependence of two-photo absorption coefficient and Kerr nonlinear refractive index were also estimated by a widely used analytical model. ß-Ga2O3 exhibits a two photon absorption (TPA) coefficient of 1.2 cm/GW for (010) ß-Ga2O3 and 0.6 cm/GW for (2¯01) ß-Ga2O3. The Kerr nonlinear refractive index is -2.1 × 10-15 cm2/W for (010) ß-Ga2O3 and -2.9 × 10-15 cm2/W for (2¯01) ß-Ga2O3. In addition, ß-Ga2O3 shows stronger in-plane nonlinear optical anisotropy on (2¯01) plane than on (010) plane. Compared with GaN, TPA coefficient of ß-Ga2O3 is 20 times smaller, and the Kerr nonlinear refractive index of ß-Ga2O3 is also found to be 4-5 times smaller. These results indicate that ß-Ga2O3 have the potential for ultra-low loss waveguides and ultra-stable resonators and integrated photonics, especially in UV and visible wavelength spectral range.

Low loss GaN waveguides at the visible spectral wavelengths for integrated photonics applications.

We perform comprehensive studies on the fundamental loss mechanisms in III-nitride waveguides in the visible spectral region. Theoretical analysis shows that free carrier loss dominates for GaN under low photon power injection. When optical power increases, the two photon absorption loss becomes important and eventually dominates when photon energy above half-bandgap of GaN. When the dimensions of the waveguides reduce, the sidewall scattering loss will start to dominate. To verify the theoretical results, a high performance GaN-on-sapphire waveguide was fabricated and characterized. Experimental results are consistent with the theoretical findings, showing that under high power injection the optical loss changed significantly for GaN waveguides. A low optical loss ~2 dB/cm was achieved on the GaN waveguide, which is the lowest value ever reported for the visible spectral range. The results and fabrication processes developed in this work pave the way for the development of III-nitride integrated photonics in the visible and potentially ultraviolet spectral range for nonlinear optics and quantum photonics applications.

Variable self-powered light detection CMOS chip with real-time adaptive tracking digital output based on a novel on-chip sensor.

This paper provides a solution for a self-powered light direction detection with digitized output. Light direction sensors, energy harvesting photodiodes, real-time adaptive tracking digital output unit and other necessary circuits are integrated on a single chip based on a standard 0.18 µm CMOS process. Light direction sensors proposed have an accuracy of 1.8 degree over a 120 degree range. In order to improve the accuracy, a compensation circuit is presented for photodiodes' forward currents. The actual measurement precision of output is approximately 7 ENOB. Besides that, an adaptive under voltage protection circuit is designed for variable supply power which may undulate with temperature and process.

Active tracking system for visible light communication using a GaN-based micro-LED and NRZ-OOK.

Visible light communication (VLC) holds the promise of a high-speed wireless network for indoor applications and competes with 5G radio frequency (RF) system. Although the breakthrough of gallium nitride (GaN) based micro-light-emitting-diodes (micro-LEDs) increases the -3dB modulation bandwidth exceptionally from tens of MHz to hundreds of MHz, the light collected onto a fast photo receiver drops dramatically, which determines the signal to noise ratio (SNR) of VLC. To fully implement the practical high data-rate VLC link enabled by a GaN-based micro-LED, it requires focusing optics and a tracking system. In this paper, we demonstrate an active on-chip tracking system for VLC using a GaN-based micro-LED and none-return-to-zero on-off keying (NRZ-OOK). Using this novel technique, the field of view (FOV) was enlarged to 120° and data rates up to 600 Mbps at a bit error rate (BER) of 2.1×10-4 were achieved without manual focusing. This paper demonstrates the establishment of a VLC physical link that shows enhanced communication quality by orders of magnitude, making it optimized for practical communication applications.

Optical properties of highly polarized InGaN light-emitting diodes modified by plasmonic metallic grating.

We implement finite-difference time-domain (FDTD) method to simulate the optical properties of highly polarized InGaN light emitting diodes (LEDs) coupled with metallic grating structure. The Purcell factor (Fp), light extraction efficiency (LEE), internal quantum efficiency (IQE), external quantum efficiency (EQE), and modulation frequency are calculated for different polarized emissions. Our results show that light polarization has a strong impact on Fp and LEE of LEDs due to their coupling effects with the surface plasmons (SPs) generated by metallic grating. Fp as high as 34 and modulation frequency up to 5.4 GHz are obtained for a simulated LED structure. Furthermore, LEE, IQE and EQE can also be enhanced by tuning the coupling between polarized emission and SPs. These results can serve as guidelines for the design and fabrication of high efficiency and high speed LEDs for the applications of solid-state lighting and visible-light communication.