Plasmonic properties of aluminum nanorings generated by double patterning.

In this Letter we evaluate a technique for the efficient and flexible generation of aluminum nanorings based on double patterning and variable shaped electron beam lithography. The process is demonstrated by realizing nanorings with diameters down to 90 nm and feature sizes of 30 nm utilizing a writing speed of one ring per microsecond. Because of redepositions caused by involved etching processes, the material of the rings and, therefore, the impact on the plasmonic properties, are unknown. This issue, which is commonly encountered when metals are nanostructured, is solved by adapting a realistic simulation model that accounts for geometry details and effective material properties. Based on this model, the redepositions are quantified, the plasmonic properties are investigated, and a design tool for the very general class of nanofabrication techniques involving the etching of metals is provided.

Optimization and characterization of a highly-efficient diffraction nanograting for MHz XUV pulses.

We designed, fabricated and characterized a nano-periodical highly-efficient blazed grating for extreme-ultraviolet (XUV) radiation. The grating was optimized by the rigorous coupled-wave analysis method (RCWA) and milled into the top layer of a highly-reflective mirror for IR light. The XUV diffraction efficiency was determined to be around 20% in the range from 35.5 to 79.2 nm. The effects of the nanograting on the reflectivity of the IR light and non-linear effects introduced by the nanograting have been measured and are discussed.

Investigation on the properties of a laminar grating as a soft x-ray beam splitter.

Laminar-type gratings as soft x-ray beam splitters for interferometry are presented. Gold-coated grating beam splitters with 1000 lines/mm are designed for grazing incidence operation at 13.9 nm. They are routinely fabricated using electron beam lithography and ion etching techniques. The laminar grating is measured to have almost equal absolute efficiencies of about 20% in the zeroth and -1st orders, which enables a fringe visibility up to 0.99 in the interferometer. The discrepancy of the grating profiles between the optimized theoretical and the experimental results is analyzed according to the comparison of the optimized simulation results and the measurement realization of the grating efficiencies. By a precise control of the grating profile, the grating efficiency in the -1st order and the fringe visibility could be improved to 25% and 1, respectively.

Narrowband, polarization-independent free-space wave notch filter.

A two-dimensional-corrugated-slab-waveguide add/drop filter providing 100% resonant reflection at 1.55 microm wavelength for both TE and TM polarizations with identical FWHM is designed. The fabricated device exhibits a reflectivity spectrum of more than 95% peak reflection for both polarizations at 1.537 microm. The coupling scheme involves the TE0 guided mode only; it is made relatively tolerant by means of a double-sided crossed grating.

Diffractive optical isolator made of high-efficiency dielectric gratings only.

The working principle of an optical isolator made of two corrugated dielectric gratings is introduced. One grating acts as a polarizer, and the other acts as a quarter-wave plate used in conical incidence converting linearly polarized light into circularly polarized light. Global maxima of diffraction efficiency for surface-corrugated gratings with binary, sinusoidal, and pyramidal ridge shapes with dependence on the material index are identified. Regarding technological feasibility for use in the visible wavelength range, high-frequency gratings with a binary shape were realized. With these gratings, an extinction ratio of more than 40 dB for the polarizer is theoretically possible, and more than 20 dB was experimentally achieved. A good correlation between theoretically calculated efficiencies and birefringences based on rigorous methods and the experimental results is demonstrated.