Impact of Pulse Parameters of a DC Power Generator on the Microstructural and Mechanical Properties of Sputtered AlN Film with In-Situ OES Data Analysis.

In the present study, the sputtered aluminum nitride (AlN) films were processed in a reactive pulsed DC magnetron system. We applied a total of 15 different design of experiments (DOEs) on DC pulsed parameters (reverse voltage, pulse frequency, and duty cycle) with Box-Behnken experimental method and response surface method (RSM) to establish a mathematical model by experimental data for interpreting the relationship between independent and response variables. For the characterization of AlN films on the crystal quality, microstructure, thickness, and surface roughness, X-ray diffraction (XRD), atomic force microscopy (AFM), and field emission-scanning electron microscopy (FE-SEM) were utilized. AlN films have different microstructures and surface roughness under different pulse parameters. In addition, in-situ optical emission spectroscopy (OES) was employed to monitor the plasma in real-time, and its data were analyzed by principal component analysis (PCA) for dimensionality reduction and data preprocessing. Through the CatBoost modeling and analysis, we predicted results from XRD in full width at half maximum (FWHM) and SEM in grain size. This investigation identified the optimal pulse parameters for producing high-quality AlN films as a reverse voltage of 50 V, a pulse frequency of 250 kHz, and a duty cycle of 80.6061%. Additionally, a predictive CatBoost model for obtaining film FWHM and grain size was successfully trained.

Acoustic Performance of Stress Gradient-Induced Deflection of Triangular Unimorphic/Bimorphic Cantilevers for MEMS Applications.

This paper reports two piezoelectric materials of lead zirconium titanate (PZT) and aluminum nitride (AlN) used to simulate microelectromechanical system (MEMS) speakers, which inevitably suffered deflections as induced via the stress gradient during the fabrication processes. The main issue is the vibrated deflection from the diaphragm that influences the sound pressure level (SPL) of MEMS speakers. To comprehend the correlation between the geometry of the diaphragm and vibration deflection in cantilevers with the same condition of activated voltage and frequency, we compared four types of geometries of cantilevers including square, hexagon, octagon, and decagon in triangular membranes with unimorphic and bimorphic composition by utilizing finite element method (FEM) for physical and structural analyses. The size of different geometric speakers did not exceed 10.39 mm2; the simulation results reveal that under the same condition of activated voltage, the associated acoustic performance, such as SPL for AlN, is in good comparison with the simulation results of the published literature. These FEM simulation results of different types of cantilever geometries provide a methodology design toward practical applications of piezoelectric MEMS speakers in the acoustic performance of stress gradient-induced deflection in triangular bimorphic membranes.

A Comparison and Analysis of Three Methods of Aluminum Crown Forgings in Processing Optimization.

In this study, three parameter optimization methods and two designs of experiments (DOE) were used for the optimization of three major design parameters ((bill diameter (D), billet length (L), and barrier wall design (BWD)) in crown forging to improve the formability of aluminum workpiece for shock absorbers. The first optimization method is the response surface method (RSM) combined with Box-Behnken's experimental design to establish fifteen (15) sets of parameter combinations for research. The second one is the main effects plot method (MEP). The third one is the multiobjective optimization method combined with Taguchi's experimental design method, which designed nine (9) parameter combinations and conducted research and analysis through grey relational analysis (GRA). Initially, a new type of forging die and billet in the controlled deformation zone (CDZ) was established by CAD (computer-aided design) modeling and the finite element method (FEM) for model simulation. Then, this investigation showed that the optimal parameter conditions obtained by these three optimization approaches (RSM, MEP, and multiobjective optimization) are consistent, with the same results. The best optimization parameters are the dimension of the billet ((D: 40 mm, the length of the billet (L): 205 mm, and the design of the barrier wall (BWD): 22 mm)). The results indicate that the optimization methods used in this research all have a high degree of accuracy. According to the research results of grey relational analysis (GRA), the size of the barrier wall design (BWD) in the controllable deformation zone (CDZ) has the greatest influence on the improvement of the preforming die, indicating that it is an important factor to increase the filling rate of aluminum crown forgings. At the end, the optimized parameters are verified by FEM simulation analysis and actual production validation as well as grain streamline distribution, processing map, and microstructure analysis on crown forgings. The novelty of this work is that it provides a novel preforming die through the mutual verification of different optimization methods to solve a typical problem such as material underfill.

Tiny Piezoelectric Multi-Layered Actuators with Application in a Compact Camera Module-Design, Fabrication, Assembling and Testing Issues.

Piezoelectric actuators with multi-layer structures have largely gained attention from academic and industry experts. This is due to its distinctive advantages of fast response time, huge generative force and the inherent good planar electromechanical coupling factor, as well as other mechanical qualities. Typically, lead zirconate titanate (PZT) is one of the most represented piezoelectric ceramic materials that have been used for multi-layer piezoelectric actuators. Piezoelectric multi-layered actuators (PMLAs) were developed vigorously in the past decades due to the emergence of portable devices, such as smartphones with a highly compact camera module (CCM) and an image stabilizer (IS). This study reviewed the progress made in the field of PMLA applications, with a particular focus on the miniaturized dimensions and associated generated output force, speed and maximum output power requirement for various loads. Several commercial attempts, such as Helimorph, Lobster and the two-degrees-of-freedom ultrasonic motor (USM), were investigated. The proposed simple bimorph and multi-layer bimorph USMs experimentally showed thrust as high as 3.08 N and 2.57 N with good free speed and structural thicknesses of 0.7 and 0.6 mm, respectively. When compared with the other 14 reported linear USMs, they ranked as the top 1 and 2 in terms of the thrust-to-volume ratio. The proposed design shows great potential for cellphone camera module application, especially in moving sensor image stabilization. This study also provided outlooks for future developments for piezoelectric materials, configurations, fabrication and applications.

Machine Learning Assisted Classification of Aluminum Nitride Thin Film Stress via In-Situ Optical Emission Spectroscopy Data.

In this study, we submit a complex set of in-situ data collected by optical emission spectroscopy (OES) during the process of aluminum nitride (AlN) thin film. Changing the sputtering power and nitrogen(N2) flow rate, AlN film was deposited on Si substrate using a superior sputtering with a pulsed direct current (DC) method. The correlation between OES data and deposited film residual stress (tensile vs. compressive) associated with crystalline status by X-ray diffraction spectroscopy (XRD), scanning electron microscope (SEM), and transmission electron microscope (TEM) measurements were investigated and established throughout the machine learning exercise. An important answer to know is whether the stress of the processing film is compressive or tensile. To answer this question, we can access as many optical spectra data as we need, record the data to generate a library, and exploit principal component analysis (PCA) to reduce complexity from complex data. After preprocessing through PCA, we demonstrated that we could apply standard artificial neural networks (ANNs), and we could obtain a machine learning classification method to distinguish the stress types of the AlN thin films obtained by analyzing XRD results and correlating with TEM microstructures. Combining PCA with ANNs, an accurate method for in-situ stress prediction and classification was created to solve the semiconductor process problems related to film property on deposited films more efficiently. Therefore, methods for machine learning-assisted classification can be further extended and applied to other semiconductors or related research of interest in the future.

Hybrid nano-textured nanogenerator and self-powered sensor for on-skin triggered biomechanical motions.

Researchers have made a lot of effort for the lightweight and high flexibility of wearable electronic devices, which also requires the associated energy harvesting equipment to have ultra-thin thickness and high stretchability. Therefore, a piezoelectric-triboelectric hybrid self-powered sensor (PTHS) has been proposed which can be used as the second layer of the human body. This elastic PTHS can even work on a person's fingers without disturbing the body's movements. The open circuit voltage and short circuit current of devices with a projected area of 30 mm × 25 mm can reach 1.2 V and 30 nA, respectively. Two piezoelectrically-triboelectrically sensors with machine learning optimized identification strategies were experimentally proven as the potential applications of the PTHS. The PTHS's ultra-thin thickness, high stretchability and superior geometry control features are promising in electronic skin, artificial muscle and soft robotics. The novelty of this work is that a smart mask integrated with PTHS can generate a signal of the hybrid sensor for the biomechanical motion classifier. After suitable training, an overall accuracy of 87.9% using long short-term memory can be achieved.

Effects of Etching Variations on Ge/Si Channel Formation and Device Performance.

During the formation of Ge fin structures on a silicon-on-insulator (SOI) substrate, we found that the dry etching process must be carefully controlled. Otherwise, it may lead to Ge over-etching or the formation of an undesirable Ge fin profile. If the etching process is not well controlled, the top Ge/SOI structure is etched away, and only the Si fin layer remains. In this case, the device exhibits abnormal characteristics. The etching process is emerging as a critical step in device scaling and packaging and affects attempts to increase the packing density and improve device performance. Therefore, it is suggested that optimization of operating the plasma reactor be performed through simulations, in order to not only adjust the process parameters used but also to modify the hardware employed. We are going to develop Ge junction-less devices by employing updated fabrication parameters. Besides, we want to eliminate misfit dislocations at the interface or to reduce threading dislocations by applying cyclic thermal annealing process to meet the goal of obtaining suspended structure of epitaxial Ge layers with high quality.

Near-Field Electrospun Piezoelectric Fibers as Sound-Sensing Elements.

A novel integration of three-dimensional (3D) architectures of near-field electrospun polyvinylidene fluoride (PVDF) nano-micro fibers (NMFs) is applied to an intelligent self-powered sound-sensing element (ISSE). Using 3D architecture with greatly enhanced piezoelectric output, the sound wave energy can be harvested under a sound pressure of 120+ dB SPL of electrical signal about 0.25 V. Furthermore, the simple throat vibrations such as hum, cough and swallow with different intensity or frequency can be distinguishably detected. Finally, the developed ultrathin ISSE of near-field electrospun piezoelectric fibers has the advantage of direct-write fabrication on highly flexible substrates and low cost. The proposed technique demonstrates the advancement of existing electrospinning technologies in new practical applications of sensing purposes such as voice control, wearable electronics, implantable human wireless technology.

Ball-Milled Recycled Lead-Graphite Pencils as Highly Stretchable and Low-Cost Thermal-Interface Materials.

A simple and sustainable production of nanoplatelet graphite at low cost is presented using carbon-based materials, including the recycled lead-graphite pencils. In this work, exfoliated graphite nanoplatelets (EGNs), ball-milled exfoliated graphite nanoplatelets (BMEGNs) and recycled lead-graphite pencils (recycled 2B), as well as thermally cured polydimethylsiloxane (PDMS), are used to fabricate highly stretchable thermal-interface materials (TIMs) with good thermally conductive and mechanically robust properties. Several characterization techniques including scanning electron microscopy (SEM) and thermogravimetric analysis (TGA) showed that recycled nanoplatelet graphite with lateral size of tens of micrometers can be reliably produced. Experimentally, the thermal conductivity was measured for EGNs, BMEGNs and recycled 2B fillers with/without the effect of ball milling. The in-plane thermal conductivities of 12.97 W/mK (EGN), 13.53 W/mK (recycled 2B) and 14.56 W/mK (BMEGN) and through-plane thermal conductivities of 0.76 W/mK (EGN), 0.84 W/mK (recycled 2B) and 0.95 W/mK (BMEGN) were experimentally measured. Anisotropies were calculated as 15.31, 15.98 and 16.95 for EGN, recycled 2B and BMEGN, respectively. In addition, the mechanical robustness of the developed TIMs is such that they are capable of repeatedly bending at 180 degrees with outstanding flexibility, including the low-cost renewable material of recycled lead-graphite pencils. For heat dissipating application in high-power electronics, the TIMs of recycled 2B are capable of effectively reducing temperatures to approximately 6.2 °C as favorably compared with thermal grease alone.

Self-Powered Pressure Sensor with fully encapsulated 3D printed wavy substrate and highly-aligned piezoelectric fibers array.

Near-field electrospinning (NFES) is capable of precisely deposit one-dimensional (1D) or two-dimensional (2D) highly aligned micro/nano fibers (NMFs) by electrically discharged a polymer solution. In this paper, a new integration of three-dimensional (3D) architectures of NFES electrospun polyvinylidene fluoride (PVDF) NMFs with the 3D printed topologically tailored substrate are demonstrated in a direct-write and in-situ poled manner, called wavy- substrate self-powered sensors (WSS). The fabrication steps are composed of the additive manufacture of 3D printed flexible and sinusoidal wavy substrate, metallization and NFES electrospun fibers in the 3D topology. This 3D architecture is capable of greatly enhancing the piezoelectric output. Finally, the proposed piezoelectrically integrated 3D architecture is applied to the self-powered sensors such as foot pressure measurement, human motion monitoring and finger-induced power generation. The proposed technique demonstrates the advancement of existing electrospinning technologies in constructing 3D structures and several promising applications for biomedical and wearable electronics.

A lab-on-phone instrument with varifocal microscope via a liquid-actuated aspheric lens (LAL).

In this paper, we introduce a novel concept of liquid-actuated aspheric lens (LAL) with a built-in aspheric polydimethylsiloxane lens (APL) to enable the design of compact optical systems with varifocal microscopic imaging. The varifocal lens module consists of a sandwiched structures such as 3d printed syringe pump functionally serves as liquid controller. Other key components include two acrylic cylinders, a rigid separator, a APL/membrane composite (APLMC) embedded PDMS membrane. In functional operation, the fluidic controller was driven to control the pressure difference and ALPMC deformation. The focal length can be changed through the pressure difference. This is achieved by the adjustment of volume change of injected liquid such that a widely tunable focal length. The proposed LAL can transform to 3 modes: microscopic mode (APLMC only), convex-concave mode and biconcave mode. It is noticeable that LAL in the operation of microscopic mode is tunable in focus via the actuation of APLMC (focal length is from 4.3 to 2.3 mm and magnification 50X) and can rival the images quality of commercial microscopes. A new lab-on-phone device is economically feasible and functionally versatile to offer a great potential in the point of care applications.

Self-Powered Active Sensor with Concentric Topography of Piezoelectric Fibers.

In this study, we demonstrated a flexible and self-powered sensor based on piezoelectric fibers in the diameter range of nano- and micro-scales. Our work is distinctively different from previous electrospinning research; we fabricated this apparatus precisely via near-field electrospinning which has a spectacular performance to harvest mechanical deformation in arbitrary direction and a novel concentrically circular topography. There are many piezoelectric devices based on electrospinning polymeric fibers. However, the fibers were mostly patterned in parallel lines and they could be actuated in limited direction only. To overcome this predicament, we re-arranged the parallel alignment into concentric circle pattern which made it possible to collect the mechanical energy whenever the deformation is along same axis or not. Despite the change of topography, the output voltage and current could still reach to 5 V and 400 nA, respectively, despite the mechanical deformation was from different direction. This new arbitrarily directional piezoelectric generator with concentrically circular topography (PGCT) allowed the piezoelectric device to harvest more mechanical energy than the one-directional alignment fiber-based devices, and this PGCT could perform even better output which promised more versatile and efficient using as a wearable electronics or sensor.

All-fiber transparent piezoelectric harvester with a cooperatively enhanced structure.

In this paper, we demonstrated a highly-flexible all-fiber based transparent piezoelectric harvester (ATPH) by using the direct-write, near-field electrospinning (NFES) technique and polyvinylidene fluoride (PVDF) micro/nano fibers (MNFs) as source materials. Here, we comprehensively show that transferred high performance transparent electrodes with Au-coated nanowire (NW) electrodes can be obtained using a facile and scalable combined fabrication route of both electrospinning and sputtering processes. Au-coated MNFs of a.c. 110 nm thick can significantly reduce junction resistance, which results in high transmittance (90%) at low sheet resistance (175 Ω sq(-1)). The Au-coated MNFs electrodes also show great flexibility and stretchability, which easily surpass the brittleness of indium tin oxide (ITO) films. Further improvement in ATPH performance was realized by rolling the device into a cylindrical shape, resulting in an increase in power output due to the cooperatively enhanced effect. The rolled ATPH with 0.34 cm diameter produces a high output voltage of ∼4.1 V, current ∼295 nA at a strain of 0.5% and 5 hz. This can efficiently run commercially available electronic components in a self-powered mode without any external electrical supply.

The control of cell orientation using biodegradable alginate fibers fabricated by near-field electrospinning.

For spatially controlling cell alignment, near field electrospinning (NFES) was developed to direct-write alginate fiber patterns. Compared to randomly electrospun fibers, NFES fibers guided the extension of HEK 293T cells and the levels of cell alignment increased with decreasing fiber distances. However, these guiding fibers were unfavorable for cell adhesion and limited cell growth. To preserve cell alignment ability and improve biocompatibility, the stability of patterned alginate fibers was adjusted by regulating the level of ion crosslinking. These partially crosslinked NFES fibers demonstrated parallel line-patterns in the initial stage while gradually degraded with time. The reduction of fiber density increased the available area for cell growth and enhanced cell viability. On the other hand, aligned cells were still found on these degraded patterns, suggesting that cell morphologies were mainly guided during cell seeding. This dynamically controlled fiber pattern system fulfilled the need of controlling cell orientation and biocompatibility, thus was potential to modify scaffold surfaces for tissue engineering application.

A Transparent and Flexible Graphene-Piezoelectric Fiber Generator.

Piezoelectric fiber-based generators are prepared by combining two distinctive materials - poly(vinlyidene fluoride) fibers and monolayer/bilayer graphene. Novelty lies in the replacement of opaque metal electrodes with transparent graphene electrodes which enable the graphene-piezoelectric fiber generator to exhibit high flexibility and transparency as well as a great performance with an achievable output of voltage/current about 2 V/200 nA.

Highly flexible self-powered sensors based on printed circuit board technology for human motion detection and gesture recognition.

In this paper, we demonstrate a new integration of printed circuit board (PCB) technology-based self-powered sensors (PSSs) and direct-write, near-field electrospinning (NFES) with polyvinylidene fluoride (PVDF) micro/nano fibers (MNFs) as source materials. Integration with PCB technology is highly desirable for affordable mass production. In addition, we systematically investigate the effects of electrodes with intervals in the range of 0.15 mm to 0.40 mm on the resultant PSS output voltage and current. The results show that at a strain of 0.5% and 5 Hz, a PSS with a gap interval 0.15 mm produces a maximum output voltage of 3 V and a maximum output current of 220 nA. Under the same dimensional constraints, the MNFs are massively connected in series (via accumulation of continuous MNFs across the gaps ) and in parallel (via accumulation of parallel MNFs on the same gap) simultaneously. Finally, encapsulation in a flexible polymer with different interval electrodes demonstrated that electrical superposition can be realized by connecting MNFs collectively and effectively in serial/parallel patterns to achieve a high current and high voltage output, respectively. Further improvement in PSSs based on the effect of cooperativity was experimentally realized by rolling-up the device into a cylindrical shape, resulting in a 130% increase in power output due to the cooperative effect. We assembled the piezoelectric MNF sensors on gloves, bandages and stockings to fabricate devices that can detect different types of human motion, including finger motion and various flexing and extensions of an ankle. The firmly glued PSSs were tested on the glove and ankle respectively to detect and harvest the various movements and the output voltage was recorded as ∼1.5 V under jumping movement (one PSS) and ∼4.5 V for the clenched fist with five fingers bent concurrently (five PSSs). This research shows that piezoelectric MNFs not only have a huge impact on harvesting various external sources from mechanical energy but also can distinguish different motions as a self-powered active deformation sensor.

Novel dual-function lens with microscopic and vari-focus capability incorporated with an aberration-suppression aspheric lens.

Substantial aberrations are ubiquitous in many conventional adaptive lenses due to the existence of deformable interface and thus inevitably compromise the optical performance. In this paper, we introduce a novel concept of dual-function fluidic lenses (DFFL) with a built-in aspheric polydimethylsiloxane lens (APL) to enable the design of a compact optical system with tunable imaging and aberration suppression properties. This is achieved by varying both hydrostatic pressures (i.e. adjusting the injected liquid volume change) such that a widely tunable focal length and the simultaneously integrated APL for aberrations correction. DFFL can transform to 4 modes: microscopic mode (APL only), APL/concave mode, APL/plano mode, and APL/convex mode. Focal tunability of DFFL from 12/8 mm to about 90/65 mm (DI water/ethanol) is demonstrated without any mechanical moving components. Aberration characterization is carried out systematically and the low cost, high performance microscopic mode can be easily achieved by actuating the contact between APL and PDMS membrane. In addition, DFFL turning to microscopic mode (focal length 7.32 mm and magnification 50X) can rival the images quality of commercial microscopes.

Hybrid Energy Harvester Consisting of Piezoelectric Fibers with Largely Enhanced 20 V for Wearable and Muscle-Driven Applications.

We present a polyvinylidene fluoride (PVDF) nanogenerator (NG) with advantages of direct writing and in situ poling via near-field electrospinning (NFES), which is completely location addressable and substrate independent. The maximum output voltage reached 20 V from the three layers piled NGs with serial connections, and the maximum output current can exceed 390 nA with the parallel integration setup. Linear superposition and switching polarity of current and voltage tests were validated by the authentic piezoelectric output. Nanofiber (NF)-based devices with a length ∼5 cm can be easily attached on the human finger under folding-releasing at ∼45°, and the output voltage and current can reach 0.8 V and 30 nA, respectively. This work based on NFs can potentially have a huge impact on harvesting various external sources from mechanical energies.

Rapid replication and facile modulation of subwavelength antireflective polymer film using injection nanomolding and optical property of multilayer coatings.

A rapid, cost-effective and high-throughput process for nanotexturing subwavelength structures with high uniformity using the polycarbonate (PC) is realized via injection nanomolding. The process enables the precise control of nanohole array (NHA) surface topography (nanohole depth, diameter, and periodicity) over large areas thereby presenting a highly versatile platform for fabricating substrates with user-defined, functional performance. Specifically, the optical property of the PC substrates were systematically characterized and tuned through the modulation of the depths of NHA. The aspect ratio submicron holes can be easily modulated and experimentally proven by simply adjusting the molding temperature. The nanotextured depths were reliably fabricated in the range of 200 to 400 nm with a period of approximately 700 nm. The fabricated PC films can reduce the reflectivity from an original bare film of 10.2% and 8.9% to 1.4% and 2.1% with 400-nm depth of nanoholes at the wavelength of 400 and 550 nm, respectively. Compared with conventional moth-like nanostructures with nanopillar arrays with heights adjustable only by an etching process, this paper proposes a facile route with submicron holes to achieve a similar antireflective function, with a significantly reduced time and facile height modulation capability. Furthermore, the effects of multilayer coatings of dielectric and metallic layers on the nanomolded NHA have been performed and potential sensing application is explored.

Direct-write, highly aligned chitosan-poly(ethylene oxide) nanofiber patterns for cell morphology and spreading control.

Near-field electrospinning has been demonstrated to be able to achieve direct-write and highly aligned chitosan nanofibers (CNF) with prescribed positioning density. Cell spreading in preferential direction could be observed on parallel-aligned nanofibers, and the CNF patterns were capable of guiding cell extension when the distances between them are 20 and 100 µm, respectively. Alignment of the cells was characterized according to their elongation and orientation using the fast Fourier transform data and binary image analysis. Parallel CNF indicates that the alignment values sequentially increased as a function of positioning density such that incrementally more aligned cells were closely related to the increasing CNF positioning density. These maskless, low-cost, and direct-write patterns can be facily fabricated and will be a promising tool to study cell-based research such as cell adhesion, spreading, and tissue architecture.