The status and perspectives of nanostructured materials and fabrication processes for wearable piezoresistive sensors.

The wearable sensors have attracted a growing interest in different markets, including health, fitness, gaming, and entertainment, due to their outstanding characteristics of convenience, simplicity, accuracy, speed, and competitive price. The development of different types of wearable sensors was only possible due to advances in smart nanostructured materials with properties to detect changes in temperature, touch, pressure, movement, and humidity. Among the various sensing nanomaterials used in wearable sensors, the piezoresistive type has been extensively investigated and their potential have been demonstrated for different applications. In this review article, the current status and challenges of nanomaterials and fabrication processes for wearable piezoresistive sensors are presented in three parts. The first part focuses on the different types of sensing nanomaterials, namely, zero-dimensional (0D), one-dimensional (1D), two-dimensional (2D), and three-dimensional (3D) piezoresistive nanomaterials. Then, in second part, their fabrication processes and integration are discussed. Finally, the last part presents examples of wearable piezoresistive sensors and their applications.

Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO2 Coating.

The chemical, structural, morphological, and optical properties of Al-doped TiO2 thin films, called TiO2/Al2O3 nanolaminates, grown by plasma-enhanced atomic layer deposition (PEALD) on p-type Si <100> and commercial SLG glass were discussed. High-quality PEALD TiO2/Al2O3 nanolaminates were produced in the amorphous and crystalline phases. All crystalline nanolaminates have an overabundance of oxygen, while amorphous ones lack oxygen. The superabundance of oxygen on the crystalline film surface was illustrated by a schematic representation that described this phenomenon observed for PEALD TiO2/Al2O3 nanolaminates. The transition from crystalline to amorphous phase increased the surface hardness and the optical gap and decreased the refractive index. Therefore, the doping effect of TiO2 by the insertion of Al2O3 monolayers showed that it is possible to adjust different parameters of the thin-film material and to control, for example, the mobility of the hole-electron pair in the metal-insulator-devices semiconductors, corrosion protection, and optical properties, which are crucial for application in a wide range of technological areas, such as those used to manufacture fluorescence biosensors, photodetectors, and solar cells, among other devices.